2/13/2013	7:27:07 AM	Helium valve closed
2/13/2013	7:27:07 AM	H2 valve closed
2/13/2013	7:27:07 AM	BCl3 valve closed
2/13/2013	7:27:07 AM	PH3 valve closed
2/13/2013	7:27:07 AM	SiCl4 pre valve closed
2/13/2013	7:27:07 AM	SiCl4 post valve closed
2/13/2013	7:27:07 AM	Main Vac valve closed
2/13/2013	7:27:07 AM	Bypass valve closed
2/13/2013	7:27:07 AM	Bubbler valve closed
2/13/2013	7:27:07 AM	Helium MFC set to  0.000000
2/13/2013	7:27:07 AM	H2 MFC set to  0.000000
2/13/2013	7:27:07 AM	BCl3 MFC set to  0.000000
2/13/2013	7:27:07 AM	PH3 MFC set to  0.000000
2/13/2013	7:27:07 AM	SiCl4 MFC set to  0.000000
2/13/2013	7:27:07 AM	Bypass solenoid MFC set to  0.000000
2/13/2013	7:27:08 AM	Tube furnace set to 0
2/13/2013	7:27:11 AM	Helium valve closed
2/13/2013	7:27:11 AM	BCl3 valve closed
2/13/2013	7:27:11 AM	PH3 valve closed
2/13/2013	7:27:11 AM	SiCl4 pre valve closed
2/13/2013	7:27:11 AM	SiCl4 post valve closed
2/13/2013	7:27:11 AM	Main Vac valve closed
2/13/2013	7:27:11 AM	Bypass valve closed
2/13/2013	7:27:11 AM	Bubbler valve closed
2/13/2013	7:27:11 AM	H2 valve opened
2/13/2013	7:27:11 AM	Helium MFC set to  0.000000
2/13/2013	7:27:11 AM	H2 MFC set to  500.000000
2/13/2013	7:27:11 AM	BCl3 MFC set to  0.000000
2/13/2013	7:27:11 AM	PH3 MFC set to  0.000000
2/13/2013	7:27:11 AM	SiCl4 MFC set to  0.000000
2/13/2013	7:27:11 AM	Bypass solenoid MFC set to  0.000000
2/13/2013	7:27:11 AM	Tube furnace set to 0
2/13/2013	7:28:23 AM	Helium valve closed
2/13/2013	7:28:23 AM	BCl3 valve closed
2/13/2013	7:28:23 AM	PH3 valve closed
2/13/2013	7:28:23 AM	SiCl4 pre valve closed
2/13/2013	7:28:23 AM	SiCl4 post valve closed
2/13/2013	7:28:23 AM	Main Vac valve closed
2/13/2013	7:28:23 AM	Bypass valve closed
2/13/2013	7:28:23 AM	H2 valve opened
2/13/2013	7:28:23 AM	Bubbler valve opened
2/13/2013	7:28:23 AM	Helium MFC set to  0.000000
2/13/2013	7:28:23 AM	H2 MFC set to  500.000000
2/13/2013	7:28:23 AM	BCl3 MFC set to  0.000000
2/13/2013	7:28:23 AM	PH3 MFC set to  0.000000
2/13/2013	7:28:23 AM	SiCl4 MFC set to  0.000000
2/13/2013	7:28:23 AM	Bypass solenoid MFC set to  0.000000
2/13/2013	7:28:23 AM	Tube furnace set to 0
2/13/2013	7:28:24 AM	Helium valve closed
2/13/2013	7:28:24 AM	BCl3 valve closed
2/13/2013	7:28:24 AM	PH3 valve closed
2/13/2013	7:28:24 AM	SiCl4 pre valve closed
2/13/2013	7:28:24 AM	SiCl4 post valve closed
2/13/2013	7:28:24 AM	Main Vac valve closed
2/13/2013	7:28:24 AM	Bypass valve closed
2/13/2013	7:28:24 AM	H2 valve opened
2/13/2013	7:28:24 AM	Bubbler valve opened
2/13/2013	7:28:24 AM	Helium MFC set to  0.000000
2/13/2013	7:28:24 AM	H2 MFC set to  500.000000
2/13/2013	7:28:24 AM	BCl3 MFC set to  0.000000
2/13/2013	7:28:24 AM	PH3 MFC set to  0.000000
2/13/2013	7:28:24 AM	SiCl4 MFC set to  0.000000
2/13/2013	7:28:24 AM	Bypass solenoid MFC set to  0.000000
2/13/2013	7:28:24 AM	Tube furnace set to 1000
2/13/2013	7:48:24 AM	Helium valve closed
2/13/2013	7:48:24 AM	BCl3 valve closed
2/13/2013	7:48:24 AM	Main Vac valve closed
2/13/2013	7:48:24 AM	Bypass valve closed
2/13/2013	7:48:24 AM	H2 valve opened
2/13/2013	7:48:24 AM	PH3 valve opened
2/13/2013	7:48:24 AM	SiCl4 pre valve opened
2/13/2013	7:48:24 AM	SiCl4 post valve opened
2/13/2013	7:48:24 AM	Bubbler valve opened
2/13/2013	7:48:24 AM	Helium MFC set to  0.000000
2/13/2013	7:48:24 AM	H2 MFC set to  450.000000
2/13/2013	7:48:24 AM	BCl3 MFC set to  0.000000
2/13/2013	7:48:24 AM	PH3 MFC set to  1.300000
2/13/2013	7:48:24 AM	SiCl4 MFC set to  50.000000
2/13/2013	7:48:24 AM	Bypass solenoid MFC set to  0.000000
2/13/2013	7:48:24 AM	Tube furnace set to 1000
2/13/2013	8:00:24 AM	Helium valve closed
2/13/2013	8:00:24 AM	BCl3 valve closed
2/13/2013	8:00:24 AM	PH3 valve closed
2/13/2013	8:00:24 AM	SiCl4 pre valve closed
2/13/2013	8:00:24 AM	SiCl4 post valve closed
2/13/2013	8:00:24 AM	Main Vac valve closed
2/13/2013	8:00:24 AM	Bypass valve closed
2/13/2013	8:00:24 AM	H2 valve opened
2/13/2013	8:00:24 AM	Bubbler valve opened
2/13/2013	8:00:24 AM	Helium MFC set to  0.000000
2/13/2013	8:00:24 AM	H2 MFC set to  500.000000
2/13/2013	8:00:24 AM	BCl3 MFC set to  0.000000
2/13/2013	8:00:24 AM	PH3 MFC set to  0.000000
2/13/2013	8:00:24 AM	SiCl4 MFC set to  0.000000
2/13/2013	8:00:24 AM	Bypass solenoid MFC set to  0.000000
2/13/2013	8:00:25 AM	Tube furnace set to 900
2/13/2013	8:05:24 AM	Helium valve closed
2/13/2013	8:05:24 AM	BCl3 valve closed
2/13/2013	8:05:24 AM	PH3 valve closed
2/13/2013	8:05:24 AM	SiCl4 pre valve closed
2/13/2013	8:05:24 AM	SiCl4 post valve closed
2/13/2013	8:05:24 AM	Main Vac valve closed
2/13/2013	8:05:25 AM	Bypass valve closed
2/13/2013	8:05:25 AM	H2 valve opened
2/13/2013	8:05:25 AM	Bubbler valve opened
2/13/2013	8:05:25 AM	Helium MFC set to  0.000000
2/13/2013	8:05:25 AM	H2 MFC set to  500.000000
2/13/2013	8:05:25 AM	BCl3 MFC set to  0.000000
2/13/2013	8:05:25 AM	PH3 MFC set to  0.000000
2/13/2013	8:05:25 AM	SiCl4 MFC set to  0.000000
2/13/2013	8:05:25 AM	Bypass solenoid MFC set to  0.000000
2/13/2013	8:05:25 AM	Tube furnace set to 800
2/13/2013	8:10:25 AM	Helium valve closed
2/13/2013	8:10:25 AM	BCl3 valve closed
2/13/2013	8:10:25 AM	PH3 valve closed
2/13/2013	8:10:25 AM	SiCl4 pre valve closed
2/13/2013	8:10:25 AM	SiCl4 post valve closed
2/13/2013	8:10:25 AM	Main Vac valve closed
2/13/2013	8:10:25 AM	Bypass valve closed
2/13/2013	8:10:25 AM	H2 valve opened
2/13/2013	8:10:25 AM	Bubbler valve opened
2/13/2013	8:10:25 AM	Helium MFC set to  0.000000
2/13/2013	8:10:25 AM	H2 MFC set to  500.000000
2/13/2013	8:10:25 AM	BCl3 MFC set to  0.000000
2/13/2013	8:10:25 AM	PH3 MFC set to  0.000000
2/13/2013	8:10:25 AM	SiCl4 MFC set to  0.000000
2/13/2013	8:10:25 AM	Bypass solenoid MFC set to  0.000000
2/13/2013	8:10:25 AM	Tube furnace set to 700
2/13/2013	8:15:25 AM	Helium valve closed
2/13/2013	8:15:25 AM	BCl3 valve closed
2/13/2013	8:15:25 AM	PH3 valve closed
2/13/2013	8:15:25 AM	SiCl4 pre valve closed
2/13/2013	8:15:25 AM	SiCl4 post valve closed
2/13/2013	8:15:25 AM	Main Vac valve closed
2/13/2013	8:15:25 AM	Bypass valve closed
2/13/2013	8:15:25 AM	H2 valve opened
2/13/2013	8:15:25 AM	Bubbler valve opened
2/13/2013	8:15:25 AM	Helium MFC set to  0.000000
2/13/2013	8:15:25 AM	H2 MFC set to  500.000000
2/13/2013	8:15:25 AM	BCl3 MFC set to  0.000000
2/13/2013	8:15:25 AM	PH3 MFC set to  0.000000
2/13/2013	8:15:25 AM	SiCl4 MFC set to  0.000000
2/13/2013	8:15:25 AM	Bypass solenoid MFC set to  0.000000
2/13/2013	8:15:25 AM	Tube furnace set to 600
2/13/2013	8:20:25 AM	H2 valve closed
2/13/2013	8:20:25 AM	BCl3 valve closed
2/13/2013	8:20:25 AM	PH3 valve closed
2/13/2013	8:20:25 AM	SiCl4 pre valve closed
2/13/2013	8:20:25 AM	SiCl4 post valve closed
2/13/2013	8:20:25 AM	Main Vac valve closed
2/13/2013	8:20:25 AM	Bypass valve closed
2/13/2013	8:20:25 AM	Helium valve opened
2/13/2013	8:20:25 AM	Bubbler valve opened
2/13/2013	8:20:25 AM	Helium MFC set to  500.000000
2/13/2013	8:20:25 AM	H2 MFC set to  0.000000
2/13/2013	8:20:25 AM	BCl3 MFC set to  0.000000
2/13/2013	8:20:25 AM	PH3 MFC set to  0.000000
2/13/2013	8:20:25 AM	SiCl4 MFC set to  0.000000
2/13/2013	8:20:25 AM	Bypass solenoid MFC set to  0.000000
2/13/2013	8:20:25 AM	Tube furnace set to 0
2/13/2013	8:40:25 AM	Helium valve closed
2/13/2013	8:40:25 AM	H2 valve closed
2/13/2013	8:40:25 AM	BCl3 valve closed
2/13/2013	8:40:25 AM	PH3 valve closed
2/13/2013	8:40:25 AM	SiCl4 pre valve closed
2/13/2013	8:40:25 AM	SiCl4 post valve closed
2/13/2013	8:40:25 AM	Main Vac valve closed
2/13/2013	8:40:25 AM	Bypass valve closed
2/13/2013	8:40:25 AM	Bubbler valve closed
2/13/2013	8:40:25 AM	Helium MFC set to  0.000000
2/13/2013	8:40:25 AM	H2 MFC set to  0.000000
2/13/2013	8:40:25 AM	BCl3 MFC set to  0.000000
2/13/2013	8:40:25 AM	PH3 MFC set to  0.000000
2/13/2013	8:40:25 AM	SiCl4 MFC set to  0.000000
2/13/2013	8:40:25 AM	Bypass solenoid MFC set to  0.000000
2/13/2013	8:40:25 AM	Tube furnace set to 0
2/13/2013	9:10:25 AM	Helium valve closed
2/13/2013	9:10:25 AM	H2 valve closed
2/13/2013	9:10:25 AM	BCl3 valve closed
2/13/2013	9:10:25 AM	PH3 valve closed
2/13/2013	9:10:25 AM	SiCl4 pre valve closed
2/13/2013	9:10:25 AM	SiCl4 post valve closed
2/13/2013	9:10:25 AM	Main Vac valve closed
2/13/2013	9:10:25 AM	Bubbler valve closed
2/13/2013	9:10:25 AM	Bypass valve opened
2/13/2013	9:10:25 AM	Helium MFC set to  0.000000
2/13/2013	9:10:25 AM	H2 MFC set to  0.000000
2/13/2013	9:10:25 AM	BCl3 MFC set to  0.000000
2/13/2013	9:10:25 AM	PH3 MFC set to  0.000000
2/13/2013	9:10:25 AM	SiCl4 MFC set to  0.000000
2/13/2013	9:10:25 AM	Bypass solenoid MFC set to  0.000000
2/13/2013	9:10:25 AM	Tube furnace set to 0
2/13/2013	9:11:23 AM	Helium valve closed
2/13/2013	9:11:23 AM	H2 valve closed
2/13/2013	9:11:23 AM	BCl3 valve closed
2/13/2013	9:11:23 AM	PH3 valve closed
2/13/2013	9:11:23 AM	SiCl4 pre valve closed
2/13/2013	9:11:23 AM	SiCl4 post valve closed
2/13/2013	9:11:23 AM	Main Vac valve closed
2/13/2013	9:11:23 AM	Bubbler valve closed
2/13/2013	9:11:23 AM	Bypass valve opened
2/13/2013	9:11:23 AM	Helium MFC set to  0.000000
2/13/2013	9:11:23 AM	H2 MFC set to  0.000000
2/13/2013	9:11:23 AM	BCl3 MFC set to  0.000000
2/13/2013	9:11:23 AM	PH3 MFC set to  0.000000
2/13/2013	9:11:23 AM	SiCl4 MFC set to  0.000000
2/13/2013	9:11:23 AM	Bypass solenoid MFC set to  0.000000
2/13/2013	9:11:23 AM	Tube furnace set to 0
2/13/2013	9:12:23 AM	Helium valve closed
2/13/2013	9:12:23 AM	H2 valve closed
2/13/2013	9:12:23 AM	BCl3 valve closed
2/13/2013	9:12:23 AM	PH3 valve closed
2/13/2013	9:12:23 AM	SiCl4 pre valve closed
2/13/2013	9:12:23 AM	SiCl4 post valve closed
2/13/2013	9:12:23 AM	Bypass valve closed
2/13/2013	9:12:23 AM	Bubbler valve closed
2/13/2013	9:12:23 AM	Main Vac valve opened
2/13/2013	9:12:23 AM	Helium MFC set to  0.000000
2/13/2013	9:12:23 AM	H2 MFC set to  0.000000
2/13/2013	9:12:23 AM	BCl3 MFC set to  0.000000
2/13/2013	9:12:23 AM	PH3 MFC set to  0.000000
2/13/2013	9:12:23 AM	SiCl4 MFC set to  0.000000
2/13/2013	9:12:23 AM	Bypass solenoid MFC set to  0.000000
2/13/2013	9:12:23 AM	Tube furnace set to 0
2/13/2013	9:12:24 AM	Run finished at 9:12 AM
2/13/2013	10:45:00 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/13/2013	10:45:00 AM	Recipe started at 10:45 AM
2/13/2013	10:45:00 AM	Helium valve closed
2/13/2013	10:45:00 AM	H2 valve closed
2/13/2013	10:45:00 AM	BCl3 valve closed
2/13/2013	10:45:00 AM	PH3 valve closed
2/13/2013	10:45:01 AM	SiCl4 pre valve closed
2/13/2013	10:45:01 AM	SiCl4 post valve closed
2/13/2013	10:45:01 AM	Main Vac valve closed
2/13/2013	10:45:01 AM	Bypass valve closed
2/13/2013	10:45:01 AM	Bubbler valve closed
2/13/2013	10:45:01 AM	Helium MFC set to  0.000000
2/13/2013	10:45:01 AM	H2 MFC set to  0.000000
2/13/2013	10:45:01 AM	BCl3 MFC set to  0.000000
2/13/2013	10:45:01 AM	PH3 MFC set to  0.000000
2/13/2013	10:45:01 AM	SiCl4 MFC set to  0.000000
2/13/2013	10:45:01 AM	Bypass solenoid MFC set to  0.000000
2/13/2013	10:45:01 AM	Tube furnace set to 0
2/13/2013	10:45:04 AM	H2 valve closed
2/13/2013	10:45:04 AM	BCl3 valve closed
2/13/2013	10:45:04 AM	PH3 valve closed
2/13/2013	10:45:04 AM	SiCl4 pre valve closed
2/13/2013	10:45:04 AM	SiCl4 post valve closed
2/13/2013	10:45:04 AM	Main Vac valve closed
2/13/2013	10:45:04 AM	Bypass valve closed
2/13/2013	10:45:04 AM	Bubbler valve closed
2/13/2013	10:45:04 AM	Helium valve opened
2/13/2013	10:45:04 AM	Helium MFC set to  500.000000
2/13/2013	10:45:04 AM	H2 MFC set to  0.000000
2/13/2013	10:45:04 AM	BCl3 MFC set to  0.000000
2/13/2013	10:45:04 AM	PH3 MFC set to  0.000000
2/13/2013	10:45:04 AM	SiCl4 MFC set to  0.000000
2/13/2013	10:45:04 AM	Bypass solenoid MFC set to  0.000000
2/13/2013	10:45:04 AM	Tube furnace set to 0
2/13/2013	10:46:13 AM	Helium valve closed
2/13/2013	10:46:13 AM	H2 valve closed
2/13/2013	10:46:13 AM	BCl3 valve closed
2/13/2013	10:46:13 AM	PH3 valve closed
2/13/2013	10:46:13 AM	SiCl4 pre valve closed
2/13/2013	10:46:14 AM	SiCl4 post valve closed
2/13/2013	10:46:14 AM	Main Vac valve closed
2/13/2013	10:46:14 AM	Bypass valve closed
2/13/2013	10:46:14 AM	Bubbler valve closed
2/13/2013	10:46:14 AM	Helium MFC set to  0.000000
2/13/2013	10:46:14 AM	H2 MFC set to  0.000000
2/13/2013	10:46:14 AM	BCl3 MFC set to  0.000000
2/13/2013	10:46:14 AM	PH3 MFC set to  0.000000
2/13/2013	10:46:14 AM	SiCl4 MFC set to  0.000000
2/13/2013	10:46:14 AM	Bypass solenoid MFC set to  0.000000
2/13/2013	10:46:14 AM	Tube furnace set to 0
2/13/2013	10:46:15 AM	Run finished at 10:46 AM
2/13/2013	10:46:15 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/13/2013	10:52:07 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/13/2013	10:52:08 AM	Recipe started at 10:52 AM
2/13/2013	10:52:08 AM	Helium valve closed
2/13/2013	10:52:08 AM	H2 valve closed
2/13/2013	10:52:08 AM	BCl3 valve closed
2/13/2013	10:52:08 AM	PH3 valve closed
2/13/2013	10:52:08 AM	SiCl4 pre valve closed
2/13/2013	10:52:08 AM	SiCl4 post valve closed
2/13/2013	10:52:08 AM	Main Vac valve closed
2/13/2013	10:52:08 AM	Bubbler valve closed
2/13/2013	10:52:08 AM	Bypass valve opened
2/13/2013	10:52:08 AM	Helium MFC set to  0.000000
2/13/2013	10:52:08 AM	H2 MFC set to  0.000000
2/13/2013	10:52:08 AM	BCl3 MFC set to  0.000000
2/13/2013	10:52:08 AM	PH3 MFC set to  0.000000
2/13/2013	10:52:08 AM	SiCl4 MFC set to  0.000000
2/13/2013	10:52:08 AM	Bypass solenoid MFC set to  0.000000
2/13/2013	10:52:08 AM	Tube furnace set to 0
2/13/2013	10:53:25 AM	Helium valve closed
2/13/2013	10:53:25 AM	H2 valve closed
2/13/2013	10:53:25 AM	BCl3 valve closed
2/13/2013	10:53:25 AM	PH3 valve closed
2/13/2013	10:53:25 AM	SiCl4 pre valve closed
2/13/2013	10:53:25 AM	SiCl4 post valve closed
2/13/2013	10:53:25 AM	Main Vac valve closed
2/13/2013	10:53:25 AM	Bubbler valve closed
2/13/2013	10:53:25 AM	Bypass valve opened
2/13/2013	10:53:25 AM	Helium MFC set to  0.000000
2/13/2013	10:53:25 AM	H2 MFC set to  0.000000
2/13/2013	10:53:25 AM	BCl3 MFC set to  0.000000
2/13/2013	10:53:25 AM	PH3 MFC set to  0.000000
2/13/2013	10:53:25 AM	SiCl4 MFC set to  0.000000
2/13/2013	10:53:25 AM	Bypass solenoid MFC set to  0.000000
2/13/2013	10:53:25 AM	Tube furnace set to 0
2/13/2013	10:54:25 AM	Helium valve closed
2/13/2013	10:54:25 AM	H2 valve closed
2/13/2013	10:54:25 AM	BCl3 valve closed
2/13/2013	10:54:25 AM	PH3 valve closed
2/13/2013	10:54:25 AM	SiCl4 pre valve closed
2/13/2013	10:54:25 AM	SiCl4 post valve closed
2/13/2013	10:54:25 AM	Bypass valve closed
2/13/2013	10:54:25 AM	Bubbler valve closed
2/13/2013	10:54:25 AM	Main Vac valve opened
2/13/2013	10:54:25 AM	Helium MFC set to  0.000000
2/13/2013	10:54:25 AM	H2 MFC set to  0.000000
2/13/2013	10:54:25 AM	BCl3 MFC set to  0.000000
2/13/2013	10:54:25 AM	PH3 MFC set to  0.000000
2/13/2013	10:54:25 AM	SiCl4 MFC set to  0.000000
2/13/2013	10:54:25 AM	Bypass solenoid MFC set to  0.000000
2/13/2013	10:54:25 AM	Tube furnace set to 0
2/13/2013	10:54:26 AM	Run finished at 10:54 AM
2/13/2013	10:54:26 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/13/2013	11:04:09 AM	Recipe started at 11:04 AM
2/13/2013	11:04:09 AM	Helium valve closed
2/13/2013	11:04:09 AM	H2 valve closed
2/13/2013	11:04:09 AM	BCl3 valve closed
2/13/2013	11:04:09 AM	PH3 valve closed
2/13/2013	11:04:09 AM	SiCl4 pre valve closed
2/13/2013	11:04:09 AM	SiCl4 post valve closed
2/13/2013	11:04:09 AM	Bypass valve closed
2/13/2013	11:04:09 AM	Bubbler valve closed
2/13/2013	11:04:09 AM	Main Vac valve opened
2/13/2013	11:04:09 AM	Helium MFC set to  0.000000
2/13/2013	11:04:09 AM	H2 MFC set to  0.000000
2/13/2013	11:04:09 AM	BCl3 MFC set to  0.000000
2/13/2013	11:04:09 AM	PH3 MFC set to  0.000000
2/13/2013	11:04:09 AM	SiCl4 MFC set to  0.000000
2/13/2013	11:04:10 AM	Bypass solenoid MFC set to  0.000000
2/13/2013	11:04:10 AM	Tube furnace set to 0
2/13/2013	11:04:40 AM	H2 valve closed
2/13/2013	11:04:40 AM	BCl3 valve closed
2/13/2013	11:04:40 AM	PH3 valve closed
2/13/2013	11:04:40 AM	SiCl4 pre valve closed
2/13/2013	11:04:40 AM	SiCl4 post valve closed
2/13/2013	11:04:40 AM	Bypass valve closed
2/13/2013	11:04:40 AM	Bubbler valve closed
2/13/2013	11:04:40 AM	Helium valve opened
2/13/2013	11:04:40 AM	Main Vac valve opened
2/13/2013	11:04:40 AM	Helium MFC set to  20.000000
2/13/2013	11:04:40 AM	H2 MFC set to  0.000000
2/13/2013	11:04:40 AM	BCl3 MFC set to  0.000000
2/13/2013	11:04:40 AM	PH3 MFC set to  0.000000
2/13/2013	11:04:40 AM	SiCl4 MFC set to  0.000000
2/13/2013	11:04:40 AM	Bypass solenoid MFC set to  0.000000
2/13/2013	11:04:40 AM	Tube furnace set to 0
2/13/2013	11:05:10 AM	Helium valve closed
2/13/2013	11:05:10 AM	H2 valve closed
2/13/2013	11:05:10 AM	BCl3 valve closed
2/13/2013	11:05:10 AM	PH3 valve closed
2/13/2013	11:05:10 AM	SiCl4 pre valve closed
2/13/2013	11:05:10 AM	SiCl4 post valve closed
2/13/2013	11:05:10 AM	Bypass valve closed
2/13/2013	11:05:10 AM	Bubbler valve closed
2/13/2013	11:05:10 AM	Main Vac valve opened
2/13/2013	11:05:10 AM	Helium MFC set to  0.000000
2/13/2013	11:05:10 AM	H2 MFC set to  0.000000
2/13/2013	11:05:10 AM	BCl3 MFC set to  0.000000
2/13/2013	11:05:10 AM	PH3 MFC set to  0.000000
2/13/2013	11:05:10 AM	SiCl4 MFC set to  0.000000
2/13/2013	11:05:10 AM	Bypass solenoid MFC set to  0.000000
2/13/2013	11:05:10 AM	Tube furnace set to 0
2/13/2013	11:05:40 AM	H2 valve closed
2/13/2013	11:05:40 AM	BCl3 valve closed
2/13/2013	11:05:40 AM	PH3 valve closed
2/13/2013	11:05:40 AM	SiCl4 pre valve closed
2/13/2013	11:05:40 AM	SiCl4 post valve closed
2/13/2013	11:05:40 AM	Bypass valve closed
2/13/2013	11:05:40 AM	Bubbler valve closed
2/13/2013	11:05:40 AM	Helium valve opened
2/13/2013	11:05:40 AM	Main Vac valve opened
2/13/2013	11:05:40 AM	Helium MFC set to  20.000000
2/13/2013	11:05:40 AM	H2 MFC set to  0.000000
2/13/2013	11:05:40 AM	BCl3 MFC set to  0.000000
2/13/2013	11:05:40 AM	PH3 MFC set to  0.000000
2/13/2013	11:05:40 AM	SiCl4 MFC set to  0.000000
2/13/2013	11:05:40 AM	Bypass solenoid MFC set to  0.000000
2/13/2013	11:05:40 AM	Tube furnace set to 0
2/13/2013	11:06:10 AM	Helium valve closed
2/13/2013	11:06:10 AM	H2 valve closed
2/13/2013	11:06:10 AM	BCl3 valve closed
2/13/2013	11:06:10 AM	PH3 valve closed
2/13/2013	11:06:10 AM	SiCl4 pre valve closed
2/13/2013	11:06:10 AM	SiCl4 post valve closed
2/13/2013	11:06:10 AM	Bypass valve closed
2/13/2013	11:06:10 AM	Bubbler valve closed
2/13/2013	11:06:10 AM	Main Vac valve opened
2/13/2013	11:06:11 AM	Helium MFC set to  0.000000
2/13/2013	11:06:11 AM	H2 MFC set to  0.000000
2/13/2013	11:06:11 AM	BCl3 MFC set to  0.000000
2/13/2013	11:06:11 AM	PH3 MFC set to  0.000000
2/13/2013	11:06:11 AM	SiCl4 MFC set to  0.000000
2/13/2013	11:06:11 AM	Bypass solenoid MFC set to  0.000000
2/13/2013	11:06:11 AM	Tube furnace set to 0
2/13/2013	11:06:41 AM	H2 valve closed
2/13/2013	11:06:41 AM	BCl3 valve closed
2/13/2013	11:06:41 AM	PH3 valve closed
2/13/2013	11:06:41 AM	SiCl4 pre valve closed
2/13/2013	11:06:41 AM	SiCl4 post valve closed
2/13/2013	11:06:41 AM	Bypass valve closed
2/13/2013	11:06:41 AM	Bubbler valve closed
2/13/2013	11:06:41 AM	Helium valve opened
2/13/2013	11:06:41 AM	Main Vac valve opened
2/13/2013	11:06:41 AM	Helium MFC set to  20.000000
2/13/2013	11:06:41 AM	H2 MFC set to  0.000000
2/13/2013	11:06:41 AM	BCl3 MFC set to  0.000000
2/13/2013	11:06:41 AM	PH3 MFC set to  0.000000
2/13/2013	11:06:41 AM	SiCl4 MFC set to  0.000000
2/13/2013	11:06:41 AM	Bypass solenoid MFC set to  0.000000
2/13/2013	11:06:41 AM	Tube furnace set to 0
2/13/2013	11:07:11 AM	Helium valve closed
2/13/2013	11:07:11 AM	H2 valve closed
2/13/2013	11:07:11 AM	BCl3 valve closed
2/13/2013	11:07:11 AM	PH3 valve closed
2/13/2013	11:07:11 AM	SiCl4 pre valve closed
2/13/2013	11:07:11 AM	SiCl4 post valve closed
2/13/2013	11:07:11 AM	Bypass valve closed
2/13/2013	11:07:11 AM	Bubbler valve closed
2/13/2013	11:07:11 AM	Main Vac valve opened
2/13/2013	11:07:11 AM	Helium MFC set to  0.000000
2/13/2013	11:07:11 AM	H2 MFC set to  0.000000
2/13/2013	11:07:11 AM	BCl3 MFC set to  0.000000
2/13/2013	11:07:11 AM	PH3 MFC set to  0.000000
2/13/2013	11:07:11 AM	SiCl4 MFC set to  0.000000
2/13/2013	11:07:11 AM	Bypass solenoid MFC set to  0.000000
2/13/2013	11:07:11 AM	Tube furnace set to 0
2/13/2013	11:07:41 AM	H2 valve closed
2/13/2013	11:07:41 AM	BCl3 valve closed
2/13/2013	11:07:41 AM	PH3 valve closed
2/13/2013	11:07:41 AM	SiCl4 pre valve closed
2/13/2013	11:07:41 AM	SiCl4 post valve closed
2/13/2013	11:07:41 AM	Bypass valve closed
2/13/2013	11:07:41 AM	Bubbler valve closed
2/13/2013	11:07:41 AM	Helium valve opened
2/13/2013	11:07:41 AM	Main Vac valve opened
2/13/2013	11:07:41 AM	Helium MFC set to  20.000000
2/13/2013	11:07:41 AM	H2 MFC set to  0.000000
2/13/2013	11:07:41 AM	BCl3 MFC set to  0.000000
2/13/2013	11:07:41 AM	PH3 MFC set to  0.000000
2/13/2013	11:07:41 AM	SiCl4 MFC set to  0.000000
2/13/2013	11:07:41 AM	Bypass solenoid MFC set to  0.000000
2/13/2013	11:07:41 AM	Tube furnace set to 0
2/13/2013	11:08:11 AM	Helium valve closed
2/13/2013	11:08:11 AM	H2 valve closed
2/13/2013	11:08:11 AM	BCl3 valve closed
2/13/2013	11:08:11 AM	PH3 valve closed
2/13/2013	11:08:11 AM	SiCl4 pre valve closed
2/13/2013	11:08:11 AM	SiCl4 post valve closed
2/13/2013	11:08:11 AM	Bypass valve closed
2/13/2013	11:08:11 AM	Bubbler valve closed
2/13/2013	11:08:11 AM	Main Vac valve opened
2/13/2013	11:08:11 AM	Helium MFC set to  0.000000
2/13/2013	11:08:12 AM	H2 MFC set to  0.000000
2/13/2013	11:08:12 AM	BCl3 MFC set to  0.000000
2/13/2013	11:08:12 AM	PH3 MFC set to  0.000000
2/13/2013	11:08:12 AM	SiCl4 MFC set to  0.000000
2/13/2013	11:08:12 AM	Bypass solenoid MFC set to  0.000000
2/13/2013	11:08:12 AM	Tube furnace set to 0
2/13/2013	11:08:42 AM	H2 valve closed
2/13/2013	11:08:42 AM	BCl3 valve closed
2/13/2013	11:08:42 AM	PH3 valve closed
2/13/2013	11:08:42 AM	SiCl4 pre valve closed
2/13/2013	11:08:42 AM	SiCl4 post valve closed
2/13/2013	11:08:42 AM	Bypass valve closed
2/13/2013	11:08:42 AM	Bubbler valve closed
2/13/2013	11:08:42 AM	Helium valve opened
2/13/2013	11:08:42 AM	Main Vac valve opened
2/13/2013	11:08:42 AM	Helium MFC set to  20.000000
2/13/2013	11:08:42 AM	H2 MFC set to  0.000000
2/13/2013	11:08:42 AM	BCl3 MFC set to  0.000000
2/13/2013	11:08:42 AM	PH3 MFC set to  0.000000
2/13/2013	11:08:42 AM	SiCl4 MFC set to  0.000000
2/13/2013	11:08:42 AM	Bypass solenoid MFC set to  0.000000
2/13/2013	11:08:42 AM	Tube furnace set to 0
2/13/2013	11:09:12 AM	Helium valve closed
2/13/2013	11:09:12 AM	H2 valve closed
2/13/2013	11:09:12 AM	BCl3 valve closed
2/13/2013	11:09:12 AM	PH3 valve closed
2/13/2013	11:09:12 AM	SiCl4 pre valve closed
2/13/2013	11:09:12 AM	SiCl4 post valve closed
2/13/2013	11:09:12 AM	Bypass valve closed
2/13/2013	11:09:12 AM	Bubbler valve closed
2/13/2013	11:09:12 AM	Main Vac valve opened
2/13/2013	11:09:12 AM	Helium MFC set to  0.000000
2/13/2013	11:09:12 AM	H2 MFC set to  0.000000
2/13/2013	11:09:12 AM	BCl3 MFC set to  0.000000
2/13/2013	11:09:12 AM	PH3 MFC set to  0.000000
2/13/2013	11:09:12 AM	SiCl4 MFC set to  0.000000
2/13/2013	11:09:12 AM	Bypass solenoid MFC set to  0.000000
2/13/2013	11:09:12 AM	Tube furnace set to 0
2/13/2013	11:09:42 AM	H2 valve closed
2/13/2013	11:09:42 AM	BCl3 valve closed
2/13/2013	11:09:42 AM	PH3 valve closed
2/13/2013	11:09:42 AM	SiCl4 pre valve closed
2/13/2013	11:09:42 AM	SiCl4 post valve closed
2/13/2013	11:09:42 AM	Bypass valve closed
2/13/2013	11:09:42 AM	Bubbler valve closed
2/13/2013	11:09:42 AM	Helium valve opened
2/13/2013	11:09:42 AM	Main Vac valve opened
2/13/2013	11:09:42 AM	Helium MFC set to  20.000000
2/13/2013	11:09:42 AM	H2 MFC set to  0.000000
2/13/2013	11:09:42 AM	BCl3 MFC set to  0.000000
2/13/2013	11:09:42 AM	PH3 MFC set to  0.000000
2/13/2013	11:09:42 AM	SiCl4 MFC set to  0.000000
2/13/2013	11:09:42 AM	Bypass solenoid MFC set to  0.000000
2/13/2013	11:09:42 AM	Tube furnace set to 0
2/13/2013	11:10:12 AM	Helium valve closed
2/13/2013	11:10:12 AM	H2 valve closed
2/13/2013	11:10:12 AM	BCl3 valve closed
2/13/2013	11:10:12 AM	PH3 valve closed
2/13/2013	11:10:12 AM	SiCl4 pre valve closed
2/13/2013	11:10:12 AM	SiCl4 post valve closed
2/13/2013	11:10:12 AM	Bypass valve closed
2/13/2013	11:10:12 AM	Bubbler valve closed
2/13/2013	11:10:12 AM	Main Vac valve opened
2/13/2013	11:10:12 AM	Helium MFC set to  0.000000
2/13/2013	11:10:13 AM	H2 MFC set to  0.000000
2/13/2013	11:10:13 AM	BCl3 MFC set to  0.000000
2/13/2013	11:10:13 AM	PH3 MFC set to  0.000000
2/13/2013	11:10:13 AM	SiCl4 MFC set to  0.000000
2/13/2013	11:10:13 AM	Bypass solenoid MFC set to  0.000000
2/13/2013	11:10:13 AM	Tube furnace set to 0
2/13/2013	11:10:43 AM	H2 valve closed
2/13/2013	11:10:43 AM	BCl3 valve closed
2/13/2013	11:10:43 AM	PH3 valve closed
2/13/2013	11:10:43 AM	SiCl4 pre valve closed
2/13/2013	11:10:43 AM	SiCl4 post valve closed
2/13/2013	11:10:43 AM	Bypass valve closed
2/13/2013	11:10:43 AM	Bubbler valve closed
2/13/2013	11:10:43 AM	Helium valve opened
2/13/2013	11:10:43 AM	Main Vac valve opened
2/13/2013	11:10:43 AM	Helium MFC set to  20.000000
2/13/2013	11:10:43 AM	H2 MFC set to  0.000000
2/13/2013	11:10:43 AM	BCl3 MFC set to  0.000000
2/13/2013	11:10:43 AM	PH3 MFC set to  0.000000
2/13/2013	11:10:43 AM	SiCl4 MFC set to  0.000000
2/13/2013	11:10:43 AM	Bypass solenoid MFC set to  0.000000
2/13/2013	11:10:43 AM	Tube furnace set to 0
2/13/2013	11:11:13 AM	Helium valve closed
2/13/2013	11:11:13 AM	H2 valve closed
2/13/2013	11:11:13 AM	BCl3 valve closed
2/13/2013	11:11:13 AM	PH3 valve closed
2/13/2013	11:11:13 AM	SiCl4 pre valve closed
2/13/2013	11:11:13 AM	SiCl4 post valve closed
2/13/2013	11:11:13 AM	Bypass valve closed
2/13/2013	11:11:13 AM	Bubbler valve closed
2/13/2013	11:11:13 AM	Main Vac valve opened
2/13/2013	11:11:13 AM	Helium MFC set to  0.000000
2/13/2013	11:11:13 AM	H2 MFC set to  0.000000
2/13/2013	11:11:13 AM	BCl3 MFC set to  0.000000
2/13/2013	11:11:13 AM	PH3 MFC set to  0.000000
2/13/2013	11:11:13 AM	SiCl4 MFC set to  0.000000
2/13/2013	11:11:13 AM	Bypass solenoid MFC set to  0.000000
2/13/2013	11:11:13 AM	Tube furnace set to 0
2/13/2013	11:11:43 AM	H2 valve closed
2/13/2013	11:11:43 AM	BCl3 valve closed
2/13/2013	11:11:43 AM	PH3 valve closed
2/13/2013	11:11:43 AM	SiCl4 pre valve closed
2/13/2013	11:11:43 AM	SiCl4 post valve closed
2/13/2013	11:11:43 AM	Bypass valve closed
2/13/2013	11:11:43 AM	Bubbler valve closed
2/13/2013	11:11:43 AM	Helium valve opened
2/13/2013	11:11:43 AM	Main Vac valve opened
2/13/2013	11:11:43 AM	Helium MFC set to  20.000000
2/13/2013	11:11:43 AM	H2 MFC set to  0.000000
2/13/2013	11:11:43 AM	BCl3 MFC set to  0.000000
2/13/2013	11:11:43 AM	PH3 MFC set to  0.000000
2/13/2013	11:11:43 AM	SiCl4 MFC set to  0.000000
2/13/2013	11:11:43 AM	Bypass solenoid MFC set to  0.000000
2/13/2013	11:11:43 AM	Tube furnace set to 0
2/13/2013	11:12:13 AM	Helium valve closed
2/13/2013	11:12:13 AM	H2 valve closed
2/13/2013	11:12:13 AM	BCl3 valve closed
2/13/2013	11:12:13 AM	PH3 valve closed
2/13/2013	11:12:13 AM	SiCl4 pre valve closed
2/13/2013	11:12:13 AM	SiCl4 post valve closed
2/13/2013	11:12:13 AM	Bypass valve closed
2/13/2013	11:12:13 AM	Bubbler valve closed
2/13/2013	11:12:13 AM	Main Vac valve opened
2/13/2013	11:12:13 AM	Helium MFC set to  0.000000
2/13/2013	11:12:13 AM	H2 MFC set to  0.000000
2/13/2013	11:12:14 AM	BCl3 MFC set to  0.000000
2/13/2013	11:12:14 AM	PH3 MFC set to  0.000000
2/13/2013	11:12:14 AM	SiCl4 MFC set to  0.000000
2/13/2013	11:12:14 AM	Bypass solenoid MFC set to  0.000000
2/13/2013	11:12:14 AM	Tube furnace set to 0
2/13/2013	11:12:44 AM	H2 valve closed
2/13/2013	11:12:44 AM	BCl3 valve closed
2/13/2013	11:12:44 AM	PH3 valve closed
2/13/2013	11:12:44 AM	SiCl4 pre valve closed
2/13/2013	11:12:44 AM	SiCl4 post valve closed
2/13/2013	11:12:44 AM	Bypass valve closed
2/13/2013	11:12:44 AM	Bubbler valve closed
2/13/2013	11:12:44 AM	Helium valve opened
2/13/2013	11:12:44 AM	Main Vac valve opened
2/13/2013	11:12:44 AM	Helium MFC set to  20.000000
2/13/2013	11:12:44 AM	H2 MFC set to  0.000000
2/13/2013	11:12:44 AM	BCl3 MFC set to  0.000000
2/13/2013	11:12:44 AM	PH3 MFC set to  0.000000
2/13/2013	11:12:44 AM	SiCl4 MFC set to  0.000000
2/13/2013	11:12:44 AM	Bypass solenoid MFC set to  0.000000
2/13/2013	11:12:44 AM	Tube furnace set to 0
2/13/2013	11:13:14 AM	Helium valve closed
2/13/2013	11:13:14 AM	H2 valve closed
2/13/2013	11:13:14 AM	BCl3 valve closed
2/13/2013	11:13:14 AM	PH3 valve closed
2/13/2013	11:13:14 AM	SiCl4 pre valve closed
2/13/2013	11:13:14 AM	SiCl4 post valve closed
2/13/2013	11:13:14 AM	Bypass valve closed
2/13/2013	11:13:14 AM	Bubbler valve closed
2/13/2013	11:13:14 AM	Main Vac valve opened
2/13/2013	11:13:14 AM	Helium MFC set to  0.000000
2/13/2013	11:13:14 AM	H2 MFC set to  0.000000
2/13/2013	11:13:14 AM	BCl3 MFC set to  0.000000
2/13/2013	11:13:14 AM	PH3 MFC set to  0.000000
2/13/2013	11:13:14 AM	SiCl4 MFC set to  0.000000
2/13/2013	11:13:14 AM	Bypass solenoid MFC set to  0.000000
2/13/2013	11:13:14 AM	Tube furnace set to 200
2/13/2013	11:13:44 AM	H2 valve closed
2/13/2013	11:13:44 AM	BCl3 valve closed
2/13/2013	11:13:44 AM	PH3 valve closed
2/13/2013	11:13:44 AM	SiCl4 pre valve closed
2/13/2013	11:13:44 AM	SiCl4 post valve closed
2/13/2013	11:13:44 AM	Bypass valve closed
2/13/2013	11:13:44 AM	Bubbler valve closed
2/13/2013	11:13:44 AM	Helium valve opened
2/13/2013	11:13:44 AM	Main Vac valve opened
2/13/2013	11:13:44 AM	Helium MFC set to  20.000000
2/13/2013	11:13:44 AM	H2 MFC set to  0.000000
2/13/2013	11:13:44 AM	BCl3 MFC set to  0.000000
2/13/2013	11:13:44 AM	PH3 MFC set to  0.000000
2/13/2013	11:13:44 AM	SiCl4 MFC set to  0.000000
2/13/2013	11:13:44 AM	Bypass solenoid MFC set to  0.000000
2/13/2013	11:13:44 AM	Tube furnace set to 200
2/13/2013	11:14:14 AM	Helium valve closed
2/13/2013	11:14:14 AM	H2 valve closed
2/13/2013	11:14:14 AM	BCl3 valve closed
2/13/2013	11:14:14 AM	PH3 valve closed
2/13/2013	11:14:14 AM	SiCl4 pre valve closed
2/13/2013	11:14:14 AM	SiCl4 post valve closed
2/13/2013	11:14:14 AM	Bypass valve closed
2/13/2013	11:14:14 AM	Bubbler valve closed
2/13/2013	11:14:14 AM	Main Vac valve opened
2/13/2013	11:14:14 AM	Helium MFC set to  0.000000
2/13/2013	11:14:15 AM	H2 MFC set to  0.000000
2/13/2013	11:14:15 AM	BCl3 MFC set to  0.000000
2/13/2013	11:14:15 AM	PH3 MFC set to  0.000000
2/13/2013	11:14:15 AM	SiCl4 MFC set to  0.000000
2/13/2013	11:14:15 AM	Bypass solenoid MFC set to  0.000000
2/13/2013	11:14:15 AM	Tube furnace set to 200
2/13/2013	11:14:45 AM	H2 valve closed
2/13/2013	11:14:45 AM	BCl3 valve closed
2/13/2013	11:14:45 AM	PH3 valve closed
2/13/2013	11:14:45 AM	SiCl4 pre valve closed
2/13/2013	11:14:45 AM	SiCl4 post valve closed
2/13/2013	11:14:45 AM	Bypass valve closed
2/13/2013	11:14:45 AM	Bubbler valve closed
2/13/2013	11:14:45 AM	Helium valve opened
2/13/2013	11:14:45 AM	Main Vac valve opened
2/13/2013	11:14:45 AM	Helium MFC set to  20.000000
2/13/2013	11:14:45 AM	H2 MFC set to  0.000000
2/13/2013	11:14:45 AM	BCl3 MFC set to  0.000000
2/13/2013	11:14:45 AM	PH3 MFC set to  0.000000
2/13/2013	11:14:45 AM	SiCl4 MFC set to  0.000000
2/13/2013	11:14:45 AM	Bypass solenoid MFC set to  0.000000
2/13/2013	11:14:45 AM	Tube furnace set to 200
2/13/2013	11:15:15 AM	Helium valve closed
2/13/2013	11:15:15 AM	H2 valve closed
2/13/2013	11:15:15 AM	BCl3 valve closed
2/13/2013	11:15:15 AM	PH3 valve closed
2/13/2013	11:15:15 AM	SiCl4 pre valve closed
2/13/2013	11:15:15 AM	SiCl4 post valve closed
2/13/2013	11:15:15 AM	Bypass valve closed
2/13/2013	11:15:15 AM	Bubbler valve closed
2/13/2013	11:15:15 AM	Main Vac valve opened
2/13/2013	11:15:15 AM	Helium MFC set to  0.000000
2/13/2013	11:15:15 AM	H2 MFC set to  0.000000
2/13/2013	11:15:15 AM	BCl3 MFC set to  0.000000
2/13/2013	11:15:15 AM	PH3 MFC set to  0.000000
2/13/2013	11:15:15 AM	SiCl4 MFC set to  0.000000
2/13/2013	11:15:15 AM	Bypass solenoid MFC set to  0.000000
2/13/2013	11:15:15 AM	Tube furnace set to 200
2/13/2013	11:15:45 AM	H2 valve closed
2/13/2013	11:15:45 AM	BCl3 valve closed
2/13/2013	11:15:45 AM	PH3 valve closed
2/13/2013	11:15:45 AM	SiCl4 pre valve closed
2/13/2013	11:15:45 AM	SiCl4 post valve closed
2/13/2013	11:15:45 AM	Bypass valve closed
2/13/2013	11:15:45 AM	Bubbler valve closed
2/13/2013	11:15:45 AM	Helium valve opened
2/13/2013	11:15:45 AM	Main Vac valve opened
2/13/2013	11:15:45 AM	Helium MFC set to  20.000000
2/13/2013	11:15:45 AM	H2 MFC set to  0.000000
2/13/2013	11:15:45 AM	BCl3 MFC set to  0.000000
2/13/2013	11:15:45 AM	PH3 MFC set to  0.000000
2/13/2013	11:15:45 AM	SiCl4 MFC set to  0.000000
2/13/2013	11:15:45 AM	Bypass solenoid MFC set to  0.000000
2/13/2013	11:15:45 AM	Tube furnace set to 200
2/13/2013	11:16:15 AM	Helium valve closed
2/13/2013	11:16:15 AM	H2 valve closed
2/13/2013	11:16:15 AM	BCl3 valve closed
2/13/2013	11:16:15 AM	PH3 valve closed
2/13/2013	11:16:15 AM	SiCl4 pre valve closed
2/13/2013	11:16:15 AM	SiCl4 post valve closed
2/13/2013	11:16:15 AM	Bypass valve closed
2/13/2013	11:16:15 AM	Bubbler valve closed
2/13/2013	11:16:15 AM	Main Vac valve opened
2/13/2013	11:16:15 AM	Helium MFC set to  0.000000
2/13/2013	11:16:15 AM	H2 MFC set to  0.000000
2/13/2013	11:16:15 AM	BCl3 MFC set to  0.000000
2/13/2013	11:16:16 AM	PH3 MFC set to  0.000000
2/13/2013	11:16:16 AM	SiCl4 MFC set to  0.000000
2/13/2013	11:16:16 AM	Bypass solenoid MFC set to  0.000000
2/13/2013	11:16:16 AM	Tube furnace set to 200
2/13/2013	11:16:46 AM	H2 valve closed
2/13/2013	11:16:46 AM	BCl3 valve closed
2/13/2013	11:16:46 AM	PH3 valve closed
2/13/2013	11:16:46 AM	SiCl4 pre valve closed
2/13/2013	11:16:46 AM	SiCl4 post valve closed
2/13/2013	11:16:46 AM	Bypass valve closed
2/13/2013	11:16:46 AM	Bubbler valve closed
2/13/2013	11:16:46 AM	Helium valve opened
2/13/2013	11:16:46 AM	Main Vac valve opened
2/13/2013	11:16:46 AM	Helium MFC set to  20.000000
2/13/2013	11:16:46 AM	H2 MFC set to  0.000000
2/13/2013	11:16:46 AM	BCl3 MFC set to  0.000000
2/13/2013	11:16:46 AM	PH3 MFC set to  0.000000
2/13/2013	11:16:46 AM	SiCl4 MFC set to  0.000000
2/13/2013	11:16:46 AM	Bypass solenoid MFC set to  0.000000
2/13/2013	11:16:46 AM	Tube furnace set to 200
2/13/2013	11:17:16 AM	Helium valve closed
2/13/2013	11:17:16 AM	H2 valve closed
2/13/2013	11:17:16 AM	BCl3 valve closed
2/13/2013	11:17:16 AM	PH3 valve closed
2/13/2013	11:17:16 AM	SiCl4 pre valve closed
2/13/2013	11:17:16 AM	SiCl4 post valve closed
2/13/2013	11:17:16 AM	Bypass valve closed
2/13/2013	11:17:16 AM	Bubbler valve closed
2/13/2013	11:17:16 AM	Main Vac valve opened
2/13/2013	11:17:16 AM	Helium MFC set to  0.000000
2/13/2013	11:17:16 AM	H2 MFC set to  0.000000
2/13/2013	11:17:16 AM	BCl3 MFC set to  0.000000
2/13/2013	11:17:16 AM	PH3 MFC set to  0.000000
2/13/2013	11:17:16 AM	SiCl4 MFC set to  0.000000
2/13/2013	11:17:16 AM	Bypass solenoid MFC set to  0.000000
2/13/2013	11:17:16 AM	Tube furnace set to 200
2/13/2013	11:17:46 AM	H2 valve closed
2/13/2013	11:17:46 AM	BCl3 valve closed
2/13/2013	11:17:46 AM	PH3 valve closed
2/13/2013	11:17:46 AM	SiCl4 pre valve closed
2/13/2013	11:17:46 AM	SiCl4 post valve closed
2/13/2013	11:17:46 AM	Bypass valve closed
2/13/2013	11:17:46 AM	Bubbler valve closed
2/13/2013	11:17:46 AM	Helium valve opened
2/13/2013	11:17:46 AM	Main Vac valve opened
2/13/2013	11:17:46 AM	Helium MFC set to  20.000000
2/13/2013	11:17:46 AM	H2 MFC set to  0.000000
2/13/2013	11:17:46 AM	BCl3 MFC set to  0.000000
2/13/2013	11:17:46 AM	PH3 MFC set to  0.000000
2/13/2013	11:17:46 AM	SiCl4 MFC set to  0.000000
2/13/2013	11:17:46 AM	Bypass solenoid MFC set to  0.000000
2/13/2013	11:17:46 AM	Tube furnace set to 200
2/13/2013	11:18:16 AM	Helium valve closed
2/13/2013	11:18:16 AM	H2 valve closed
2/13/2013	11:18:16 AM	BCl3 valve closed
2/13/2013	11:18:16 AM	PH3 valve closed
2/13/2013	11:18:16 AM	SiCl4 pre valve closed
2/13/2013	11:18:16 AM	SiCl4 post valve closed
2/13/2013	11:18:16 AM	Bypass valve closed
2/13/2013	11:18:16 AM	Bubbler valve closed
2/13/2013	11:18:16 AM	Main Vac valve opened
2/13/2013	11:18:17 AM	Helium MFC set to  0.000000
2/13/2013	11:18:17 AM	H2 MFC set to  0.000000
2/13/2013	11:18:17 AM	BCl3 MFC set to  0.000000
2/13/2013	11:18:17 AM	PH3 MFC set to  0.000000
2/13/2013	11:18:17 AM	SiCl4 MFC set to  0.000000
2/13/2013	11:18:17 AM	Bypass solenoid MFC set to  0.000000
2/13/2013	11:18:17 AM	Tube furnace set to 200
2/13/2013	11:18:47 AM	H2 valve closed
2/13/2013	11:18:47 AM	BCl3 valve closed
2/13/2013	11:18:47 AM	PH3 valve closed
2/13/2013	11:18:47 AM	SiCl4 pre valve closed
2/13/2013	11:18:47 AM	SiCl4 post valve closed
2/13/2013	11:18:47 AM	Bypass valve closed
2/13/2013	11:18:47 AM	Bubbler valve closed
2/13/2013	11:18:47 AM	Helium valve opened
2/13/2013	11:18:47 AM	Main Vac valve opened
2/13/2013	11:18:47 AM	Helium MFC set to  20.000000
2/13/2013	11:18:47 AM	H2 MFC set to  0.000000
2/13/2013	11:18:47 AM	BCl3 MFC set to  0.000000
2/13/2013	11:18:47 AM	PH3 MFC set to  0.000000
2/13/2013	11:18:47 AM	SiCl4 MFC set to  0.000000
2/13/2013	11:18:47 AM	Bypass solenoid MFC set to  0.000000
2/13/2013	11:18:47 AM	Tube furnace set to 200
2/13/2013	11:19:17 AM	Helium valve closed
2/13/2013	11:19:17 AM	H2 valve closed
2/13/2013	11:19:17 AM	BCl3 valve closed
2/13/2013	11:19:17 AM	PH3 valve closed
2/13/2013	11:19:17 AM	SiCl4 pre valve closed
2/13/2013	11:19:17 AM	SiCl4 post valve closed
2/13/2013	11:19:17 AM	Bypass valve closed
2/13/2013	11:19:17 AM	Bubbler valve closed
2/13/2013	11:19:17 AM	Main Vac valve opened
2/13/2013	11:19:17 AM	Helium MFC set to  0.000000
2/13/2013	11:19:17 AM	H2 MFC set to  0.000000
2/13/2013	11:19:17 AM	BCl3 MFC set to  0.000000
2/13/2013	11:19:17 AM	PH3 MFC set to  0.000000
2/13/2013	11:19:17 AM	SiCl4 MFC set to  0.000000
2/13/2013	11:19:17 AM	Bypass solenoid MFC set to  0.000000
2/13/2013	11:19:17 AM	Tube furnace set to 0
2/13/2013	11:19:18 AM	Run finished at 11:19 AM
2/13/2013	11:29:06 AM	Main Vac valve closed
2/13/2013	11:29:26 AM	Main Vac valve opened
2/13/2013	11:30:25 AM	Recipe started at 11:30 AM
2/13/2013	11:30:25 AM	Helium valve closed
2/13/2013	11:30:25 AM	H2 valve closed
2/13/2013	11:30:25 AM	BCl3 valve closed
2/13/2013	11:30:25 AM	PH3 valve closed
2/13/2013	11:30:25 AM	SiCl4 pre valve closed
2/13/2013	11:30:25 AM	SiCl4 post valve closed
2/13/2013	11:30:25 AM	Main Vac valve closed
2/13/2013	11:30:25 AM	Bypass valve closed
2/13/2013	11:30:25 AM	Bubbler valve closed
2/13/2013	11:30:25 AM	Helium MFC set to  0.000000
2/13/2013	11:30:25 AM	H2 MFC set to  0.000000
2/13/2013	11:30:25 AM	BCl3 MFC set to  0.000000
2/13/2013	11:30:25 AM	PH3 MFC set to  0.000000
2/13/2013	11:30:25 AM	SiCl4 MFC set to  0.000000
2/13/2013	11:30:25 AM	Bypass solenoid MFC set to  0.000000
2/13/2013	11:30:25 AM	Tube furnace set to 0
2/13/2013	11:30:28 AM	Helium valve closed
2/13/2013	11:30:28 AM	BCl3 valve closed
2/13/2013	11:30:28 AM	PH3 valve closed
2/13/2013	11:30:28 AM	SiCl4 pre valve closed
2/13/2013	11:30:28 AM	SiCl4 post valve closed
2/13/2013	11:30:28 AM	Main Vac valve closed
2/13/2013	11:30:28 AM	Bypass valve closed
2/13/2013	11:30:28 AM	Bubbler valve closed
2/13/2013	11:30:28 AM	H2 valve opened
2/13/2013	11:30:28 AM	Helium MFC set to  0.000000
2/13/2013	11:30:28 AM	H2 MFC set to  500.000000
2/13/2013	11:30:28 AM	BCl3 MFC set to  0.000000
2/13/2013	11:30:28 AM	PH3 MFC set to  0.000000
2/13/2013	11:30:28 AM	SiCl4 MFC set to  0.000000
2/13/2013	11:30:28 AM	Bypass solenoid MFC set to  0.000000
2/13/2013	11:30:29 AM	Tube furnace set to 0
2/13/2013	11:31:40 AM	Helium valve closed
2/13/2013	11:31:40 AM	BCl3 valve closed
2/13/2013	11:31:40 AM	PH3 valve closed
2/13/2013	11:31:40 AM	SiCl4 pre valve closed
2/13/2013	11:31:40 AM	SiCl4 post valve closed
2/13/2013	11:31:40 AM	Main Vac valve closed
2/13/2013	11:31:40 AM	Bypass valve closed
2/13/2013	11:31:40 AM	H2 valve opened
2/13/2013	11:31:40 AM	Bubbler valve opened
2/13/2013	11:31:40 AM	Helium MFC set to  0.000000
2/13/2013	11:31:40 AM	H2 MFC set to  500.000000
2/13/2013	11:31:40 AM	BCl3 MFC set to  0.000000
2/13/2013	11:31:40 AM	PH3 MFC set to  0.000000
2/13/2013	11:31:40 AM	SiCl4 MFC set to  0.000000
2/13/2013	11:31:40 AM	Bypass solenoid MFC set to  0.000000
2/13/2013	11:31:40 AM	Tube furnace set to 0
2/13/2013	11:31:41 AM	Helium valve closed
2/13/2013	11:31:41 AM	BCl3 valve closed
2/13/2013	11:31:41 AM	PH3 valve closed
2/13/2013	11:31:41 AM	SiCl4 pre valve closed
2/13/2013	11:31:41 AM	SiCl4 post valve closed
2/13/2013	11:31:41 AM	Main Vac valve closed
2/13/2013	11:31:41 AM	Bypass valve closed
2/13/2013	11:31:41 AM	H2 valve opened
2/13/2013	11:31:41 AM	Bubbler valve opened
2/13/2013	11:31:41 AM	Helium MFC set to  0.000000
2/13/2013	11:31:41 AM	H2 MFC set to  500.000000
2/13/2013	11:31:41 AM	BCl3 MFC set to  0.000000
2/13/2013	11:31:41 AM	PH3 MFC set to  0.000000
2/13/2013	11:31:41 AM	SiCl4 MFC set to  0.000000
2/13/2013	11:31:41 AM	Bypass solenoid MFC set to  0.000000
2/13/2013	11:31:42 AM	Tube furnace set to 1000
2/13/2013	11:51:42 AM	Helium valve closed
2/13/2013	11:51:42 AM	PH3 valve closed
2/13/2013	11:51:42 AM	Main Vac valve closed
2/13/2013	11:51:42 AM	Bypass valve closed
2/13/2013	11:51:42 AM	H2 valve opened
2/13/2013	11:51:42 AM	BCl3 valve opened
2/13/2013	11:51:42 AM	SiCl4 pre valve opened
2/13/2013	11:51:42 AM	SiCl4 post valve opened
2/13/2013	11:51:42 AM	Bubbler valve opened
2/13/2013	11:51:42 AM	Helium MFC set to  0.000000
2/13/2013	11:51:42 AM	H2 MFC set to  450.000000
2/13/2013	11:51:42 AM	BCl3 MFC set to  1.500000
2/13/2013	11:51:42 AM	PH3 MFC set to  0.000000
2/13/2013	11:51:42 AM	SiCl4 MFC set to  50.000000
2/13/2013	11:51:42 AM	Bypass solenoid MFC set to  0.000000
2/13/2013	11:51:42 AM	Tube furnace set to 1000
2/13/2013	12:03:42 PM	Helium valve closed
2/13/2013	12:03:42 PM	BCl3 valve closed
2/13/2013	12:03:42 PM	PH3 valve closed
2/13/2013	12:03:42 PM	SiCl4 pre valve closed
2/13/2013	12:03:42 PM	SiCl4 post valve closed
2/13/2013	12:03:42 PM	Main Vac valve closed
2/13/2013	12:03:42 PM	Bypass valve closed
2/13/2013	12:03:42 PM	H2 valve opened
2/13/2013	12:03:42 PM	Bubbler valve opened
2/13/2013	12:03:42 PM	Helium MFC set to  0.000000
2/13/2013	12:03:42 PM	H2 MFC set to  500.000000
2/13/2013	12:03:42 PM	BCl3 MFC set to  0.000000
2/13/2013	12:03:42 PM	PH3 MFC set to  0.000000
2/13/2013	12:03:42 PM	SiCl4 MFC set to  0.000000
2/13/2013	12:03:42 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	12:03:42 PM	Tube furnace set to 950
2/13/2013	12:05:42 PM	Helium valve closed
2/13/2013	12:05:42 PM	BCl3 valve closed
2/13/2013	12:05:42 PM	PH3 valve closed
2/13/2013	12:05:42 PM	SiCl4 pre valve closed
2/13/2013	12:05:42 PM	SiCl4 post valve closed
2/13/2013	12:05:42 PM	Main Vac valve closed
2/13/2013	12:05:42 PM	Bypass valve closed
2/13/2013	12:05:42 PM	H2 valve opened
2/13/2013	12:05:42 PM	Bubbler valve opened
2/13/2013	12:05:42 PM	Helium MFC set to  0.000000
2/13/2013	12:05:42 PM	H2 MFC set to  500.000000
2/13/2013	12:05:42 PM	BCl3 MFC set to  0.000000
2/13/2013	12:05:42 PM	PH3 MFC set to  0.000000
2/13/2013	12:05:42 PM	SiCl4 MFC set to  0.000000
2/13/2013	12:05:42 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	12:05:42 PM	Tube furnace set to 900
2/13/2013	12:07:42 PM	Helium valve closed
2/13/2013	12:07:42 PM	BCl3 valve closed
2/13/2013	12:07:42 PM	PH3 valve closed
2/13/2013	12:07:42 PM	SiCl4 pre valve closed
2/13/2013	12:07:42 PM	SiCl4 post valve closed
2/13/2013	12:07:42 PM	Main Vac valve closed
2/13/2013	12:07:42 PM	Bypass valve closed
2/13/2013	12:07:42 PM	H2 valve opened
2/13/2013	12:07:42 PM	Bubbler valve opened
2/13/2013	12:07:42 PM	Helium MFC set to  0.000000
2/13/2013	12:07:42 PM	H2 MFC set to  500.000000
2/13/2013	12:07:42 PM	BCl3 MFC set to  0.000000
2/13/2013	12:07:42 PM	PH3 MFC set to  0.000000
2/13/2013	12:07:42 PM	SiCl4 MFC set to  0.000000
2/13/2013	12:07:42 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	12:07:43 PM	Tube furnace set to 850
2/13/2013	12:09:43 PM	H2 valve closed
2/13/2013	12:09:43 PM	BCl3 valve closed
2/13/2013	12:09:43 PM	PH3 valve closed
2/13/2013	12:09:43 PM	SiCl4 pre valve closed
2/13/2013	12:09:43 PM	SiCl4 post valve closed
2/13/2013	12:09:43 PM	Main Vac valve closed
2/13/2013	12:09:43 PM	Bypass valve closed
2/13/2013	12:09:43 PM	Helium valve opened
2/13/2013	12:09:43 PM	Bubbler valve opened
2/13/2013	12:09:43 PM	Helium MFC set to  500.000000
2/13/2013	12:09:43 PM	H2 MFC set to  0.000000
2/13/2013	12:09:43 PM	BCl3 MFC set to  0.000000
2/13/2013	12:09:43 PM	PH3 MFC set to  0.000000
2/13/2013	12:09:43 PM	SiCl4 MFC set to  0.000000
2/13/2013	12:09:43 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	12:09:43 PM	Tube furnace set to 800
2/13/2013	12:11:43 PM	H2 valve closed
2/13/2013	12:11:43 PM	BCl3 valve closed
2/13/2013	12:11:43 PM	PH3 valve closed
2/13/2013	12:11:43 PM	SiCl4 pre valve closed
2/13/2013	12:11:43 PM	SiCl4 post valve closed
2/13/2013	12:11:43 PM	Main Vac valve closed
2/13/2013	12:11:43 PM	Bypass valve closed
2/13/2013	12:11:43 PM	Helium valve opened
2/13/2013	12:11:43 PM	Bubbler valve opened
2/13/2013	12:11:43 PM	Helium MFC set to  500.000000
2/13/2013	12:11:43 PM	H2 MFC set to  0.000000
2/13/2013	12:11:43 PM	BCl3 MFC set to  0.000000
2/13/2013	12:11:43 PM	PH3 MFC set to  0.000000
2/13/2013	12:11:43 PM	SiCl4 MFC set to  0.000000
2/13/2013	12:11:43 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	12:11:43 PM	Tube furnace set to 750
2/13/2013	12:13:43 PM	H2 valve closed
2/13/2013	12:13:43 PM	BCl3 valve closed
2/13/2013	12:13:43 PM	PH3 valve closed
2/13/2013	12:13:43 PM	SiCl4 pre valve closed
2/13/2013	12:13:43 PM	SiCl4 post valve closed
2/13/2013	12:13:43 PM	Main Vac valve closed
2/13/2013	12:13:43 PM	Bypass valve closed
2/13/2013	12:13:43 PM	Helium valve opened
2/13/2013	12:13:43 PM	Bubbler valve opened
2/13/2013	12:13:43 PM	Helium MFC set to  500.000000
2/13/2013	12:13:43 PM	H2 MFC set to  0.000000
2/13/2013	12:13:43 PM	BCl3 MFC set to  0.000000
2/13/2013	12:13:43 PM	PH3 MFC set to  0.000000
2/13/2013	12:13:43 PM	SiCl4 MFC set to  0.000000
2/13/2013	12:13:43 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	12:13:43 PM	Tube furnace set to 0
2/13/2013	12:33:43 PM	Helium valve closed
2/13/2013	12:33:43 PM	H2 valve closed
2/13/2013	12:33:43 PM	BCl3 valve closed
2/13/2013	12:33:43 PM	PH3 valve closed
2/13/2013	12:33:43 PM	SiCl4 pre valve closed
2/13/2013	12:33:43 PM	SiCl4 post valve closed
2/13/2013	12:33:43 PM	Main Vac valve closed
2/13/2013	12:33:43 PM	Bypass valve closed
2/13/2013	12:33:43 PM	Bubbler valve closed
2/13/2013	12:33:43 PM	Helium MFC set to  0.000000
2/13/2013	12:33:43 PM	H2 MFC set to  0.000000
2/13/2013	12:33:43 PM	BCl3 MFC set to  0.000000
2/13/2013	12:33:43 PM	PH3 MFC set to  0.000000
2/13/2013	12:33:43 PM	SiCl4 MFC set to  0.000000
2/13/2013	12:33:43 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	12:33:43 PM	Tube furnace set to 0
2/13/2013	12:33:44 PM	Run finished at 12:33 PM
2/13/2013	1:00:36 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/13/2013	1:00:36 PM	Recipe started at 1:00 PM
2/13/2013	1:00:36 PM	Helium valve closed
2/13/2013	1:00:36 PM	H2 valve closed
2/13/2013	1:00:36 PM	BCl3 valve closed
2/13/2013	1:00:36 PM	PH3 valve closed
2/13/2013	1:00:36 PM	SiCl4 pre valve closed
2/13/2013	1:00:36 PM	SiCl4 post valve closed
2/13/2013	1:00:36 PM	Main Vac valve closed
2/13/2013	1:00:36 PM	Bypass valve closed
2/13/2013	1:00:36 PM	Bubbler valve closed
2/13/2013	1:00:36 PM	Helium MFC set to  0.000000
2/13/2013	1:00:36 PM	H2 MFC set to  0.000000
2/13/2013	1:00:36 PM	BCl3 MFC set to  0.000000
2/13/2013	1:00:36 PM	PH3 MFC set to  0.000000
2/13/2013	1:00:36 PM	SiCl4 MFC set to  0.000000
2/13/2013	1:00:36 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	1:00:37 PM	Tube furnace set to 0
2/13/2013	1:00:40 PM	H2 valve closed
2/13/2013	1:00:40 PM	BCl3 valve closed
2/13/2013	1:00:40 PM	PH3 valve closed
2/13/2013	1:00:40 PM	SiCl4 pre valve closed
2/13/2013	1:00:40 PM	SiCl4 post valve closed
2/13/2013	1:00:40 PM	Main Vac valve closed
2/13/2013	1:00:40 PM	Bypass valve closed
2/13/2013	1:00:40 PM	Bubbler valve closed
2/13/2013	1:00:40 PM	Helium valve opened
2/13/2013	1:00:40 PM	Helium MFC set to  500.000000
2/13/2013	1:00:40 PM	H2 MFC set to  0.000000
2/13/2013	1:00:40 PM	BCl3 MFC set to  0.000000
2/13/2013	1:00:40 PM	PH3 MFC set to  0.000000
2/13/2013	1:00:40 PM	SiCl4 MFC set to  0.000000
2/13/2013	1:00:40 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	1:00:40 PM	Tube furnace set to 0
2/13/2013	1:00:46 PM	Helium valve closed
2/13/2013	1:00:46 PM	H2 valve closed
2/13/2013	1:00:46 PM	BCl3 valve closed
2/13/2013	1:00:46 PM	PH3 valve closed
2/13/2013	1:00:46 PM	SiCl4 pre valve closed
2/13/2013	1:00:46 PM	SiCl4 post valve closed
2/13/2013	1:00:46 PM	Main Vac valve closed
2/13/2013	1:00:46 PM	Bypass valve closed
2/13/2013	1:00:46 PM	Bubbler valve closed
2/13/2013	1:00:46 PM	Helium MFC set to  0.000000
2/13/2013	1:00:46 PM	H2 MFC set to  0.000000
2/13/2013	1:00:46 PM	BCl3 MFC set to  0.000000
2/13/2013	1:00:46 PM	PH3 MFC set to  0.000000
2/13/2013	1:00:46 PM	SiCl4 MFC set to  0.000000
2/13/2013	1:00:46 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	1:00:46 PM	Tube furnace set to 0
2/13/2013	1:00:47 PM	Run finished at 1:00 PM
2/13/2013	1:00:47 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/13/2013	1:04:58 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/13/2013	1:04:59 PM	Recipe started at 1:04 PM
2/13/2013	1:04:59 PM	Helium valve closed
2/13/2013	1:04:59 PM	H2 valve closed
2/13/2013	1:04:59 PM	BCl3 valve closed
2/13/2013	1:04:59 PM	PH3 valve closed
2/13/2013	1:04:59 PM	SiCl4 pre valve closed
2/13/2013	1:04:59 PM	SiCl4 post valve closed
2/13/2013	1:04:59 PM	Main Vac valve closed
2/13/2013	1:04:59 PM	Bubbler valve closed
2/13/2013	1:04:59 PM	Bypass valve opened
2/13/2013	1:04:59 PM	Helium MFC set to  0.000000
2/13/2013	1:04:59 PM	H2 MFC set to  0.000000
2/13/2013	1:04:59 PM	BCl3 MFC set to  0.000000
2/13/2013	1:04:59 PM	PH3 MFC set to  0.000000
2/13/2013	1:04:59 PM	SiCl4 MFC set to  0.000000
2/13/2013	1:04:59 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	1:04:59 PM	Tube furnace set to 0
2/13/2013	1:06:14 PM	Helium valve closed
2/13/2013	1:06:14 PM	H2 valve closed
2/13/2013	1:06:14 PM	BCl3 valve closed
2/13/2013	1:06:14 PM	PH3 valve closed
2/13/2013	1:06:14 PM	SiCl4 pre valve closed
2/13/2013	1:06:14 PM	SiCl4 post valve closed
2/13/2013	1:06:14 PM	Main Vac valve closed
2/13/2013	1:06:14 PM	Bubbler valve closed
2/13/2013	1:06:14 PM	Bypass valve opened
2/13/2013	1:06:14 PM	Helium MFC set to  0.000000
2/13/2013	1:06:14 PM	H2 MFC set to  0.000000
2/13/2013	1:06:14 PM	BCl3 MFC set to  0.000000
2/13/2013	1:06:14 PM	PH3 MFC set to  0.000000
2/13/2013	1:06:14 PM	SiCl4 MFC set to  0.000000
2/13/2013	1:06:14 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	1:06:14 PM	Tube furnace set to 0
2/13/2013	1:07:14 PM	Helium valve closed
2/13/2013	1:07:14 PM	H2 valve closed
2/13/2013	1:07:14 PM	BCl3 valve closed
2/13/2013	1:07:14 PM	PH3 valve closed
2/13/2013	1:07:14 PM	SiCl4 pre valve closed
2/13/2013	1:07:14 PM	SiCl4 post valve closed
2/13/2013	1:07:14 PM	Bypass valve closed
2/13/2013	1:07:14 PM	Bubbler valve closed
2/13/2013	1:07:14 PM	Main Vac valve opened
2/13/2013	1:07:14 PM	Helium MFC set to  0.000000
2/13/2013	1:07:14 PM	H2 MFC set to  0.000000
2/13/2013	1:07:14 PM	BCl3 MFC set to  0.000000
2/13/2013	1:07:14 PM	PH3 MFC set to  0.000000
2/13/2013	1:07:14 PM	SiCl4 MFC set to  0.000000
2/13/2013	1:07:14 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	1:07:14 PM	Tube furnace set to 0
2/13/2013	1:07:15 PM	Run finished at 1:07 PM
2/13/2013	1:07:15 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/13/2013	1:22:17 PM	Recipe started at 1:22 PM
2/13/2013	1:22:17 PM	Helium valve closed
2/13/2013	1:22:17 PM	H2 valve closed
2/13/2013	1:22:17 PM	BCl3 valve closed
2/13/2013	1:22:17 PM	PH3 valve closed
2/13/2013	1:22:17 PM	SiCl4 pre valve closed
2/13/2013	1:22:17 PM	SiCl4 post valve closed
2/13/2013	1:22:17 PM	Bypass valve closed
2/13/2013	1:22:17 PM	Bubbler valve closed
2/13/2013	1:22:17 PM	Main Vac valve opened
2/13/2013	1:22:17 PM	Helium MFC set to  0.000000
2/13/2013	1:22:17 PM	H2 MFC set to  0.000000
2/13/2013	1:22:17 PM	BCl3 MFC set to  0.000000
2/13/2013	1:22:17 PM	PH3 MFC set to  0.000000
2/13/2013	1:22:17 PM	SiCl4 MFC set to  0.000000
2/13/2013	1:22:17 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	1:22:18 PM	Tube furnace set to 0
2/13/2013	1:22:20 PM	H2 valve closed
2/13/2013	1:22:20 PM	BCl3 valve closed
2/13/2013	1:22:20 PM	PH3 valve closed
2/13/2013	1:22:20 PM	SiCl4 pre valve closed
2/13/2013	1:22:20 PM	SiCl4 post valve closed
2/13/2013	1:22:20 PM	Bypass valve closed
2/13/2013	1:22:20 PM	Bubbler valve closed
2/13/2013	1:22:20 PM	Helium valve opened
2/13/2013	1:22:20 PM	Main Vac valve opened
2/13/2013	1:22:20 PM	Helium MFC set to  20.000000
2/13/2013	1:22:20 PM	H2 MFC set to  0.000000
2/13/2013	1:22:20 PM	BCl3 MFC set to  0.000000
2/13/2013	1:22:20 PM	PH3 MFC set to  0.000000
2/13/2013	1:22:20 PM	SiCl4 MFC set to  0.000000
2/13/2013	1:22:20 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	1:22:20 PM	Tube furnace set to 0
2/13/2013	1:22:32 PM	Helium valve closed
2/13/2013	1:22:32 PM	H2 valve closed
2/13/2013	1:22:32 PM	BCl3 valve closed
2/13/2013	1:22:32 PM	PH3 valve closed
2/13/2013	1:22:32 PM	SiCl4 pre valve closed
2/13/2013	1:22:32 PM	SiCl4 post valve closed
2/13/2013	1:22:32 PM	Bypass valve closed
2/13/2013	1:22:32 PM	Bubbler valve closed
2/13/2013	1:22:32 PM	Main Vac valve opened
2/13/2013	1:22:32 PM	Helium MFC set to  0.000000
2/13/2013	1:22:32 PM	H2 MFC set to  0.000000
2/13/2013	1:22:32 PM	BCl3 MFC set to  0.000000
2/13/2013	1:22:32 PM	PH3 MFC set to  0.000000
2/13/2013	1:22:32 PM	SiCl4 MFC set to  0.000000
2/13/2013	1:22:32 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	1:22:32 PM	Tube furnace set to 0
2/13/2013	1:22:34 PM	H2 valve closed
2/13/2013	1:22:34 PM	BCl3 valve closed
2/13/2013	1:22:34 PM	PH3 valve closed
2/13/2013	1:22:34 PM	SiCl4 pre valve closed
2/13/2013	1:22:34 PM	SiCl4 post valve closed
2/13/2013	1:22:34 PM	Bypass valve closed
2/13/2013	1:22:34 PM	Bubbler valve closed
2/13/2013	1:22:34 PM	Helium valve opened
2/13/2013	1:22:34 PM	Main Vac valve opened
2/13/2013	1:22:34 PM	Helium MFC set to  20.000000
2/13/2013	1:22:34 PM	H2 MFC set to  0.000000
2/13/2013	1:22:34 PM	BCl3 MFC set to  0.000000
2/13/2013	1:22:34 PM	PH3 MFC set to  0.000000
2/13/2013	1:22:34 PM	SiCl4 MFC set to  0.000000
2/13/2013	1:22:34 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	1:22:34 PM	Tube furnace set to 0
2/13/2013	1:23:04 PM	Helium valve closed
2/13/2013	1:23:04 PM	H2 valve closed
2/13/2013	1:23:04 PM	BCl3 valve closed
2/13/2013	1:23:04 PM	PH3 valve closed
2/13/2013	1:23:04 PM	SiCl4 pre valve closed
2/13/2013	1:23:04 PM	SiCl4 post valve closed
2/13/2013	1:23:04 PM	Bypass valve closed
2/13/2013	1:23:04 PM	Bubbler valve closed
2/13/2013	1:23:04 PM	Main Vac valve opened
2/13/2013	1:23:04 PM	Helium MFC set to  0.000000
2/13/2013	1:23:04 PM	H2 MFC set to  0.000000
2/13/2013	1:23:04 PM	BCl3 MFC set to  0.000000
2/13/2013	1:23:04 PM	PH3 MFC set to  0.000000
2/13/2013	1:23:04 PM	SiCl4 MFC set to  0.000000
2/13/2013	1:23:04 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	1:23:04 PM	Tube furnace set to 0
2/13/2013	1:23:34 PM	H2 valve closed
2/13/2013	1:23:34 PM	BCl3 valve closed
2/13/2013	1:23:34 PM	PH3 valve closed
2/13/2013	1:23:34 PM	SiCl4 pre valve closed
2/13/2013	1:23:34 PM	SiCl4 post valve closed
2/13/2013	1:23:34 PM	Bypass valve closed
2/13/2013	1:23:34 PM	Bubbler valve closed
2/13/2013	1:23:34 PM	Helium valve opened
2/13/2013	1:23:34 PM	Main Vac valve opened
2/13/2013	1:23:34 PM	Helium MFC set to  20.000000
2/13/2013	1:23:34 PM	H2 MFC set to  0.000000
2/13/2013	1:23:34 PM	BCl3 MFC set to  0.000000
2/13/2013	1:23:34 PM	PH3 MFC set to  0.000000
2/13/2013	1:23:34 PM	SiCl4 MFC set to  0.000000
2/13/2013	1:23:34 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	1:23:34 PM	Tube furnace set to 0
2/13/2013	1:24:04 PM	Helium valve closed
2/13/2013	1:24:04 PM	H2 valve closed
2/13/2013	1:24:04 PM	BCl3 valve closed
2/13/2013	1:24:04 PM	PH3 valve closed
2/13/2013	1:24:04 PM	SiCl4 pre valve closed
2/13/2013	1:24:04 PM	SiCl4 post valve closed
2/13/2013	1:24:04 PM	Bypass valve closed
2/13/2013	1:24:04 PM	Bubbler valve closed
2/13/2013	1:24:04 PM	Main Vac valve opened
2/13/2013	1:24:04 PM	Helium MFC set to  0.000000
2/13/2013	1:24:04 PM	H2 MFC set to  0.000000
2/13/2013	1:24:04 PM	BCl3 MFC set to  0.000000
2/13/2013	1:24:04 PM	PH3 MFC set to  0.000000
2/13/2013	1:24:04 PM	SiCl4 MFC set to  0.000000
2/13/2013	1:24:04 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	1:24:05 PM	Tube furnace set to 0
2/13/2013	1:24:35 PM	H2 valve closed
2/13/2013	1:24:35 PM	BCl3 valve closed
2/13/2013	1:24:35 PM	PH3 valve closed
2/13/2013	1:24:35 PM	SiCl4 pre valve closed
2/13/2013	1:24:35 PM	SiCl4 post valve closed
2/13/2013	1:24:35 PM	Bypass valve closed
2/13/2013	1:24:35 PM	Bubbler valve closed
2/13/2013	1:24:35 PM	Helium valve opened
2/13/2013	1:24:35 PM	Main Vac valve opened
2/13/2013	1:24:35 PM	Helium MFC set to  20.000000
2/13/2013	1:24:35 PM	H2 MFC set to  0.000000
2/13/2013	1:24:35 PM	BCl3 MFC set to  0.000000
2/13/2013	1:24:35 PM	PH3 MFC set to  0.000000
2/13/2013	1:24:35 PM	SiCl4 MFC set to  0.000000
2/13/2013	1:24:35 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	1:24:35 PM	Tube furnace set to 0
2/13/2013	1:25:05 PM	Helium valve closed
2/13/2013	1:25:05 PM	H2 valve closed
2/13/2013	1:25:05 PM	BCl3 valve closed
2/13/2013	1:25:05 PM	PH3 valve closed
2/13/2013	1:25:05 PM	SiCl4 pre valve closed
2/13/2013	1:25:05 PM	SiCl4 post valve closed
2/13/2013	1:25:05 PM	Bypass valve closed
2/13/2013	1:25:05 PM	Bubbler valve closed
2/13/2013	1:25:05 PM	Main Vac valve opened
2/13/2013	1:25:05 PM	Helium MFC set to  0.000000
2/13/2013	1:25:05 PM	H2 MFC set to  0.000000
2/13/2013	1:25:05 PM	BCl3 MFC set to  0.000000
2/13/2013	1:25:05 PM	PH3 MFC set to  0.000000
2/13/2013	1:25:05 PM	SiCl4 MFC set to  0.000000
2/13/2013	1:25:05 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	1:25:05 PM	Tube furnace set to 0
2/13/2013	1:25:35 PM	H2 valve closed
2/13/2013	1:25:35 PM	BCl3 valve closed
2/13/2013	1:25:35 PM	PH3 valve closed
2/13/2013	1:25:35 PM	SiCl4 pre valve closed
2/13/2013	1:25:35 PM	SiCl4 post valve closed
2/13/2013	1:25:35 PM	Bypass valve closed
2/13/2013	1:25:35 PM	Bubbler valve closed
2/13/2013	1:25:35 PM	Helium valve opened
2/13/2013	1:25:35 PM	Main Vac valve opened
2/13/2013	1:25:35 PM	Helium MFC set to  20.000000
2/13/2013	1:25:35 PM	H2 MFC set to  0.000000
2/13/2013	1:25:35 PM	BCl3 MFC set to  0.000000
2/13/2013	1:25:35 PM	PH3 MFC set to  0.000000
2/13/2013	1:25:35 PM	SiCl4 MFC set to  0.000000
2/13/2013	1:25:35 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	1:25:35 PM	Tube furnace set to 0
2/13/2013	1:26:05 PM	Helium valve closed
2/13/2013	1:26:05 PM	H2 valve closed
2/13/2013	1:26:05 PM	BCl3 valve closed
2/13/2013	1:26:05 PM	PH3 valve closed
2/13/2013	1:26:05 PM	SiCl4 pre valve closed
2/13/2013	1:26:05 PM	SiCl4 post valve closed
2/13/2013	1:26:05 PM	Bypass valve closed
2/13/2013	1:26:05 PM	Bubbler valve closed
2/13/2013	1:26:05 PM	Main Vac valve opened
2/13/2013	1:26:05 PM	Helium MFC set to  0.000000
2/13/2013	1:26:05 PM	H2 MFC set to  0.000000
2/13/2013	1:26:05 PM	BCl3 MFC set to  0.000000
2/13/2013	1:26:05 PM	PH3 MFC set to  0.000000
2/13/2013	1:26:05 PM	SiCl4 MFC set to  0.000000
2/13/2013	1:26:05 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	1:26:06 PM	Tube furnace set to 0
2/13/2013	1:26:36 PM	H2 valve closed
2/13/2013	1:26:36 PM	BCl3 valve closed
2/13/2013	1:26:36 PM	PH3 valve closed
2/13/2013	1:26:36 PM	SiCl4 pre valve closed
2/13/2013	1:26:36 PM	SiCl4 post valve closed
2/13/2013	1:26:36 PM	Bypass valve closed
2/13/2013	1:26:36 PM	Bubbler valve closed
2/13/2013	1:26:36 PM	Helium valve opened
2/13/2013	1:26:36 PM	Main Vac valve opened
2/13/2013	1:26:36 PM	Helium MFC set to  20.000000
2/13/2013	1:26:36 PM	H2 MFC set to  0.000000
2/13/2013	1:26:36 PM	BCl3 MFC set to  0.000000
2/13/2013	1:26:36 PM	PH3 MFC set to  0.000000
2/13/2013	1:26:36 PM	SiCl4 MFC set to  0.000000
2/13/2013	1:26:36 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	1:26:36 PM	Tube furnace set to 0
2/13/2013	1:27:06 PM	Helium valve closed
2/13/2013	1:27:06 PM	H2 valve closed
2/13/2013	1:27:06 PM	BCl3 valve closed
2/13/2013	1:27:06 PM	PH3 valve closed
2/13/2013	1:27:06 PM	SiCl4 pre valve closed
2/13/2013	1:27:06 PM	SiCl4 post valve closed
2/13/2013	1:27:06 PM	Bypass valve closed
2/13/2013	1:27:06 PM	Bubbler valve closed
2/13/2013	1:27:06 PM	Main Vac valve opened
2/13/2013	1:27:06 PM	Helium MFC set to  0.000000
2/13/2013	1:27:06 PM	H2 MFC set to  0.000000
2/13/2013	1:27:06 PM	BCl3 MFC set to  0.000000
2/13/2013	1:27:06 PM	PH3 MFC set to  0.000000
2/13/2013	1:27:06 PM	SiCl4 MFC set to  0.000000
2/13/2013	1:27:06 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	1:27:06 PM	Tube furnace set to 0
2/13/2013	1:27:36 PM	H2 valve closed
2/13/2013	1:27:36 PM	BCl3 valve closed
2/13/2013	1:27:36 PM	PH3 valve closed
2/13/2013	1:27:36 PM	SiCl4 pre valve closed
2/13/2013	1:27:36 PM	SiCl4 post valve closed
2/13/2013	1:27:36 PM	Bypass valve closed
2/13/2013	1:27:36 PM	Bubbler valve closed
2/13/2013	1:27:36 PM	Helium valve opened
2/13/2013	1:27:36 PM	Main Vac valve opened
2/13/2013	1:27:36 PM	Helium MFC set to  20.000000
2/13/2013	1:27:36 PM	H2 MFC set to  0.000000
2/13/2013	1:27:36 PM	BCl3 MFC set to  0.000000
2/13/2013	1:27:36 PM	PH3 MFC set to  0.000000
2/13/2013	1:27:36 PM	SiCl4 MFC set to  0.000000
2/13/2013	1:27:36 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	1:27:36 PM	Tube furnace set to 0
2/13/2013	1:28:06 PM	Helium valve closed
2/13/2013	1:28:06 PM	H2 valve closed
2/13/2013	1:28:06 PM	BCl3 valve closed
2/13/2013	1:28:06 PM	PH3 valve closed
2/13/2013	1:28:06 PM	SiCl4 pre valve closed
2/13/2013	1:28:06 PM	SiCl4 post valve closed
2/13/2013	1:28:06 PM	Bypass valve closed
2/13/2013	1:28:06 PM	Bubbler valve closed
2/13/2013	1:28:06 PM	Main Vac valve opened
2/13/2013	1:28:06 PM	Helium MFC set to  0.000000
2/13/2013	1:28:06 PM	H2 MFC set to  0.000000
2/13/2013	1:28:06 PM	BCl3 MFC set to  0.000000
2/13/2013	1:28:06 PM	PH3 MFC set to  0.000000
2/13/2013	1:28:06 PM	SiCl4 MFC set to  0.000000
2/13/2013	1:28:06 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	1:28:07 PM	Tube furnace set to 0
2/13/2013	1:28:37 PM	H2 valve closed
2/13/2013	1:28:37 PM	BCl3 valve closed
2/13/2013	1:28:37 PM	PH3 valve closed
2/13/2013	1:28:37 PM	SiCl4 pre valve closed
2/13/2013	1:28:37 PM	SiCl4 post valve closed
2/13/2013	1:28:37 PM	Bypass valve closed
2/13/2013	1:28:37 PM	Bubbler valve closed
2/13/2013	1:28:37 PM	Helium valve opened
2/13/2013	1:28:37 PM	Main Vac valve opened
2/13/2013	1:28:37 PM	Helium MFC set to  20.000000
2/13/2013	1:28:37 PM	H2 MFC set to  0.000000
2/13/2013	1:28:37 PM	BCl3 MFC set to  0.000000
2/13/2013	1:28:37 PM	PH3 MFC set to  0.000000
2/13/2013	1:28:37 PM	SiCl4 MFC set to  0.000000
2/13/2013	1:28:37 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	1:28:37 PM	Tube furnace set to 0
2/13/2013	1:29:07 PM	Helium valve closed
2/13/2013	1:29:07 PM	H2 valve closed
2/13/2013	1:29:07 PM	BCl3 valve closed
2/13/2013	1:29:07 PM	PH3 valve closed
2/13/2013	1:29:07 PM	SiCl4 pre valve closed
2/13/2013	1:29:07 PM	SiCl4 post valve closed
2/13/2013	1:29:07 PM	Bypass valve closed
2/13/2013	1:29:07 PM	Bubbler valve closed
2/13/2013	1:29:07 PM	Main Vac valve opened
2/13/2013	1:29:07 PM	Helium MFC set to  0.000000
2/13/2013	1:29:07 PM	H2 MFC set to  0.000000
2/13/2013	1:29:07 PM	BCl3 MFC set to  0.000000
2/13/2013	1:29:07 PM	PH3 MFC set to  0.000000
2/13/2013	1:29:07 PM	SiCl4 MFC set to  0.000000
2/13/2013	1:29:07 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	1:29:07 PM	Tube furnace set to 0
2/13/2013	1:29:37 PM	H2 valve closed
2/13/2013	1:29:37 PM	BCl3 valve closed
2/13/2013	1:29:37 PM	PH3 valve closed
2/13/2013	1:29:37 PM	SiCl4 pre valve closed
2/13/2013	1:29:37 PM	SiCl4 post valve closed
2/13/2013	1:29:37 PM	Bypass valve closed
2/13/2013	1:29:37 PM	Bubbler valve closed
2/13/2013	1:29:37 PM	Helium valve opened
2/13/2013	1:29:37 PM	Main Vac valve opened
2/13/2013	1:29:37 PM	Helium MFC set to  20.000000
2/13/2013	1:29:37 PM	H2 MFC set to  0.000000
2/13/2013	1:29:37 PM	BCl3 MFC set to  0.000000
2/13/2013	1:29:37 PM	PH3 MFC set to  0.000000
2/13/2013	1:29:37 PM	SiCl4 MFC set to  0.000000
2/13/2013	1:29:37 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	1:29:37 PM	Tube furnace set to 0
2/13/2013	1:30:07 PM	Helium valve closed
2/13/2013	1:30:07 PM	H2 valve closed
2/13/2013	1:30:07 PM	BCl3 valve closed
2/13/2013	1:30:07 PM	PH3 valve closed
2/13/2013	1:30:07 PM	SiCl4 pre valve closed
2/13/2013	1:30:07 PM	SiCl4 post valve closed
2/13/2013	1:30:07 PM	Bypass valve closed
2/13/2013	1:30:07 PM	Bubbler valve closed
2/13/2013	1:30:07 PM	Main Vac valve opened
2/13/2013	1:30:07 PM	Helium MFC set to  0.000000
2/13/2013	1:30:07 PM	H2 MFC set to  0.000000
2/13/2013	1:30:07 PM	BCl3 MFC set to  0.000000
2/13/2013	1:30:07 PM	PH3 MFC set to  0.000000
2/13/2013	1:30:07 PM	SiCl4 MFC set to  0.000000
2/13/2013	1:30:07 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	1:30:08 PM	Tube furnace set to 200
2/13/2013	1:30:38 PM	H2 valve closed
2/13/2013	1:30:38 PM	BCl3 valve closed
2/13/2013	1:30:38 PM	PH3 valve closed
2/13/2013	1:30:38 PM	SiCl4 pre valve closed
2/13/2013	1:30:38 PM	SiCl4 post valve closed
2/13/2013	1:30:38 PM	Bypass valve closed
2/13/2013	1:30:38 PM	Bubbler valve closed
2/13/2013	1:30:38 PM	Helium valve opened
2/13/2013	1:30:38 PM	Main Vac valve opened
2/13/2013	1:30:38 PM	Helium MFC set to  20.000000
2/13/2013	1:30:38 PM	H2 MFC set to  0.000000
2/13/2013	1:30:38 PM	BCl3 MFC set to  0.000000
2/13/2013	1:30:38 PM	PH3 MFC set to  0.000000
2/13/2013	1:30:38 PM	SiCl4 MFC set to  0.000000
2/13/2013	1:30:38 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	1:30:38 PM	Tube furnace set to 200
2/13/2013	1:31:08 PM	Helium valve closed
2/13/2013	1:31:08 PM	H2 valve closed
2/13/2013	1:31:08 PM	BCl3 valve closed
2/13/2013	1:31:08 PM	PH3 valve closed
2/13/2013	1:31:08 PM	SiCl4 pre valve closed
2/13/2013	1:31:08 PM	SiCl4 post valve closed
2/13/2013	1:31:08 PM	Bypass valve closed
2/13/2013	1:31:08 PM	Bubbler valve closed
2/13/2013	1:31:08 PM	Main Vac valve opened
2/13/2013	1:31:08 PM	Helium MFC set to  0.000000
2/13/2013	1:31:08 PM	H2 MFC set to  0.000000
2/13/2013	1:31:08 PM	BCl3 MFC set to  0.000000
2/13/2013	1:31:08 PM	PH3 MFC set to  0.000000
2/13/2013	1:31:08 PM	SiCl4 MFC set to  0.000000
2/13/2013	1:31:08 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	1:31:08 PM	Tube furnace set to 200
2/13/2013	1:31:38 PM	H2 valve closed
2/13/2013	1:31:38 PM	BCl3 valve closed
2/13/2013	1:31:38 PM	PH3 valve closed
2/13/2013	1:31:38 PM	SiCl4 pre valve closed
2/13/2013	1:31:38 PM	SiCl4 post valve closed
2/13/2013	1:31:38 PM	Bypass valve closed
2/13/2013	1:31:38 PM	Bubbler valve closed
2/13/2013	1:31:38 PM	Helium valve opened
2/13/2013	1:31:38 PM	Main Vac valve opened
2/13/2013	1:31:38 PM	Helium MFC set to  20.000000
2/13/2013	1:31:38 PM	H2 MFC set to  0.000000
2/13/2013	1:31:38 PM	BCl3 MFC set to  0.000000
2/13/2013	1:31:38 PM	PH3 MFC set to  0.000000
2/13/2013	1:31:38 PM	SiCl4 MFC set to  0.000000
2/13/2013	1:31:38 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	1:31:38 PM	Tube furnace set to 200
2/13/2013	1:32:08 PM	Helium valve closed
2/13/2013	1:32:08 PM	H2 valve closed
2/13/2013	1:32:08 PM	BCl3 valve closed
2/13/2013	1:32:08 PM	PH3 valve closed
2/13/2013	1:32:08 PM	SiCl4 pre valve closed
2/13/2013	1:32:08 PM	SiCl4 post valve closed
2/13/2013	1:32:08 PM	Bypass valve closed
2/13/2013	1:32:08 PM	Bubbler valve closed
2/13/2013	1:32:08 PM	Main Vac valve opened
2/13/2013	1:32:08 PM	Helium MFC set to  0.000000
2/13/2013	1:32:08 PM	H2 MFC set to  0.000000
2/13/2013	1:32:08 PM	BCl3 MFC set to  0.000000
2/13/2013	1:32:08 PM	PH3 MFC set to  0.000000
2/13/2013	1:32:08 PM	SiCl4 MFC set to  0.000000
2/13/2013	1:32:08 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	1:32:09 PM	Tube furnace set to 200
2/13/2013	1:32:39 PM	H2 valve closed
2/13/2013	1:32:39 PM	BCl3 valve closed
2/13/2013	1:32:39 PM	PH3 valve closed
2/13/2013	1:32:39 PM	SiCl4 pre valve closed
2/13/2013	1:32:39 PM	SiCl4 post valve closed
2/13/2013	1:32:39 PM	Bypass valve closed
2/13/2013	1:32:39 PM	Bubbler valve closed
2/13/2013	1:32:39 PM	Helium valve opened
2/13/2013	1:32:39 PM	Main Vac valve opened
2/13/2013	1:32:39 PM	Helium MFC set to  20.000000
2/13/2013	1:32:39 PM	H2 MFC set to  0.000000
2/13/2013	1:32:39 PM	BCl3 MFC set to  0.000000
2/13/2013	1:32:39 PM	PH3 MFC set to  0.000000
2/13/2013	1:32:39 PM	SiCl4 MFC set to  0.000000
2/13/2013	1:32:39 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	1:32:39 PM	Tube furnace set to 200
2/13/2013	1:33:09 PM	Helium valve closed
2/13/2013	1:33:09 PM	H2 valve closed
2/13/2013	1:33:09 PM	BCl3 valve closed
2/13/2013	1:33:09 PM	PH3 valve closed
2/13/2013	1:33:09 PM	SiCl4 pre valve closed
2/13/2013	1:33:09 PM	SiCl4 post valve closed
2/13/2013	1:33:09 PM	Bypass valve closed
2/13/2013	1:33:09 PM	Bubbler valve closed
2/13/2013	1:33:09 PM	Main Vac valve opened
2/13/2013	1:33:09 PM	Helium MFC set to  0.000000
2/13/2013	1:33:09 PM	H2 MFC set to  0.000000
2/13/2013	1:33:09 PM	BCl3 MFC set to  0.000000
2/13/2013	1:33:09 PM	PH3 MFC set to  0.000000
2/13/2013	1:33:09 PM	SiCl4 MFC set to  0.000000
2/13/2013	1:33:09 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	1:33:09 PM	Tube furnace set to 200
2/13/2013	1:33:39 PM	H2 valve closed
2/13/2013	1:33:39 PM	BCl3 valve closed
2/13/2013	1:33:39 PM	PH3 valve closed
2/13/2013	1:33:39 PM	SiCl4 pre valve closed
2/13/2013	1:33:39 PM	SiCl4 post valve closed
2/13/2013	1:33:39 PM	Bypass valve closed
2/13/2013	1:33:39 PM	Bubbler valve closed
2/13/2013	1:33:39 PM	Helium valve opened
2/13/2013	1:33:39 PM	Main Vac valve opened
2/13/2013	1:33:39 PM	Helium MFC set to  20.000000
2/13/2013	1:33:39 PM	H2 MFC set to  0.000000
2/13/2013	1:33:39 PM	BCl3 MFC set to  0.000000
2/13/2013	1:33:39 PM	PH3 MFC set to  0.000000
2/13/2013	1:33:39 PM	SiCl4 MFC set to  0.000000
2/13/2013	1:33:39 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	1:33:39 PM	Tube furnace set to 200
2/13/2013	1:34:09 PM	Helium valve closed
2/13/2013	1:34:09 PM	H2 valve closed
2/13/2013	1:34:09 PM	BCl3 valve closed
2/13/2013	1:34:09 PM	PH3 valve closed
2/13/2013	1:34:09 PM	SiCl4 pre valve closed
2/13/2013	1:34:09 PM	SiCl4 post valve closed
2/13/2013	1:34:09 PM	Bypass valve closed
2/13/2013	1:34:09 PM	Bubbler valve closed
2/13/2013	1:34:09 PM	Main Vac valve opened
2/13/2013	1:34:09 PM	Helium MFC set to  0.000000
2/13/2013	1:34:09 PM	H2 MFC set to  0.000000
2/13/2013	1:34:09 PM	BCl3 MFC set to  0.000000
2/13/2013	1:34:09 PM	PH3 MFC set to  0.000000
2/13/2013	1:34:09 PM	SiCl4 MFC set to  0.000000
2/13/2013	1:34:09 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	1:34:10 PM	Tube furnace set to 200
2/13/2013	1:34:40 PM	H2 valve closed
2/13/2013	1:34:40 PM	BCl3 valve closed
2/13/2013	1:34:40 PM	PH3 valve closed
2/13/2013	1:34:40 PM	SiCl4 pre valve closed
2/13/2013	1:34:40 PM	SiCl4 post valve closed
2/13/2013	1:34:40 PM	Bypass valve closed
2/13/2013	1:34:40 PM	Bubbler valve closed
2/13/2013	1:34:40 PM	Helium valve opened
2/13/2013	1:34:40 PM	Main Vac valve opened
2/13/2013	1:34:40 PM	Helium MFC set to  20.000000
2/13/2013	1:34:40 PM	H2 MFC set to  0.000000
2/13/2013	1:34:40 PM	BCl3 MFC set to  0.000000
2/13/2013	1:34:40 PM	PH3 MFC set to  0.000000
2/13/2013	1:34:40 PM	SiCl4 MFC set to  0.000000
2/13/2013	1:34:40 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	1:34:40 PM	Tube furnace set to 200
2/13/2013	1:35:10 PM	Helium valve closed
2/13/2013	1:35:10 PM	H2 valve closed
2/13/2013	1:35:10 PM	BCl3 valve closed
2/13/2013	1:35:10 PM	PH3 valve closed
2/13/2013	1:35:10 PM	SiCl4 pre valve closed
2/13/2013	1:35:10 PM	SiCl4 post valve closed
2/13/2013	1:35:10 PM	Bypass valve closed
2/13/2013	1:35:10 PM	Bubbler valve closed
2/13/2013	1:35:10 PM	Main Vac valve opened
2/13/2013	1:35:10 PM	Helium MFC set to  0.000000
2/13/2013	1:35:10 PM	H2 MFC set to  0.000000
2/13/2013	1:35:10 PM	BCl3 MFC set to  0.000000
2/13/2013	1:35:10 PM	PH3 MFC set to  0.000000
2/13/2013	1:35:10 PM	SiCl4 MFC set to  0.000000
2/13/2013	1:35:10 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	1:35:10 PM	Tube furnace set to 200
2/13/2013	1:35:40 PM	H2 valve closed
2/13/2013	1:35:40 PM	BCl3 valve closed
2/13/2013	1:35:40 PM	PH3 valve closed
2/13/2013	1:35:40 PM	SiCl4 pre valve closed
2/13/2013	1:35:40 PM	SiCl4 post valve closed
2/13/2013	1:35:40 PM	Bypass valve closed
2/13/2013	1:35:40 PM	Bubbler valve closed
2/13/2013	1:35:40 PM	Helium valve opened
2/13/2013	1:35:40 PM	Main Vac valve opened
2/13/2013	1:35:40 PM	Helium MFC set to  20.000000
2/13/2013	1:35:40 PM	H2 MFC set to  0.000000
2/13/2013	1:35:40 PM	BCl3 MFC set to  0.000000
2/13/2013	1:35:40 PM	PH3 MFC set to  0.000000
2/13/2013	1:35:40 PM	SiCl4 MFC set to  0.000000
2/13/2013	1:35:40 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	1:35:40 PM	Tube furnace set to 200
2/13/2013	1:36:10 PM	Helium valve closed
2/13/2013	1:36:10 PM	H2 valve closed
2/13/2013	1:36:10 PM	BCl3 valve closed
2/13/2013	1:36:10 PM	PH3 valve closed
2/13/2013	1:36:10 PM	SiCl4 pre valve closed
2/13/2013	1:36:10 PM	SiCl4 post valve closed
2/13/2013	1:36:10 PM	Bypass valve closed
2/13/2013	1:36:10 PM	Bubbler valve closed
2/13/2013	1:36:10 PM	Main Vac valve opened
2/13/2013	1:36:10 PM	Helium MFC set to  0.000000
2/13/2013	1:36:10 PM	H2 MFC set to  0.000000
2/13/2013	1:36:10 PM	BCl3 MFC set to  0.000000
2/13/2013	1:36:10 PM	PH3 MFC set to  0.000000
2/13/2013	1:36:10 PM	SiCl4 MFC set to  0.000000
2/13/2013	1:36:10 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	1:36:11 PM	Tube furnace set to 0
2/13/2013	1:36:12 PM	Run finished at 1:36 PM
2/13/2013	1:44:31 PM	Main Vac valve closed
2/13/2013	1:44:51 PM	Main Vac valve opened
2/13/2013	1:46:25 PM	Recipe started at 1:46 PM
2/13/2013	1:46:25 PM	Helium valve closed
2/13/2013	1:46:25 PM	H2 valve closed
2/13/2013	1:46:25 PM	BCl3 valve closed
2/13/2013	1:46:25 PM	PH3 valve closed
2/13/2013	1:46:25 PM	SiCl4 pre valve closed
2/13/2013	1:46:25 PM	SiCl4 post valve closed
2/13/2013	1:46:25 PM	Main Vac valve closed
2/13/2013	1:46:25 PM	Bypass valve closed
2/13/2013	1:46:25 PM	Bubbler valve closed
2/13/2013	1:46:25 PM	Helium MFC set to  0.000000
2/13/2013	1:46:25 PM	H2 MFC set to  0.000000
2/13/2013	1:46:25 PM	BCl3 MFC set to  0.000000
2/13/2013	1:46:25 PM	PH3 MFC set to  0.000000
2/13/2013	1:46:25 PM	SiCl4 MFC set to  0.000000
2/13/2013	1:46:25 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	1:46:26 PM	Tube furnace set to 0
2/13/2013	1:46:29 PM	Helium valve closed
2/13/2013	1:46:29 PM	BCl3 valve closed
2/13/2013	1:46:29 PM	PH3 valve closed
2/13/2013	1:46:29 PM	SiCl4 pre valve closed
2/13/2013	1:46:29 PM	SiCl4 post valve closed
2/13/2013	1:46:29 PM	Main Vac valve closed
2/13/2013	1:46:29 PM	Bypass valve closed
2/13/2013	1:46:29 PM	Bubbler valve closed
2/13/2013	1:46:29 PM	H2 valve opened
2/13/2013	1:46:29 PM	Helium MFC set to  0.000000
2/13/2013	1:46:29 PM	H2 MFC set to  500.000000
2/13/2013	1:46:29 PM	BCl3 MFC set to  0.000000
2/13/2013	1:46:29 PM	PH3 MFC set to  0.000000
2/13/2013	1:46:29 PM	SiCl4 MFC set to  0.000000
2/13/2013	1:46:29 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	1:46:29 PM	Tube furnace set to 0
2/13/2013	1:47:40 PM	Helium valve closed
2/13/2013	1:47:40 PM	BCl3 valve closed
2/13/2013	1:47:40 PM	PH3 valve closed
2/13/2013	1:47:40 PM	SiCl4 pre valve closed
2/13/2013	1:47:40 PM	SiCl4 post valve closed
2/13/2013	1:47:40 PM	Main Vac valve closed
2/13/2013	1:47:40 PM	Bypass valve closed
2/13/2013	1:47:40 PM	H2 valve opened
2/13/2013	1:47:40 PM	Bubbler valve opened
2/13/2013	1:47:40 PM	Helium MFC set to  0.000000
2/13/2013	1:47:40 PM	H2 MFC set to  500.000000
2/13/2013	1:47:40 PM	BCl3 MFC set to  0.000000
2/13/2013	1:47:40 PM	PH3 MFC set to  0.000000
2/13/2013	1:47:40 PM	SiCl4 MFC set to  0.000000
2/13/2013	1:47:40 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	1:47:41 PM	Tube furnace set to 0
2/13/2013	1:47:42 PM	Helium valve closed
2/13/2013	1:47:42 PM	BCl3 valve closed
2/13/2013	1:47:42 PM	PH3 valve closed
2/13/2013	1:47:42 PM	SiCl4 pre valve closed
2/13/2013	1:47:42 PM	SiCl4 post valve closed
2/13/2013	1:47:42 PM	Main Vac valve closed
2/13/2013	1:47:42 PM	Bypass valve closed
2/13/2013	1:47:42 PM	H2 valve opened
2/13/2013	1:47:42 PM	Bubbler valve opened
2/13/2013	1:47:42 PM	Helium MFC set to  0.000000
2/13/2013	1:47:42 PM	H2 MFC set to  500.000000
2/13/2013	1:47:42 PM	BCl3 MFC set to  0.000000
2/13/2013	1:47:42 PM	PH3 MFC set to  0.000000
2/13/2013	1:47:42 PM	SiCl4 MFC set to  0.000000
2/13/2013	1:47:42 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	1:47:42 PM	Tube furnace set to 1000
2/13/2013	2:07:42 PM	Helium valve closed
2/13/2013	2:07:42 PM	PH3 valve closed
2/13/2013	2:07:42 PM	Main Vac valve closed
2/13/2013	2:07:42 PM	Bypass valve closed
2/13/2013	2:07:42 PM	H2 valve opened
2/13/2013	2:07:42 PM	BCl3 valve opened
2/13/2013	2:07:42 PM	SiCl4 pre valve opened
2/13/2013	2:07:42 PM	SiCl4 post valve opened
2/13/2013	2:07:42 PM	Bubbler valve opened
2/13/2013	2:07:42 PM	Helium MFC set to  0.000000
2/13/2013	2:07:42 PM	H2 MFC set to  450.000000
2/13/2013	2:07:42 PM	BCl3 MFC set to  1.500000
2/13/2013	2:07:42 PM	PH3 MFC set to  0.000000
2/13/2013	2:07:42 PM	SiCl4 MFC set to  50.000000
2/13/2013	2:07:42 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	2:07:42 PM	Tube furnace set to 1000
2/13/2013	2:27:42 PM	Helium valve closed
2/13/2013	2:27:42 PM	BCl3 valve closed
2/13/2013	2:27:42 PM	PH3 valve closed
2/13/2013	2:27:42 PM	SiCl4 pre valve closed
2/13/2013	2:27:42 PM	SiCl4 post valve closed
2/13/2013	2:27:42 PM	Main Vac valve closed
2/13/2013	2:27:42 PM	Bypass valve closed
2/13/2013	2:27:42 PM	H2 valve opened
2/13/2013	2:27:42 PM	Bubbler valve opened
2/13/2013	2:27:42 PM	Helium MFC set to  0.000000
2/13/2013	2:27:42 PM	H2 MFC set to  500.000000
2/13/2013	2:27:42 PM	BCl3 MFC set to  0.000000
2/13/2013	2:27:42 PM	PH3 MFC set to  0.000000
2/13/2013	2:27:42 PM	SiCl4 MFC set to  0.000000
2/13/2013	2:27:42 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	2:27:42 PM	Tube furnace set to 950
2/13/2013	2:29:42 PM	Helium valve closed
2/13/2013	2:29:42 PM	BCl3 valve closed
2/13/2013	2:29:42 PM	PH3 valve closed
2/13/2013	2:29:42 PM	SiCl4 pre valve closed
2/13/2013	2:29:42 PM	SiCl4 post valve closed
2/13/2013	2:29:42 PM	Main Vac valve closed
2/13/2013	2:29:42 PM	Bypass valve closed
2/13/2013	2:29:42 PM	H2 valve opened
2/13/2013	2:29:42 PM	Bubbler valve opened
2/13/2013	2:29:42 PM	Helium MFC set to  0.000000
2/13/2013	2:29:42 PM	H2 MFC set to  500.000000
2/13/2013	2:29:42 PM	BCl3 MFC set to  0.000000
2/13/2013	2:29:42 PM	PH3 MFC set to  0.000000
2/13/2013	2:29:42 PM	SiCl4 MFC set to  0.000000
2/13/2013	2:29:42 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	2:29:43 PM	Tube furnace set to 900
2/13/2013	2:31:43 PM	Helium valve closed
2/13/2013	2:31:43 PM	BCl3 valve closed
2/13/2013	2:31:43 PM	PH3 valve closed
2/13/2013	2:31:43 PM	SiCl4 pre valve closed
2/13/2013	2:31:43 PM	SiCl4 post valve closed
2/13/2013	2:31:43 PM	Main Vac valve closed
2/13/2013	2:31:43 PM	Bypass valve closed
2/13/2013	2:31:43 PM	H2 valve opened
2/13/2013	2:31:43 PM	Bubbler valve opened
2/13/2013	2:31:43 PM	Helium MFC set to  0.000000
2/13/2013	2:31:43 PM	H2 MFC set to  500.000000
2/13/2013	2:31:43 PM	BCl3 MFC set to  0.000000
2/13/2013	2:31:43 PM	PH3 MFC set to  0.000000
2/13/2013	2:31:43 PM	SiCl4 MFC set to  0.000000
2/13/2013	2:31:43 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	2:31:43 PM	Tube furnace set to 850
2/13/2013	2:33:43 PM	H2 valve closed
2/13/2013	2:33:43 PM	BCl3 valve closed
2/13/2013	2:33:43 PM	PH3 valve closed
2/13/2013	2:33:43 PM	SiCl4 pre valve closed
2/13/2013	2:33:43 PM	SiCl4 post valve closed
2/13/2013	2:33:43 PM	Main Vac valve closed
2/13/2013	2:33:43 PM	Bypass valve closed
2/13/2013	2:33:43 PM	Helium valve opened
2/13/2013	2:33:43 PM	Bubbler valve opened
2/13/2013	2:33:43 PM	Helium MFC set to  500.000000
2/13/2013	2:33:43 PM	H2 MFC set to  0.000000
2/13/2013	2:33:43 PM	BCl3 MFC set to  0.000000
2/13/2013	2:33:43 PM	PH3 MFC set to  0.000000
2/13/2013	2:33:43 PM	SiCl4 MFC set to  0.000000
2/13/2013	2:33:43 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	2:33:43 PM	Tube furnace set to 800
2/13/2013	2:35:43 PM	H2 valve closed
2/13/2013	2:35:43 PM	BCl3 valve closed
2/13/2013	2:35:43 PM	PH3 valve closed
2/13/2013	2:35:43 PM	SiCl4 pre valve closed
2/13/2013	2:35:43 PM	SiCl4 post valve closed
2/13/2013	2:35:43 PM	Main Vac valve closed
2/13/2013	2:35:43 PM	Bypass valve closed
2/13/2013	2:35:43 PM	Helium valve opened
2/13/2013	2:35:43 PM	Bubbler valve opened
2/13/2013	2:35:43 PM	Helium MFC set to  500.000000
2/13/2013	2:35:43 PM	H2 MFC set to  0.000000
2/13/2013	2:35:43 PM	BCl3 MFC set to  0.000000
2/13/2013	2:35:43 PM	PH3 MFC set to  0.000000
2/13/2013	2:35:43 PM	SiCl4 MFC set to  0.000000
2/13/2013	2:35:43 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	2:35:43 PM	Tube furnace set to 750
2/13/2013	2:37:43 PM	H2 valve closed
2/13/2013	2:37:43 PM	BCl3 valve closed
2/13/2013	2:37:43 PM	PH3 valve closed
2/13/2013	2:37:43 PM	SiCl4 pre valve closed
2/13/2013	2:37:43 PM	SiCl4 post valve closed
2/13/2013	2:37:43 PM	Main Vac valve closed
2/13/2013	2:37:43 PM	Bypass valve closed
2/13/2013	2:37:43 PM	Helium valve opened
2/13/2013	2:37:43 PM	Bubbler valve opened
2/13/2013	2:37:43 PM	Helium MFC set to  500.000000
2/13/2013	2:37:43 PM	H2 MFC set to  0.000000
2/13/2013	2:37:43 PM	BCl3 MFC set to  0.000000
2/13/2013	2:37:43 PM	PH3 MFC set to  0.000000
2/13/2013	2:37:43 PM	SiCl4 MFC set to  0.000000
2/13/2013	2:37:43 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	2:37:43 PM	Tube furnace set to 0
2/13/2013	2:57:44 PM	Helium valve closed
2/13/2013	2:57:44 PM	H2 valve closed
2/13/2013	2:57:44 PM	BCl3 valve closed
2/13/2013	2:57:44 PM	PH3 valve closed
2/13/2013	2:57:44 PM	SiCl4 pre valve closed
2/13/2013	2:57:44 PM	SiCl4 post valve closed
2/13/2013	2:57:44 PM	Main Vac valve closed
2/13/2013	2:57:44 PM	Bypass valve closed
2/13/2013	2:57:44 PM	Bubbler valve closed
2/13/2013	2:57:44 PM	Helium MFC set to  0.000000
2/13/2013	2:57:44 PM	H2 MFC set to  0.000000
2/13/2013	2:57:44 PM	BCl3 MFC set to  0.000000
2/13/2013	2:57:44 PM	PH3 MFC set to  0.000000
2/13/2013	2:57:44 PM	SiCl4 MFC set to  0.000000
2/13/2013	2:57:44 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	2:57:44 PM	Tube furnace set to 0
2/13/2013	2:57:45 PM	Run finished at 2:57 PM
2/13/2013	3:12:37 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/13/2013	3:12:38 PM	Recipe started at 3:12 PM
2/13/2013	3:12:38 PM	Helium valve closed
2/13/2013	3:12:38 PM	H2 valve closed
2/13/2013	3:12:38 PM	BCl3 valve closed
2/13/2013	3:12:38 PM	PH3 valve closed
2/13/2013	3:12:38 PM	SiCl4 pre valve closed
2/13/2013	3:12:38 PM	SiCl4 post valve closed
2/13/2013	3:12:38 PM	Main Vac valve closed
2/13/2013	3:12:38 PM	Bypass valve closed
2/13/2013	3:12:38 PM	Bubbler valve closed
2/13/2013	3:12:38 PM	Helium MFC set to  0.000000
2/13/2013	3:12:38 PM	H2 MFC set to  0.000000
2/13/2013	3:12:38 PM	BCl3 MFC set to  0.000000
2/13/2013	3:12:38 PM	PH3 MFC set to  0.000000
2/13/2013	3:12:38 PM	SiCl4 MFC set to  0.000000
2/13/2013	3:12:38 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	3:12:38 PM	Tube furnace set to 0
2/13/2013	3:12:41 PM	H2 valve closed
2/13/2013	3:12:41 PM	BCl3 valve closed
2/13/2013	3:12:41 PM	PH3 valve closed
2/13/2013	3:12:41 PM	SiCl4 pre valve closed
2/13/2013	3:12:41 PM	SiCl4 post valve closed
2/13/2013	3:12:41 PM	Main Vac valve closed
2/13/2013	3:12:41 PM	Bypass valve closed
2/13/2013	3:12:41 PM	Bubbler valve closed
2/13/2013	3:12:41 PM	Helium valve opened
2/13/2013	3:12:41 PM	Helium MFC set to  500.000000
2/13/2013	3:12:41 PM	H2 MFC set to  0.000000
2/13/2013	3:12:41 PM	BCl3 MFC set to  0.000000
2/13/2013	3:12:41 PM	PH3 MFC set to  0.000000
2/13/2013	3:12:41 PM	SiCl4 MFC set to  0.000000
2/13/2013	3:12:41 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	3:12:41 PM	Tube furnace set to 0
2/13/2013	3:12:47 PM	Helium valve closed
2/13/2013	3:12:47 PM	H2 valve closed
2/13/2013	3:12:47 PM	BCl3 valve closed
2/13/2013	3:12:47 PM	PH3 valve closed
2/13/2013	3:12:47 PM	SiCl4 pre valve closed
2/13/2013	3:12:47 PM	SiCl4 post valve closed
2/13/2013	3:12:47 PM	Main Vac valve closed
2/13/2013	3:12:47 PM	Bypass valve closed
2/13/2013	3:12:47 PM	Bubbler valve closed
2/13/2013	3:12:47 PM	Helium MFC set to  0.000000
2/13/2013	3:12:47 PM	H2 MFC set to  0.000000
2/13/2013	3:12:47 PM	BCl3 MFC set to  0.000000
2/13/2013	3:12:47 PM	PH3 MFC set to  0.000000
2/13/2013	3:12:47 PM	SiCl4 MFC set to  0.000000
2/13/2013	3:12:47 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	3:12:47 PM	Tube furnace set to 0
2/13/2013	3:12:48 PM	Run finished at 3:12 PM
2/13/2013	3:12:48 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/13/2013	3:26:49 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/13/2013	3:26:49 PM	Recipe started at 3:26 PM
2/13/2013	3:26:49 PM	Helium valve closed
2/13/2013	3:26:49 PM	H2 valve closed
2/13/2013	3:26:49 PM	BCl3 valve closed
2/13/2013	3:26:49 PM	PH3 valve closed
2/13/2013	3:26:49 PM	SiCl4 pre valve closed
2/13/2013	3:26:49 PM	SiCl4 post valve closed
2/13/2013	3:26:49 PM	Main Vac valve closed
2/13/2013	3:26:49 PM	Bubbler valve closed
2/13/2013	3:26:49 PM	Bypass valve opened
2/13/2013	3:26:49 PM	Helium MFC set to  0.000000
2/13/2013	3:26:49 PM	H2 MFC set to  0.000000
2/13/2013	3:26:49 PM	BCl3 MFC set to  0.000000
2/13/2013	3:26:49 PM	PH3 MFC set to  0.000000
2/13/2013	3:26:49 PM	SiCl4 MFC set to  0.000000
2/13/2013	3:26:49 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	3:26:49 PM	Tube furnace set to 0
2/13/2013	3:28:04 PM	Helium valve closed
2/13/2013	3:28:04 PM	H2 valve closed
2/13/2013	3:28:04 PM	BCl3 valve closed
2/13/2013	3:28:04 PM	PH3 valve closed
2/13/2013	3:28:04 PM	SiCl4 pre valve closed
2/13/2013	3:28:04 PM	SiCl4 post valve closed
2/13/2013	3:28:04 PM	Main Vac valve closed
2/13/2013	3:28:04 PM	Bubbler valve closed
2/13/2013	3:28:04 PM	Bypass valve opened
2/13/2013	3:28:04 PM	Helium MFC set to  0.000000
2/13/2013	3:28:04 PM	H2 MFC set to  0.000000
2/13/2013	3:28:04 PM	BCl3 MFC set to  0.000000
2/13/2013	3:28:04 PM	PH3 MFC set to  0.000000
2/13/2013	3:28:04 PM	SiCl4 MFC set to  0.000000
2/13/2013	3:28:04 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	3:28:05 PM	Tube furnace set to 0
2/13/2013	3:29:05 PM	Helium valve closed
2/13/2013	3:29:05 PM	H2 valve closed
2/13/2013	3:29:05 PM	BCl3 valve closed
2/13/2013	3:29:05 PM	PH3 valve closed
2/13/2013	3:29:05 PM	SiCl4 pre valve closed
2/13/2013	3:29:05 PM	SiCl4 post valve closed
2/13/2013	3:29:05 PM	Bypass valve closed
2/13/2013	3:29:05 PM	Bubbler valve closed
2/13/2013	3:29:05 PM	Main Vac valve opened
2/13/2013	3:29:05 PM	Helium MFC set to  0.000000
2/13/2013	3:29:05 PM	H2 MFC set to  0.000000
2/13/2013	3:29:05 PM	BCl3 MFC set to  0.000000
2/13/2013	3:29:05 PM	PH3 MFC set to  0.000000
2/13/2013	3:29:05 PM	SiCl4 MFC set to  0.000000
2/13/2013	3:29:05 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	3:29:05 PM	Tube furnace set to 0
2/13/2013	3:29:06 PM	Run finished at 3:29 PM
2/13/2013	3:29:06 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/13/2013	3:29:53 PM	Recipe started at 3:29 PM
2/13/2013	3:29:53 PM	Helium valve closed
2/13/2013	3:29:53 PM	H2 valve closed
2/13/2013	3:29:53 PM	BCl3 valve closed
2/13/2013	3:29:53 PM	PH3 valve closed
2/13/2013	3:29:53 PM	SiCl4 pre valve closed
2/13/2013	3:29:53 PM	SiCl4 post valve closed
2/13/2013	3:29:53 PM	Bypass valve closed
2/13/2013	3:29:53 PM	Bubbler valve closed
2/13/2013	3:29:53 PM	Main Vac valve opened
2/13/2013	3:29:53 PM	Helium MFC set to  0.000000
2/13/2013	3:29:53 PM	H2 MFC set to  0.000000
2/13/2013	3:29:53 PM	BCl3 MFC set to  0.000000
2/13/2013	3:29:53 PM	PH3 MFC set to  0.000000
2/13/2013	3:29:53 PM	SiCl4 MFC set to  0.000000
2/13/2013	3:29:53 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	3:29:53 PM	Tube furnace set to 0
2/13/2013	3:30:23 PM	H2 valve closed
2/13/2013	3:30:23 PM	BCl3 valve closed
2/13/2013	3:30:23 PM	PH3 valve closed
2/13/2013	3:30:23 PM	SiCl4 pre valve closed
2/13/2013	3:30:23 PM	SiCl4 post valve closed
2/13/2013	3:30:23 PM	Bypass valve closed
2/13/2013	3:30:23 PM	Bubbler valve closed
2/13/2013	3:30:23 PM	Helium valve opened
2/13/2013	3:30:23 PM	Main Vac valve opened
2/13/2013	3:30:23 PM	Helium MFC set to  20.000000
2/13/2013	3:30:24 PM	H2 MFC set to  0.000000
2/13/2013	3:30:24 PM	BCl3 MFC set to  0.000000
2/13/2013	3:30:24 PM	PH3 MFC set to  0.000000
2/13/2013	3:30:24 PM	SiCl4 MFC set to  0.000000
2/13/2013	3:30:24 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	3:30:24 PM	Tube furnace set to 0
2/13/2013	3:30:54 PM	Helium valve closed
2/13/2013	3:30:54 PM	H2 valve closed
2/13/2013	3:30:54 PM	BCl3 valve closed
2/13/2013	3:30:54 PM	PH3 valve closed
2/13/2013	3:30:54 PM	SiCl4 pre valve closed
2/13/2013	3:30:54 PM	SiCl4 post valve closed
2/13/2013	3:30:54 PM	Bypass valve closed
2/13/2013	3:30:54 PM	Bubbler valve closed
2/13/2013	3:30:54 PM	Main Vac valve opened
2/13/2013	3:30:54 PM	Helium MFC set to  0.000000
2/13/2013	3:30:54 PM	H2 MFC set to  0.000000
2/13/2013	3:30:54 PM	BCl3 MFC set to  0.000000
2/13/2013	3:30:54 PM	PH3 MFC set to  0.000000
2/13/2013	3:30:54 PM	SiCl4 MFC set to  0.000000
2/13/2013	3:30:54 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	3:30:54 PM	Tube furnace set to 0
2/13/2013	3:31:24 PM	H2 valve closed
2/13/2013	3:31:24 PM	BCl3 valve closed
2/13/2013	3:31:24 PM	PH3 valve closed
2/13/2013	3:31:24 PM	SiCl4 pre valve closed
2/13/2013	3:31:24 PM	SiCl4 post valve closed
2/13/2013	3:31:24 PM	Bypass valve closed
2/13/2013	3:31:24 PM	Bubbler valve closed
2/13/2013	3:31:24 PM	Helium valve opened
2/13/2013	3:31:24 PM	Main Vac valve opened
2/13/2013	3:31:24 PM	Helium MFC set to  20.000000
2/13/2013	3:31:24 PM	H2 MFC set to  0.000000
2/13/2013	3:31:24 PM	BCl3 MFC set to  0.000000
2/13/2013	3:31:24 PM	PH3 MFC set to  0.000000
2/13/2013	3:31:24 PM	SiCl4 MFC set to  0.000000
2/13/2013	3:31:24 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	3:31:24 PM	Tube furnace set to 0
2/13/2013	3:31:54 PM	Helium valve closed
2/13/2013	3:31:54 PM	H2 valve closed
2/13/2013	3:31:54 PM	BCl3 valve closed
2/13/2013	3:31:54 PM	PH3 valve closed
2/13/2013	3:31:54 PM	SiCl4 pre valve closed
2/13/2013	3:31:54 PM	SiCl4 post valve closed
2/13/2013	3:31:54 PM	Bypass valve closed
2/13/2013	3:31:54 PM	Bubbler valve closed
2/13/2013	3:31:54 PM	Main Vac valve opened
2/13/2013	3:31:54 PM	Helium MFC set to  0.000000
2/13/2013	3:31:54 PM	H2 MFC set to  0.000000
2/13/2013	3:31:54 PM	BCl3 MFC set to  0.000000
2/13/2013	3:31:54 PM	PH3 MFC set to  0.000000
2/13/2013	3:31:54 PM	SiCl4 MFC set to  0.000000
2/13/2013	3:31:54 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	3:31:54 PM	Tube furnace set to 0
2/13/2013	3:32:24 PM	H2 valve closed
2/13/2013	3:32:24 PM	BCl3 valve closed
2/13/2013	3:32:24 PM	PH3 valve closed
2/13/2013	3:32:24 PM	SiCl4 pre valve closed
2/13/2013	3:32:24 PM	SiCl4 post valve closed
2/13/2013	3:32:24 PM	Bypass valve closed
2/13/2013	3:32:24 PM	Bubbler valve closed
2/13/2013	3:32:25 PM	Helium valve opened
2/13/2013	3:32:25 PM	Main Vac valve opened
2/13/2013	3:32:25 PM	Helium MFC set to  20.000000
2/13/2013	3:32:25 PM	H2 MFC set to  0.000000
2/13/2013	3:32:25 PM	BCl3 MFC set to  0.000000
2/13/2013	3:32:25 PM	PH3 MFC set to  0.000000
2/13/2013	3:32:25 PM	SiCl4 MFC set to  0.000000
2/13/2013	3:32:25 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	3:32:25 PM	Tube furnace set to 0
2/13/2013	3:32:55 PM	Helium valve closed
2/13/2013	3:32:55 PM	H2 valve closed
2/13/2013	3:32:55 PM	BCl3 valve closed
2/13/2013	3:32:55 PM	PH3 valve closed
2/13/2013	3:32:55 PM	SiCl4 pre valve closed
2/13/2013	3:32:55 PM	SiCl4 post valve closed
2/13/2013	3:32:55 PM	Bypass valve closed
2/13/2013	3:32:55 PM	Bubbler valve closed
2/13/2013	3:32:55 PM	Main Vac valve opened
2/13/2013	3:32:55 PM	Helium MFC set to  0.000000
2/13/2013	3:32:55 PM	H2 MFC set to  0.000000
2/13/2013	3:32:55 PM	BCl3 MFC set to  0.000000
2/13/2013	3:32:55 PM	PH3 MFC set to  0.000000
2/13/2013	3:32:55 PM	SiCl4 MFC set to  0.000000
2/13/2013	3:32:55 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	3:32:55 PM	Tube furnace set to 0
2/13/2013	3:33:25 PM	H2 valve closed
2/13/2013	3:33:25 PM	BCl3 valve closed
2/13/2013	3:33:25 PM	PH3 valve closed
2/13/2013	3:33:25 PM	SiCl4 pre valve closed
2/13/2013	3:33:25 PM	SiCl4 post valve closed
2/13/2013	3:33:25 PM	Bypass valve closed
2/13/2013	3:33:25 PM	Bubbler valve closed
2/13/2013	3:33:25 PM	Helium valve opened
2/13/2013	3:33:25 PM	Main Vac valve opened
2/13/2013	3:33:25 PM	Helium MFC set to  20.000000
2/13/2013	3:33:25 PM	H2 MFC set to  0.000000
2/13/2013	3:33:25 PM	BCl3 MFC set to  0.000000
2/13/2013	3:33:25 PM	PH3 MFC set to  0.000000
2/13/2013	3:33:25 PM	SiCl4 MFC set to  0.000000
2/13/2013	3:33:25 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	3:33:25 PM	Tube furnace set to 0
2/13/2013	3:33:55 PM	Helium valve closed
2/13/2013	3:33:55 PM	H2 valve closed
2/13/2013	3:33:55 PM	BCl3 valve closed
2/13/2013	3:33:55 PM	PH3 valve closed
2/13/2013	3:33:55 PM	SiCl4 pre valve closed
2/13/2013	3:33:55 PM	SiCl4 post valve closed
2/13/2013	3:33:55 PM	Bypass valve closed
2/13/2013	3:33:55 PM	Bubbler valve closed
2/13/2013	3:33:55 PM	Main Vac valve opened
2/13/2013	3:33:55 PM	Helium MFC set to  0.000000
2/13/2013	3:33:55 PM	H2 MFC set to  0.000000
2/13/2013	3:33:55 PM	BCl3 MFC set to  0.000000
2/13/2013	3:33:55 PM	PH3 MFC set to  0.000000
2/13/2013	3:33:55 PM	SiCl4 MFC set to  0.000000
2/13/2013	3:33:55 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	3:33:55 PM	Tube furnace set to 0
2/13/2013	3:34:25 PM	H2 valve closed
2/13/2013	3:34:25 PM	BCl3 valve closed
2/13/2013	3:34:26 PM	PH3 valve closed
2/13/2013	3:34:26 PM	SiCl4 pre valve closed
2/13/2013	3:34:26 PM	SiCl4 post valve closed
2/13/2013	3:34:26 PM	Bypass valve closed
2/13/2013	3:34:26 PM	Bubbler valve closed
2/13/2013	3:34:26 PM	Helium valve opened
2/13/2013	3:34:26 PM	Main Vac valve opened
2/13/2013	3:34:26 PM	Helium MFC set to  20.000000
2/13/2013	3:34:26 PM	H2 MFC set to  0.000000
2/13/2013	3:34:26 PM	BCl3 MFC set to  0.000000
2/13/2013	3:34:26 PM	PH3 MFC set to  0.000000
2/13/2013	3:34:26 PM	SiCl4 MFC set to  0.000000
2/13/2013	3:34:26 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	3:34:26 PM	Tube furnace set to 0
2/13/2013	3:34:56 PM	Helium valve closed
2/13/2013	3:34:56 PM	H2 valve closed
2/13/2013	3:34:56 PM	BCl3 valve closed
2/13/2013	3:34:56 PM	PH3 valve closed
2/13/2013	3:34:56 PM	SiCl4 pre valve closed
2/13/2013	3:34:56 PM	SiCl4 post valve closed
2/13/2013	3:34:56 PM	Bypass valve closed
2/13/2013	3:34:56 PM	Bubbler valve closed
2/13/2013	3:34:56 PM	Main Vac valve opened
2/13/2013	3:34:56 PM	Helium MFC set to  0.000000
2/13/2013	3:34:56 PM	H2 MFC set to  0.000000
2/13/2013	3:34:56 PM	BCl3 MFC set to  0.000000
2/13/2013	3:34:56 PM	PH3 MFC set to  0.000000
2/13/2013	3:34:56 PM	SiCl4 MFC set to  0.000000
2/13/2013	3:34:56 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	3:34:56 PM	Tube furnace set to 0
2/13/2013	3:35:26 PM	H2 valve closed
2/13/2013	3:35:26 PM	BCl3 valve closed
2/13/2013	3:35:26 PM	PH3 valve closed
2/13/2013	3:35:26 PM	SiCl4 pre valve closed
2/13/2013	3:35:26 PM	SiCl4 post valve closed
2/13/2013	3:35:26 PM	Bypass valve closed
2/13/2013	3:35:26 PM	Bubbler valve closed
2/13/2013	3:35:26 PM	Helium valve opened
2/13/2013	3:35:26 PM	Main Vac valve opened
2/13/2013	3:35:26 PM	Helium MFC set to  20.000000
2/13/2013	3:35:26 PM	H2 MFC set to  0.000000
2/13/2013	3:35:26 PM	BCl3 MFC set to  0.000000
2/13/2013	3:35:26 PM	PH3 MFC set to  0.000000
2/13/2013	3:35:26 PM	SiCl4 MFC set to  0.000000
2/13/2013	3:35:26 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	3:35:26 PM	Tube furnace set to 0
2/13/2013	3:35:56 PM	Helium valve closed
2/13/2013	3:35:56 PM	H2 valve closed
2/13/2013	3:35:56 PM	BCl3 valve closed
2/13/2013	3:35:56 PM	PH3 valve closed
2/13/2013	3:35:56 PM	SiCl4 pre valve closed
2/13/2013	3:35:56 PM	SiCl4 post valve closed
2/13/2013	3:35:56 PM	Bypass valve closed
2/13/2013	3:35:56 PM	Bubbler valve closed
2/13/2013	3:35:56 PM	Main Vac valve opened
2/13/2013	3:35:56 PM	Helium MFC set to  0.000000
2/13/2013	3:35:56 PM	H2 MFC set to  0.000000
2/13/2013	3:35:56 PM	BCl3 MFC set to  0.000000
2/13/2013	3:35:56 PM	PH3 MFC set to  0.000000
2/13/2013	3:35:56 PM	SiCl4 MFC set to  0.000000
2/13/2013	3:35:56 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	3:35:56 PM	Tube furnace set to 0
2/13/2013	3:36:26 PM	H2 valve closed
2/13/2013	3:36:27 PM	BCl3 valve closed
2/13/2013	3:36:27 PM	PH3 valve closed
2/13/2013	3:36:27 PM	SiCl4 pre valve closed
2/13/2013	3:36:27 PM	SiCl4 post valve closed
2/13/2013	3:36:27 PM	Bypass valve closed
2/13/2013	3:36:27 PM	Bubbler valve closed
2/13/2013	3:36:27 PM	Helium valve opened
2/13/2013	3:36:27 PM	Main Vac valve opened
2/13/2013	3:36:27 PM	Helium MFC set to  20.000000
2/13/2013	3:36:27 PM	H2 MFC set to  0.000000
2/13/2013	3:36:27 PM	BCl3 MFC set to  0.000000
2/13/2013	3:36:27 PM	PH3 MFC set to  0.000000
2/13/2013	3:36:27 PM	SiCl4 MFC set to  0.000000
2/13/2013	3:36:27 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	3:36:27 PM	Tube furnace set to 0
2/13/2013	3:36:57 PM	Helium valve closed
2/13/2013	3:36:57 PM	H2 valve closed
2/13/2013	3:36:57 PM	BCl3 valve closed
2/13/2013	3:36:57 PM	PH3 valve closed
2/13/2013	3:36:57 PM	SiCl4 pre valve closed
2/13/2013	3:36:57 PM	SiCl4 post valve closed
2/13/2013	3:36:57 PM	Bypass valve closed
2/13/2013	3:36:57 PM	Bubbler valve closed
2/13/2013	3:36:57 PM	Main Vac valve opened
2/13/2013	3:36:57 PM	Helium MFC set to  0.000000
2/13/2013	3:36:57 PM	H2 MFC set to  0.000000
2/13/2013	3:36:57 PM	BCl3 MFC set to  0.000000
2/13/2013	3:36:57 PM	PH3 MFC set to  0.000000
2/13/2013	3:36:57 PM	SiCl4 MFC set to  0.000000
2/13/2013	3:36:57 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	3:36:57 PM	Tube furnace set to 0
2/13/2013	3:37:27 PM	H2 valve closed
2/13/2013	3:37:27 PM	BCl3 valve closed
2/13/2013	3:37:27 PM	PH3 valve closed
2/13/2013	3:37:27 PM	SiCl4 pre valve closed
2/13/2013	3:37:27 PM	SiCl4 post valve closed
2/13/2013	3:37:27 PM	Bypass valve closed
2/13/2013	3:37:27 PM	Bubbler valve closed
2/13/2013	3:37:27 PM	Helium valve opened
2/13/2013	3:37:27 PM	Main Vac valve opened
2/13/2013	3:37:27 PM	Helium MFC set to  20.000000
2/13/2013	3:37:27 PM	H2 MFC set to  0.000000
2/13/2013	3:37:27 PM	BCl3 MFC set to  0.000000
2/13/2013	3:37:27 PM	PH3 MFC set to  0.000000
2/13/2013	3:37:27 PM	SiCl4 MFC set to  0.000000
2/13/2013	3:37:27 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	3:37:27 PM	Tube furnace set to 0
2/13/2013	3:37:57 PM	Helium valve closed
2/13/2013	3:37:57 PM	H2 valve closed
2/13/2013	3:37:57 PM	BCl3 valve closed
2/13/2013	3:37:57 PM	PH3 valve closed
2/13/2013	3:37:57 PM	SiCl4 pre valve closed
2/13/2013	3:37:57 PM	SiCl4 post valve closed
2/13/2013	3:37:57 PM	Bypass valve closed
2/13/2013	3:37:57 PM	Bubbler valve closed
2/13/2013	3:37:57 PM	Main Vac valve opened
2/13/2013	3:37:57 PM	Helium MFC set to  0.000000
2/13/2013	3:37:57 PM	H2 MFC set to  0.000000
2/13/2013	3:37:57 PM	BCl3 MFC set to  0.000000
2/13/2013	3:37:57 PM	PH3 MFC set to  0.000000
2/13/2013	3:37:57 PM	SiCl4 MFC set to  0.000000
2/13/2013	3:37:57 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	3:37:57 PM	Tube furnace set to 0
2/13/2013	3:38:28 PM	H2 valve closed
2/13/2013	3:38:28 PM	BCl3 valve closed
2/13/2013	3:38:28 PM	PH3 valve closed
2/13/2013	3:38:28 PM	SiCl4 pre valve closed
2/13/2013	3:38:28 PM	SiCl4 post valve closed
2/13/2013	3:38:28 PM	Bypass valve closed
2/13/2013	3:38:28 PM	Bubbler valve closed
2/13/2013	3:38:28 PM	Helium valve opened
2/13/2013	3:38:28 PM	Main Vac valve opened
2/13/2013	3:38:28 PM	Helium MFC set to  20.000000
2/13/2013	3:38:28 PM	H2 MFC set to  0.000000
2/13/2013	3:38:28 PM	BCl3 MFC set to  0.000000
2/13/2013	3:38:28 PM	PH3 MFC set to  0.000000
2/13/2013	3:38:28 PM	SiCl4 MFC set to  0.000000
2/13/2013	3:38:28 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	3:38:28 PM	Tube furnace set to 0
2/13/2013	3:38:58 PM	Helium valve closed
2/13/2013	3:38:58 PM	H2 valve closed
2/13/2013	3:38:58 PM	BCl3 valve closed
2/13/2013	3:38:58 PM	PH3 valve closed
2/13/2013	3:38:58 PM	SiCl4 pre valve closed
2/13/2013	3:38:58 PM	SiCl4 post valve closed
2/13/2013	3:38:58 PM	Bypass valve closed
2/13/2013	3:38:58 PM	Bubbler valve closed
2/13/2013	3:38:58 PM	Main Vac valve opened
2/13/2013	3:38:58 PM	Helium MFC set to  0.000000
2/13/2013	3:38:58 PM	H2 MFC set to  0.000000
2/13/2013	3:38:58 PM	BCl3 MFC set to  0.000000
2/13/2013	3:38:58 PM	PH3 MFC set to  0.000000
2/13/2013	3:38:58 PM	SiCl4 MFC set to  0.000000
2/13/2013	3:38:58 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	3:38:58 PM	Tube furnace set to 200
2/13/2013	3:39:28 PM	H2 valve closed
2/13/2013	3:39:28 PM	BCl3 valve closed
2/13/2013	3:39:28 PM	PH3 valve closed
2/13/2013	3:39:28 PM	SiCl4 pre valve closed
2/13/2013	3:39:28 PM	SiCl4 post valve closed
2/13/2013	3:39:28 PM	Bypass valve closed
2/13/2013	3:39:28 PM	Bubbler valve closed
2/13/2013	3:39:28 PM	Helium valve opened
2/13/2013	3:39:28 PM	Main Vac valve opened
2/13/2013	3:39:28 PM	Helium MFC set to  20.000000
2/13/2013	3:39:28 PM	H2 MFC set to  0.000000
2/13/2013	3:39:28 PM	BCl3 MFC set to  0.000000
2/13/2013	3:39:28 PM	PH3 MFC set to  0.000000
2/13/2013	3:39:28 PM	SiCl4 MFC set to  0.000000
2/13/2013	3:39:28 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	3:39:28 PM	Tube furnace set to 200
2/13/2013	3:39:58 PM	Helium valve closed
2/13/2013	3:39:58 PM	H2 valve closed
2/13/2013	3:39:58 PM	BCl3 valve closed
2/13/2013	3:39:58 PM	PH3 valve closed
2/13/2013	3:39:58 PM	SiCl4 pre valve closed
2/13/2013	3:39:58 PM	SiCl4 post valve closed
2/13/2013	3:39:58 PM	Bypass valve closed
2/13/2013	3:39:58 PM	Bubbler valve closed
2/13/2013	3:39:58 PM	Main Vac valve opened
2/13/2013	3:39:58 PM	Helium MFC set to  0.000000
2/13/2013	3:39:58 PM	H2 MFC set to  0.000000
2/13/2013	3:39:58 PM	BCl3 MFC set to  0.000000
2/13/2013	3:39:58 PM	PH3 MFC set to  0.000000
2/13/2013	3:39:58 PM	SiCl4 MFC set to  0.000000
2/13/2013	3:39:58 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	3:39:58 PM	Tube furnace set to 200
2/13/2013	3:40:29 PM	H2 valve closed
2/13/2013	3:40:29 PM	BCl3 valve closed
2/13/2013	3:40:29 PM	PH3 valve closed
2/13/2013	3:40:29 PM	SiCl4 pre valve closed
2/13/2013	3:40:29 PM	SiCl4 post valve closed
2/13/2013	3:40:29 PM	Bypass valve closed
2/13/2013	3:40:29 PM	Bubbler valve closed
2/13/2013	3:40:29 PM	Helium valve opened
2/13/2013	3:40:29 PM	Main Vac valve opened
2/13/2013	3:40:29 PM	Helium MFC set to  20.000000
2/13/2013	3:40:29 PM	H2 MFC set to  0.000000
2/13/2013	3:40:29 PM	BCl3 MFC set to  0.000000
2/13/2013	3:40:29 PM	PH3 MFC set to  0.000000
2/13/2013	3:40:29 PM	SiCl4 MFC set to  0.000000
2/13/2013	3:40:29 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	3:40:29 PM	Tube furnace set to 200
2/13/2013	3:40:59 PM	Helium valve closed
2/13/2013	3:40:59 PM	H2 valve closed
2/13/2013	3:40:59 PM	BCl3 valve closed
2/13/2013	3:40:59 PM	PH3 valve closed
2/13/2013	3:40:59 PM	SiCl4 pre valve closed
2/13/2013	3:40:59 PM	SiCl4 post valve closed
2/13/2013	3:40:59 PM	Bypass valve closed
2/13/2013	3:40:59 PM	Bubbler valve closed
2/13/2013	3:40:59 PM	Main Vac valve opened
2/13/2013	3:40:59 PM	Helium MFC set to  0.000000
2/13/2013	3:40:59 PM	H2 MFC set to  0.000000
2/13/2013	3:40:59 PM	BCl3 MFC set to  0.000000
2/13/2013	3:40:59 PM	PH3 MFC set to  0.000000
2/13/2013	3:40:59 PM	SiCl4 MFC set to  0.000000
2/13/2013	3:40:59 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	3:40:59 PM	Tube furnace set to 200
2/13/2013	3:41:29 PM	H2 valve closed
2/13/2013	3:41:29 PM	BCl3 valve closed
2/13/2013	3:41:29 PM	PH3 valve closed
2/13/2013	3:41:29 PM	SiCl4 pre valve closed
2/13/2013	3:41:29 PM	SiCl4 post valve closed
2/13/2013	3:41:29 PM	Bypass valve closed
2/13/2013	3:41:29 PM	Bubbler valve closed
2/13/2013	3:41:29 PM	Helium valve opened
2/13/2013	3:41:29 PM	Main Vac valve opened
2/13/2013	3:41:29 PM	Helium MFC set to  20.000000
2/13/2013	3:41:29 PM	H2 MFC set to  0.000000
2/13/2013	3:41:29 PM	BCl3 MFC set to  0.000000
2/13/2013	3:41:29 PM	PH3 MFC set to  0.000000
2/13/2013	3:41:29 PM	SiCl4 MFC set to  0.000000
2/13/2013	3:41:29 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	3:41:29 PM	Tube furnace set to 200
2/13/2013	3:41:59 PM	Helium valve closed
2/13/2013	3:41:59 PM	H2 valve closed
2/13/2013	3:41:59 PM	BCl3 valve closed
2/13/2013	3:41:59 PM	PH3 valve closed
2/13/2013	3:41:59 PM	SiCl4 pre valve closed
2/13/2013	3:41:59 PM	SiCl4 post valve closed
2/13/2013	3:41:59 PM	Bypass valve closed
2/13/2013	3:41:59 PM	Bubbler valve closed
2/13/2013	3:41:59 PM	Main Vac valve opened
2/13/2013	3:41:59 PM	Helium MFC set to  0.000000
2/13/2013	3:41:59 PM	H2 MFC set to  0.000000
2/13/2013	3:41:59 PM	BCl3 MFC set to  0.000000
2/13/2013	3:41:59 PM	PH3 MFC set to  0.000000
2/13/2013	3:41:59 PM	SiCl4 MFC set to  0.000000
2/13/2013	3:41:59 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	3:41:59 PM	Tube furnace set to 200
2/13/2013	3:42:30 PM	H2 valve closed
2/13/2013	3:42:30 PM	BCl3 valve closed
2/13/2013	3:42:30 PM	PH3 valve closed
2/13/2013	3:42:30 PM	SiCl4 pre valve closed
2/13/2013	3:42:30 PM	SiCl4 post valve closed
2/13/2013	3:42:30 PM	Bypass valve closed
2/13/2013	3:42:30 PM	Bubbler valve closed
2/13/2013	3:42:30 PM	Helium valve opened
2/13/2013	3:42:30 PM	Main Vac valve opened
2/13/2013	3:42:30 PM	Helium MFC set to  20.000000
2/13/2013	3:42:30 PM	H2 MFC set to  0.000000
2/13/2013	3:42:30 PM	BCl3 MFC set to  0.000000
2/13/2013	3:42:30 PM	PH3 MFC set to  0.000000
2/13/2013	3:42:30 PM	SiCl4 MFC set to  0.000000
2/13/2013	3:42:30 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	3:42:30 PM	Tube furnace set to 200
2/13/2013	3:43:00 PM	Helium valve closed
2/13/2013	3:43:00 PM	H2 valve closed
2/13/2013	3:43:00 PM	BCl3 valve closed
2/13/2013	3:43:00 PM	PH3 valve closed
2/13/2013	3:43:00 PM	SiCl4 pre valve closed
2/13/2013	3:43:00 PM	SiCl4 post valve closed
2/13/2013	3:43:00 PM	Bypass valve closed
2/13/2013	3:43:00 PM	Bubbler valve closed
2/13/2013	3:43:00 PM	Main Vac valve opened
2/13/2013	3:43:00 PM	Helium MFC set to  0.000000
2/13/2013	3:43:00 PM	H2 MFC set to  0.000000
2/13/2013	3:43:00 PM	BCl3 MFC set to  0.000000
2/13/2013	3:43:00 PM	PH3 MFC set to  0.000000
2/13/2013	3:43:00 PM	SiCl4 MFC set to  0.000000
2/13/2013	3:43:00 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	3:43:00 PM	Tube furnace set to 200
2/13/2013	3:43:30 PM	H2 valve closed
2/13/2013	3:43:30 PM	BCl3 valve closed
2/13/2013	3:43:30 PM	PH3 valve closed
2/13/2013	3:43:30 PM	SiCl4 pre valve closed
2/13/2013	3:43:30 PM	SiCl4 post valve closed
2/13/2013	3:43:30 PM	Bypass valve closed
2/13/2013	3:43:30 PM	Bubbler valve closed
2/13/2013	3:43:30 PM	Helium valve opened
2/13/2013	3:43:30 PM	Main Vac valve opened
2/13/2013	3:43:30 PM	Helium MFC set to  20.000000
2/13/2013	3:43:30 PM	H2 MFC set to  0.000000
2/13/2013	3:43:30 PM	BCl3 MFC set to  0.000000
2/13/2013	3:43:30 PM	PH3 MFC set to  0.000000
2/13/2013	3:43:30 PM	SiCl4 MFC set to  0.000000
2/13/2013	3:43:30 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	3:43:30 PM	Tube furnace set to 200
2/13/2013	3:44:00 PM	Helium valve closed
2/13/2013	3:44:00 PM	H2 valve closed
2/13/2013	3:44:00 PM	BCl3 valve closed
2/13/2013	3:44:00 PM	PH3 valve closed
2/13/2013	3:44:00 PM	SiCl4 pre valve closed
2/13/2013	3:44:00 PM	SiCl4 post valve closed
2/13/2013	3:44:00 PM	Bypass valve closed
2/13/2013	3:44:00 PM	Bubbler valve closed
2/13/2013	3:44:00 PM	Main Vac valve opened
2/13/2013	3:44:00 PM	Helium MFC set to  0.000000
2/13/2013	3:44:00 PM	H2 MFC set to  0.000000
2/13/2013	3:44:00 PM	BCl3 MFC set to  0.000000
2/13/2013	3:44:00 PM	PH3 MFC set to  0.000000
2/13/2013	3:44:00 PM	SiCl4 MFC set to  0.000000
2/13/2013	3:44:00 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	3:44:00 PM	Tube furnace set to 200
2/13/2013	3:44:31 PM	H2 valve closed
2/13/2013	3:44:31 PM	BCl3 valve closed
2/13/2013	3:44:31 PM	PH3 valve closed
2/13/2013	3:44:31 PM	SiCl4 pre valve closed
2/13/2013	3:44:31 PM	SiCl4 post valve closed
2/13/2013	3:44:31 PM	Bypass valve closed
2/13/2013	3:44:31 PM	Bubbler valve closed
2/13/2013	3:44:31 PM	Helium valve opened
2/13/2013	3:44:31 PM	Main Vac valve opened
2/13/2013	3:44:31 PM	Helium MFC set to  20.000000
2/13/2013	3:44:31 PM	H2 MFC set to  0.000000
2/13/2013	3:44:31 PM	BCl3 MFC set to  0.000000
2/13/2013	3:44:31 PM	PH3 MFC set to  0.000000
2/13/2013	3:44:31 PM	SiCl4 MFC set to  0.000000
2/13/2013	3:44:31 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	3:44:31 PM	Tube furnace set to 200
2/13/2013	3:45:01 PM	Helium valve closed
2/13/2013	3:45:01 PM	H2 valve closed
2/13/2013	3:45:01 PM	BCl3 valve closed
2/13/2013	3:45:01 PM	PH3 valve closed
2/13/2013	3:45:01 PM	SiCl4 pre valve closed
2/13/2013	3:45:01 PM	SiCl4 post valve closed
2/13/2013	3:45:01 PM	Bypass valve closed
2/13/2013	3:45:01 PM	Bubbler valve closed
2/13/2013	3:45:01 PM	Main Vac valve opened
2/13/2013	3:45:01 PM	Helium MFC set to  0.000000
2/13/2013	3:45:01 PM	H2 MFC set to  0.000000
2/13/2013	3:45:01 PM	BCl3 MFC set to  0.000000
2/13/2013	3:45:01 PM	PH3 MFC set to  0.000000
2/13/2013	3:45:01 PM	SiCl4 MFC set to  0.000000
2/13/2013	3:45:01 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	3:45:01 PM	Tube furnace set to 0
2/13/2013	3:45:02 PM	Run finished at 3:45 PM
2/13/2013	3:56:33 PM	Recipe started at 3:56 PM
2/13/2013	3:56:33 PM	Helium valve closed
2/13/2013	3:56:33 PM	H2 valve closed
2/13/2013	3:56:33 PM	BCl3 valve closed
2/13/2013	3:56:33 PM	PH3 valve closed
2/13/2013	3:56:33 PM	SiCl4 pre valve closed
2/13/2013	3:56:33 PM	SiCl4 post valve closed
2/13/2013	3:56:33 PM	Bypass valve closed
2/13/2013	3:56:33 PM	Bubbler valve closed
2/13/2013	3:56:33 PM	Main Vac valve opened
2/13/2013	3:56:33 PM	Helium MFC set to  0.000000
2/13/2013	3:56:33 PM	H2 MFC set to  0.000000
2/13/2013	3:56:33 PM	BCl3 MFC set to  0.000000
2/13/2013	3:56:33 PM	PH3 MFC set to  0.000000
2/13/2013	3:56:33 PM	SiCl4 MFC set to  0.000000
2/13/2013	3:56:33 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	3:56:34 PM	Tube furnace set to 0
2/13/2013	3:56:43 PM	H2 valve closed
2/13/2013	3:56:43 PM	BCl3 valve closed
2/13/2013	3:56:43 PM	PH3 valve closed
2/13/2013	3:56:43 PM	SiCl4 pre valve closed
2/13/2013	3:56:43 PM	SiCl4 post valve closed
2/13/2013	3:56:43 PM	Bypass valve closed
2/13/2013	3:56:43 PM	Bubbler valve closed
2/13/2013	3:56:43 PM	Helium valve opened
2/13/2013	3:56:43 PM	Main Vac valve opened
2/13/2013	3:56:43 PM	Helium MFC set to  20.000000
2/13/2013	3:56:43 PM	H2 MFC set to  0.000000
2/13/2013	3:56:43 PM	BCl3 MFC set to  0.000000
2/13/2013	3:56:43 PM	PH3 MFC set to  0.000000
2/13/2013	3:56:43 PM	SiCl4 MFC set to  0.000000
2/13/2013	3:56:43 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	3:56:43 PM	Tube furnace set to 0
2/13/2013	3:56:43 PM	Helium valve closed
2/13/2013	3:56:43 PM	H2 valve closed
2/13/2013	3:56:43 PM	BCl3 valve closed
2/13/2013	3:56:43 PM	PH3 valve closed
2/13/2013	3:56:43 PM	SiCl4 pre valve closed
2/13/2013	3:56:43 PM	SiCl4 post valve closed
2/13/2013	3:56:43 PM	Bypass valve closed
2/13/2013	3:56:43 PM	Bubbler valve closed
2/13/2013	3:56:43 PM	Main Vac valve opened
2/13/2013	3:56:43 PM	Helium MFC set to  0.000000
2/13/2013	3:56:43 PM	H2 MFC set to  0.000000
2/13/2013	3:56:43 PM	BCl3 MFC set to  0.000000
2/13/2013	3:56:43 PM	PH3 MFC set to  0.000000
2/13/2013	3:56:43 PM	SiCl4 MFC set to  0.000000
2/13/2013	3:56:43 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	3:56:43 PM	Tube furnace set to 0
2/13/2013	3:56:44 PM	H2 valve closed
2/13/2013	3:56:44 PM	BCl3 valve closed
2/13/2013	3:56:44 PM	PH3 valve closed
2/13/2013	3:56:44 PM	SiCl4 pre valve closed
2/13/2013	3:56:44 PM	SiCl4 post valve closed
2/13/2013	3:56:44 PM	Bypass valve closed
2/13/2013	3:56:44 PM	Bubbler valve closed
2/13/2013	3:56:44 PM	Helium valve opened
2/13/2013	3:56:44 PM	Main Vac valve opened
2/13/2013	3:56:44 PM	Helium MFC set to  20.000000
2/13/2013	3:56:44 PM	H2 MFC set to  0.000000
2/13/2013	3:56:44 PM	BCl3 MFC set to  0.000000
2/13/2013	3:56:44 PM	PH3 MFC set to  0.000000
2/13/2013	3:56:44 PM	SiCl4 MFC set to  0.000000
2/13/2013	3:56:44 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	3:56:44 PM	Tube furnace set to 0
2/13/2013	3:56:44 PM	Helium valve closed
2/13/2013	3:56:44 PM	H2 valve closed
2/13/2013	3:56:44 PM	BCl3 valve closed
2/13/2013	3:56:44 PM	PH3 valve closed
2/13/2013	3:56:44 PM	SiCl4 pre valve closed
2/13/2013	3:56:44 PM	SiCl4 post valve closed
2/13/2013	3:56:44 PM	Bypass valve closed
2/13/2013	3:56:44 PM	Bubbler valve closed
2/13/2013	3:56:44 PM	Main Vac valve opened
2/13/2013	3:56:45 PM	Helium MFC set to  0.000000
2/13/2013	3:56:45 PM	H2 MFC set to  0.000000
2/13/2013	3:56:45 PM	BCl3 MFC set to  0.000000
2/13/2013	3:56:45 PM	PH3 MFC set to  0.000000
2/13/2013	3:56:45 PM	SiCl4 MFC set to  0.000000
2/13/2013	3:56:45 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	3:56:45 PM	Tube furnace set to 0
2/13/2013	3:56:47 PM	H2 valve closed
2/13/2013	3:56:47 PM	BCl3 valve closed
2/13/2013	3:56:47 PM	PH3 valve closed
2/13/2013	3:56:47 PM	SiCl4 pre valve closed
2/13/2013	3:56:47 PM	SiCl4 post valve closed
2/13/2013	3:56:47 PM	Bypass valve closed
2/13/2013	3:56:47 PM	Bubbler valve closed
2/13/2013	3:56:47 PM	Helium valve opened
2/13/2013	3:56:47 PM	Main Vac valve opened
2/13/2013	3:56:47 PM	Helium MFC set to  20.000000
2/13/2013	3:56:47 PM	H2 MFC set to  0.000000
2/13/2013	3:56:47 PM	BCl3 MFC set to  0.000000
2/13/2013	3:56:47 PM	PH3 MFC set to  0.000000
2/13/2013	3:56:47 PM	SiCl4 MFC set to  0.000000
2/13/2013	3:56:47 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	3:56:47 PM	Tube furnace set to 0
2/13/2013	3:56:47 PM	Helium valve closed
2/13/2013	3:56:47 PM	H2 valve closed
2/13/2013	3:56:47 PM	BCl3 valve closed
2/13/2013	3:56:47 PM	PH3 valve closed
2/13/2013	3:56:47 PM	SiCl4 pre valve closed
2/13/2013	3:56:47 PM	SiCl4 post valve closed
2/13/2013	3:56:47 PM	Bypass valve closed
2/13/2013	3:56:47 PM	Bubbler valve closed
2/13/2013	3:56:47 PM	Main Vac valve opened
2/13/2013	3:56:47 PM	Helium MFC set to  0.000000
2/13/2013	3:56:47 PM	H2 MFC set to  0.000000
2/13/2013	3:56:47 PM	BCl3 MFC set to  0.000000
2/13/2013	3:56:47 PM	PH3 MFC set to  0.000000
2/13/2013	3:56:47 PM	SiCl4 MFC set to  0.000000
2/13/2013	3:56:47 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	3:56:47 PM	Tube furnace set to 0
2/13/2013	3:57:17 PM	H2 valve closed
2/13/2013	3:57:17 PM	BCl3 valve closed
2/13/2013	3:57:17 PM	PH3 valve closed
2/13/2013	3:57:17 PM	SiCl4 pre valve closed
2/13/2013	3:57:17 PM	SiCl4 post valve closed
2/13/2013	3:57:17 PM	Bypass valve closed
2/13/2013	3:57:17 PM	Bubbler valve closed
2/13/2013	3:57:17 PM	Helium valve opened
2/13/2013	3:57:17 PM	Main Vac valve opened
2/13/2013	3:57:17 PM	Helium MFC set to  20.000000
2/13/2013	3:57:18 PM	H2 MFC set to  0.000000
2/13/2013	3:57:18 PM	BCl3 MFC set to  0.000000
2/13/2013	3:57:18 PM	PH3 MFC set to  0.000000
2/13/2013	3:57:18 PM	SiCl4 MFC set to  0.000000
2/13/2013	3:57:18 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	3:57:18 PM	Tube furnace set to 0
2/13/2013	3:57:48 PM	Helium valve closed
2/13/2013	3:57:48 PM	H2 valve closed
2/13/2013	3:57:48 PM	BCl3 valve closed
2/13/2013	3:57:48 PM	PH3 valve closed
2/13/2013	3:57:48 PM	SiCl4 pre valve closed
2/13/2013	3:57:48 PM	SiCl4 post valve closed
2/13/2013	3:57:48 PM	Bypass valve closed
2/13/2013	3:57:48 PM	Bubbler valve closed
2/13/2013	3:57:48 PM	Main Vac valve opened
2/13/2013	3:57:48 PM	Helium MFC set to  0.000000
2/13/2013	3:57:48 PM	H2 MFC set to  0.000000
2/13/2013	3:57:48 PM	BCl3 MFC set to  0.000000
2/13/2013	3:57:48 PM	PH3 MFC set to  0.000000
2/13/2013	3:57:48 PM	SiCl4 MFC set to  0.000000
2/13/2013	3:57:48 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	3:57:48 PM	Tube furnace set to 0
2/13/2013	3:58:18 PM	H2 valve closed
2/13/2013	3:58:18 PM	BCl3 valve closed
2/13/2013	3:58:18 PM	PH3 valve closed
2/13/2013	3:58:18 PM	SiCl4 pre valve closed
2/13/2013	3:58:18 PM	SiCl4 post valve closed
2/13/2013	3:58:18 PM	Bypass valve closed
2/13/2013	3:58:18 PM	Bubbler valve closed
2/13/2013	3:58:18 PM	Helium valve opened
2/13/2013	3:58:18 PM	Main Vac valve opened
2/13/2013	3:58:18 PM	Helium MFC set to  20.000000
2/13/2013	3:58:18 PM	H2 MFC set to  0.000000
2/13/2013	3:58:18 PM	BCl3 MFC set to  0.000000
2/13/2013	3:58:18 PM	PH3 MFC set to  0.000000
2/13/2013	3:58:18 PM	SiCl4 MFC set to  0.000000
2/13/2013	3:58:18 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	3:58:18 PM	Tube furnace set to 0
2/13/2013	3:58:48 PM	Helium valve closed
2/13/2013	3:58:48 PM	H2 valve closed
2/13/2013	3:58:48 PM	BCl3 valve closed
2/13/2013	3:58:48 PM	PH3 valve closed
2/13/2013	3:58:48 PM	SiCl4 pre valve closed
2/13/2013	3:58:48 PM	SiCl4 post valve closed
2/13/2013	3:58:48 PM	Bypass valve closed
2/13/2013	3:58:48 PM	Bubbler valve closed
2/13/2013	3:58:48 PM	Main Vac valve opened
2/13/2013	3:58:48 PM	Helium MFC set to  0.000000
2/13/2013	3:58:48 PM	H2 MFC set to  0.000000
2/13/2013	3:58:48 PM	BCl3 MFC set to  0.000000
2/13/2013	3:58:48 PM	PH3 MFC set to  0.000000
2/13/2013	3:58:48 PM	SiCl4 MFC set to  0.000000
2/13/2013	3:58:48 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	3:58:48 PM	Tube furnace set to 0
2/13/2013	3:59:18 PM	H2 valve closed
2/13/2013	3:59:18 PM	BCl3 valve closed
2/13/2013	3:59:18 PM	PH3 valve closed
2/13/2013	3:59:18 PM	SiCl4 pre valve closed
2/13/2013	3:59:18 PM	SiCl4 post valve closed
2/13/2013	3:59:18 PM	Bypass valve closed
2/13/2013	3:59:18 PM	Bubbler valve closed
2/13/2013	3:59:18 PM	Helium valve opened
2/13/2013	3:59:18 PM	Main Vac valve opened
2/13/2013	3:59:18 PM	Helium MFC set to  20.000000
2/13/2013	3:59:19 PM	H2 MFC set to  0.000000
2/13/2013	3:59:19 PM	BCl3 MFC set to  0.000000
2/13/2013	3:59:19 PM	PH3 MFC set to  0.000000
2/13/2013	3:59:19 PM	SiCl4 MFC set to  0.000000
2/13/2013	3:59:19 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	3:59:19 PM	Tube furnace set to 0
2/13/2013	3:59:49 PM	Helium valve closed
2/13/2013	3:59:49 PM	H2 valve closed
2/13/2013	3:59:49 PM	BCl3 valve closed
2/13/2013	3:59:49 PM	PH3 valve closed
2/13/2013	3:59:49 PM	SiCl4 pre valve closed
2/13/2013	3:59:49 PM	SiCl4 post valve closed
2/13/2013	3:59:49 PM	Bypass valve closed
2/13/2013	3:59:49 PM	Bubbler valve closed
2/13/2013	3:59:49 PM	Main Vac valve opened
2/13/2013	3:59:49 PM	Helium MFC set to  0.000000
2/13/2013	3:59:49 PM	H2 MFC set to  0.000000
2/13/2013	3:59:49 PM	BCl3 MFC set to  0.000000
2/13/2013	3:59:49 PM	PH3 MFC set to  0.000000
2/13/2013	3:59:49 PM	SiCl4 MFC set to  0.000000
2/13/2013	3:59:49 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	3:59:49 PM	Tube furnace set to 0
2/13/2013	4:00:19 PM	H2 valve closed
2/13/2013	4:00:19 PM	BCl3 valve closed
2/13/2013	4:00:19 PM	PH3 valve closed
2/13/2013	4:00:19 PM	SiCl4 pre valve closed
2/13/2013	4:00:19 PM	SiCl4 post valve closed
2/13/2013	4:00:19 PM	Bypass valve closed
2/13/2013	4:00:19 PM	Bubbler valve closed
2/13/2013	4:00:19 PM	Helium valve opened
2/13/2013	4:00:19 PM	Main Vac valve opened
2/13/2013	4:00:19 PM	Helium MFC set to  20.000000
2/13/2013	4:00:19 PM	H2 MFC set to  0.000000
2/13/2013	4:00:19 PM	BCl3 MFC set to  0.000000
2/13/2013	4:00:19 PM	PH3 MFC set to  0.000000
2/13/2013	4:00:19 PM	SiCl4 MFC set to  0.000000
2/13/2013	4:00:19 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	4:00:19 PM	Tube furnace set to 0
2/13/2013	4:00:49 PM	Helium valve closed
2/13/2013	4:00:49 PM	H2 valve closed
2/13/2013	4:00:49 PM	BCl3 valve closed
2/13/2013	4:00:49 PM	PH3 valve closed
2/13/2013	4:00:49 PM	SiCl4 pre valve closed
2/13/2013	4:00:49 PM	SiCl4 post valve closed
2/13/2013	4:00:49 PM	Bypass valve closed
2/13/2013	4:00:49 PM	Bubbler valve closed
2/13/2013	4:00:49 PM	Main Vac valve opened
2/13/2013	4:00:49 PM	Helium MFC set to  0.000000
2/13/2013	4:00:49 PM	H2 MFC set to  0.000000
2/13/2013	4:00:49 PM	BCl3 MFC set to  0.000000
2/13/2013	4:00:49 PM	PH3 MFC set to  0.000000
2/13/2013	4:00:49 PM	SiCl4 MFC set to  0.000000
2/13/2013	4:00:49 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	4:00:49 PM	Tube furnace set to 0
2/13/2013	4:01:19 PM	H2 valve closed
2/13/2013	4:01:19 PM	BCl3 valve closed
2/13/2013	4:01:19 PM	PH3 valve closed
2/13/2013	4:01:19 PM	SiCl4 pre valve closed
2/13/2013	4:01:19 PM	SiCl4 post valve closed
2/13/2013	4:01:19 PM	Bypass valve closed
2/13/2013	4:01:19 PM	Bubbler valve closed
2/13/2013	4:01:20 PM	Helium valve opened
2/13/2013	4:01:20 PM	Main Vac valve opened
2/13/2013	4:01:20 PM	Helium MFC set to  20.000000
2/13/2013	4:01:20 PM	H2 MFC set to  0.000000
2/13/2013	4:01:20 PM	BCl3 MFC set to  0.000000
2/13/2013	4:01:20 PM	PH3 MFC set to  0.000000
2/13/2013	4:01:20 PM	SiCl4 MFC set to  0.000000
2/13/2013	4:01:20 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	4:01:20 PM	Tube furnace set to 0
2/13/2013	4:01:50 PM	Helium valve closed
2/13/2013	4:01:50 PM	H2 valve closed
2/13/2013	4:01:50 PM	BCl3 valve closed
2/13/2013	4:01:50 PM	PH3 valve closed
2/13/2013	4:01:50 PM	SiCl4 pre valve closed
2/13/2013	4:01:50 PM	SiCl4 post valve closed
2/13/2013	4:01:50 PM	Bypass valve closed
2/13/2013	4:01:50 PM	Bubbler valve closed
2/13/2013	4:01:50 PM	Main Vac valve opened
2/13/2013	4:01:50 PM	Helium MFC set to  0.000000
2/13/2013	4:01:50 PM	H2 MFC set to  0.000000
2/13/2013	4:01:50 PM	BCl3 MFC set to  0.000000
2/13/2013	4:01:50 PM	PH3 MFC set to  0.000000
2/13/2013	4:01:50 PM	SiCl4 MFC set to  0.000000
2/13/2013	4:01:50 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	4:01:50 PM	Tube furnace set to 0
2/13/2013	4:02:20 PM	H2 valve closed
2/13/2013	4:02:20 PM	BCl3 valve closed
2/13/2013	4:02:20 PM	PH3 valve closed
2/13/2013	4:02:20 PM	SiCl4 pre valve closed
2/13/2013	4:02:20 PM	SiCl4 post valve closed
2/13/2013	4:02:20 PM	Bypass valve closed
2/13/2013	4:02:20 PM	Bubbler valve closed
2/13/2013	4:02:20 PM	Helium valve opened
2/13/2013	4:02:20 PM	Main Vac valve opened
2/13/2013	4:02:20 PM	Helium MFC set to  20.000000
2/13/2013	4:02:20 PM	H2 MFC set to  0.000000
2/13/2013	4:02:20 PM	BCl3 MFC set to  0.000000
2/13/2013	4:02:20 PM	PH3 MFC set to  0.000000
2/13/2013	4:02:20 PM	SiCl4 MFC set to  0.000000
2/13/2013	4:02:20 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	4:02:20 PM	Tube furnace set to 0
2/13/2013	4:02:50 PM	Helium valve closed
2/13/2013	4:02:50 PM	H2 valve closed
2/13/2013	4:02:50 PM	BCl3 valve closed
2/13/2013	4:02:50 PM	PH3 valve closed
2/13/2013	4:02:50 PM	SiCl4 pre valve closed
2/13/2013	4:02:50 PM	SiCl4 post valve closed
2/13/2013	4:02:50 PM	Bypass valve closed
2/13/2013	4:02:50 PM	Bubbler valve closed
2/13/2013	4:02:50 PM	Main Vac valve opened
2/13/2013	4:02:50 PM	Helium MFC set to  0.000000
2/13/2013	4:02:50 PM	H2 MFC set to  0.000000
2/13/2013	4:02:50 PM	BCl3 MFC set to  0.000000
2/13/2013	4:02:50 PM	PH3 MFC set to  0.000000
2/13/2013	4:02:50 PM	SiCl4 MFC set to  0.000000
2/13/2013	4:02:50 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	4:02:50 PM	Tube furnace set to 200
2/13/2013	4:03:20 PM	H2 valve closed
2/13/2013	4:03:20 PM	BCl3 valve closed
2/13/2013	4:03:20 PM	PH3 valve closed
2/13/2013	4:03:20 PM	SiCl4 pre valve closed
2/13/2013	4:03:20 PM	SiCl4 post valve closed
2/13/2013	4:03:20 PM	Bypass valve closed
2/13/2013	4:03:20 PM	Bubbler valve closed
2/13/2013	4:03:21 PM	Helium valve opened
2/13/2013	4:03:21 PM	Main Vac valve opened
2/13/2013	4:03:21 PM	Helium MFC set to  20.000000
2/13/2013	4:03:21 PM	H2 MFC set to  0.000000
2/13/2013	4:03:21 PM	BCl3 MFC set to  0.000000
2/13/2013	4:03:21 PM	PH3 MFC set to  0.000000
2/13/2013	4:03:21 PM	SiCl4 MFC set to  0.000000
2/13/2013	4:03:21 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	4:03:21 PM	Tube furnace set to 200
2/13/2013	4:03:51 PM	Helium valve closed
2/13/2013	4:03:51 PM	H2 valve closed
2/13/2013	4:03:51 PM	BCl3 valve closed
2/13/2013	4:03:51 PM	PH3 valve closed
2/13/2013	4:03:51 PM	SiCl4 pre valve closed
2/13/2013	4:03:51 PM	SiCl4 post valve closed
2/13/2013	4:03:51 PM	Bypass valve closed
2/13/2013	4:03:51 PM	Bubbler valve closed
2/13/2013	4:03:51 PM	Main Vac valve opened
2/13/2013	4:03:51 PM	Helium MFC set to  0.000000
2/13/2013	4:03:51 PM	H2 MFC set to  0.000000
2/13/2013	4:03:51 PM	BCl3 MFC set to  0.000000
2/13/2013	4:03:51 PM	PH3 MFC set to  0.000000
2/13/2013	4:03:51 PM	SiCl4 MFC set to  0.000000
2/13/2013	4:03:51 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	4:03:51 PM	Tube furnace set to 200
2/13/2013	4:04:21 PM	H2 valve closed
2/13/2013	4:04:21 PM	BCl3 valve closed
2/13/2013	4:04:21 PM	PH3 valve closed
2/13/2013	4:04:21 PM	SiCl4 pre valve closed
2/13/2013	4:04:21 PM	SiCl4 post valve closed
2/13/2013	4:04:21 PM	Bypass valve closed
2/13/2013	4:04:21 PM	Bubbler valve closed
2/13/2013	4:04:21 PM	Helium valve opened
2/13/2013	4:04:21 PM	Main Vac valve opened
2/13/2013	4:04:21 PM	Helium MFC set to  20.000000
2/13/2013	4:04:21 PM	H2 MFC set to  0.000000
2/13/2013	4:04:21 PM	BCl3 MFC set to  0.000000
2/13/2013	4:04:21 PM	PH3 MFC set to  0.000000
2/13/2013	4:04:21 PM	SiCl4 MFC set to  0.000000
2/13/2013	4:04:21 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	4:04:21 PM	Tube furnace set to 200
2/13/2013	4:04:51 PM	Helium valve closed
2/13/2013	4:04:51 PM	H2 valve closed
2/13/2013	4:04:51 PM	BCl3 valve closed
2/13/2013	4:04:51 PM	PH3 valve closed
2/13/2013	4:04:51 PM	SiCl4 pre valve closed
2/13/2013	4:04:51 PM	SiCl4 post valve closed
2/13/2013	4:04:51 PM	Bypass valve closed
2/13/2013	4:04:51 PM	Bubbler valve closed
2/13/2013	4:04:51 PM	Main Vac valve opened
2/13/2013	4:04:51 PM	Helium MFC set to  0.000000
2/13/2013	4:04:51 PM	H2 MFC set to  0.000000
2/13/2013	4:04:51 PM	BCl3 MFC set to  0.000000
2/13/2013	4:04:51 PM	PH3 MFC set to  0.000000
2/13/2013	4:04:51 PM	SiCl4 MFC set to  0.000000
2/13/2013	4:04:51 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	4:04:51 PM	Tube furnace set to 200
2/13/2013	4:05:21 PM	H2 valve closed
2/13/2013	4:05:21 PM	BCl3 valve closed
2/13/2013	4:05:21 PM	PH3 valve closed
2/13/2013	4:05:21 PM	SiCl4 pre valve closed
2/13/2013	4:05:22 PM	SiCl4 post valve closed
2/13/2013	4:05:22 PM	Bypass valve closed
2/13/2013	4:05:22 PM	Bubbler valve closed
2/13/2013	4:05:22 PM	Helium valve opened
2/13/2013	4:05:22 PM	Main Vac valve opened
2/13/2013	4:05:22 PM	Helium MFC set to  20.000000
2/13/2013	4:05:22 PM	H2 MFC set to  0.000000
2/13/2013	4:05:22 PM	BCl3 MFC set to  0.000000
2/13/2013	4:05:22 PM	PH3 MFC set to  0.000000
2/13/2013	4:05:22 PM	SiCl4 MFC set to  0.000000
2/13/2013	4:05:22 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	4:05:22 PM	Tube furnace set to 200
2/13/2013	4:05:52 PM	Helium valve closed
2/13/2013	4:05:52 PM	H2 valve closed
2/13/2013	4:05:52 PM	BCl3 valve closed
2/13/2013	4:05:52 PM	PH3 valve closed
2/13/2013	4:05:52 PM	SiCl4 pre valve closed
2/13/2013	4:05:52 PM	SiCl4 post valve closed
2/13/2013	4:05:52 PM	Bypass valve closed
2/13/2013	4:05:52 PM	Bubbler valve closed
2/13/2013	4:05:52 PM	Main Vac valve opened
2/13/2013	4:05:52 PM	Helium MFC set to  0.000000
2/13/2013	4:05:52 PM	H2 MFC set to  0.000000
2/13/2013	4:05:52 PM	BCl3 MFC set to  0.000000
2/13/2013	4:05:52 PM	PH3 MFC set to  0.000000
2/13/2013	4:05:52 PM	SiCl4 MFC set to  0.000000
2/13/2013	4:05:52 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	4:05:52 PM	Tube furnace set to 200
2/13/2013	4:06:22 PM	H2 valve closed
2/13/2013	4:06:22 PM	BCl3 valve closed
2/13/2013	4:06:22 PM	PH3 valve closed
2/13/2013	4:06:22 PM	SiCl4 pre valve closed
2/13/2013	4:06:22 PM	SiCl4 post valve closed
2/13/2013	4:06:22 PM	Bypass valve closed
2/13/2013	4:06:22 PM	Bubbler valve closed
2/13/2013	4:06:22 PM	Helium valve opened
2/13/2013	4:06:22 PM	Main Vac valve opened
2/13/2013	4:06:22 PM	Helium MFC set to  20.000000
2/13/2013	4:06:22 PM	H2 MFC set to  0.000000
2/13/2013	4:06:22 PM	BCl3 MFC set to  0.000000
2/13/2013	4:06:22 PM	PH3 MFC set to  0.000000
2/13/2013	4:06:22 PM	SiCl4 MFC set to  0.000000
2/13/2013	4:06:22 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	4:06:22 PM	Tube furnace set to 200
2/13/2013	4:06:52 PM	Helium valve closed
2/13/2013	4:06:52 PM	H2 valve closed
2/13/2013	4:06:52 PM	BCl3 valve closed
2/13/2013	4:06:52 PM	PH3 valve closed
2/13/2013	4:06:52 PM	SiCl4 pre valve closed
2/13/2013	4:06:52 PM	SiCl4 post valve closed
2/13/2013	4:06:52 PM	Bypass valve closed
2/13/2013	4:06:52 PM	Bubbler valve closed
2/13/2013	4:06:52 PM	Main Vac valve opened
2/13/2013	4:06:52 PM	Helium MFC set to  0.000000
2/13/2013	4:06:52 PM	H2 MFC set to  0.000000
2/13/2013	4:06:52 PM	BCl3 MFC set to  0.000000
2/13/2013	4:06:52 PM	PH3 MFC set to  0.000000
2/13/2013	4:06:52 PM	SiCl4 MFC set to  0.000000
2/13/2013	4:06:52 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	4:06:52 PM	Tube furnace set to 200
2/13/2013	4:07:22 PM	H2 valve closed
2/13/2013	4:07:22 PM	BCl3 valve closed
2/13/2013	4:07:22 PM	PH3 valve closed
2/13/2013	4:07:22 PM	SiCl4 pre valve closed
2/13/2013	4:07:22 PM	SiCl4 post valve closed
2/13/2013	4:07:23 PM	Bypass valve closed
2/13/2013	4:07:23 PM	Bubbler valve closed
2/13/2013	4:07:23 PM	Helium valve opened
2/13/2013	4:07:23 PM	Main Vac valve opened
2/13/2013	4:07:23 PM	Helium MFC set to  20.000000
2/13/2013	4:07:23 PM	H2 MFC set to  0.000000
2/13/2013	4:07:23 PM	BCl3 MFC set to  0.000000
2/13/2013	4:07:23 PM	PH3 MFC set to  0.000000
2/13/2013	4:07:23 PM	SiCl4 MFC set to  0.000000
2/13/2013	4:07:23 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	4:07:23 PM	Tube furnace set to 200
2/13/2013	4:07:53 PM	Helium valve closed
2/13/2013	4:07:53 PM	H2 valve closed
2/13/2013	4:07:53 PM	BCl3 valve closed
2/13/2013	4:07:53 PM	PH3 valve closed
2/13/2013	4:07:53 PM	SiCl4 pre valve closed
2/13/2013	4:07:53 PM	SiCl4 post valve closed
2/13/2013	4:07:53 PM	Bypass valve closed
2/13/2013	4:07:53 PM	Bubbler valve closed
2/13/2013	4:07:53 PM	Main Vac valve opened
2/13/2013	4:07:53 PM	Helium MFC set to  0.000000
2/13/2013	4:07:53 PM	H2 MFC set to  0.000000
2/13/2013	4:07:53 PM	BCl3 MFC set to  0.000000
2/13/2013	4:07:53 PM	PH3 MFC set to  0.000000
2/13/2013	4:07:53 PM	SiCl4 MFC set to  0.000000
2/13/2013	4:07:53 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	4:07:53 PM	Tube furnace set to 200
2/13/2013	4:08:23 PM	H2 valve closed
2/13/2013	4:08:23 PM	BCl3 valve closed
2/13/2013	4:08:23 PM	PH3 valve closed
2/13/2013	4:08:23 PM	SiCl4 pre valve closed
2/13/2013	4:08:23 PM	SiCl4 post valve closed
2/13/2013	4:08:23 PM	Bypass valve closed
2/13/2013	4:08:23 PM	Bubbler valve closed
2/13/2013	4:08:23 PM	Helium valve opened
2/13/2013	4:08:23 PM	Main Vac valve opened
2/13/2013	4:08:23 PM	Helium MFC set to  20.000000
2/13/2013	4:08:23 PM	H2 MFC set to  0.000000
2/13/2013	4:08:23 PM	BCl3 MFC set to  0.000000
2/13/2013	4:08:23 PM	PH3 MFC set to  0.000000
2/13/2013	4:08:23 PM	SiCl4 MFC set to  0.000000
2/13/2013	4:08:23 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	4:08:23 PM	Tube furnace set to 200
2/13/2013	4:08:53 PM	Helium valve closed
2/13/2013	4:08:53 PM	H2 valve closed
2/13/2013	4:08:53 PM	BCl3 valve closed
2/13/2013	4:08:53 PM	PH3 valve closed
2/13/2013	4:08:53 PM	SiCl4 pre valve closed
2/13/2013	4:08:53 PM	SiCl4 post valve closed
2/13/2013	4:08:53 PM	Bypass valve closed
2/13/2013	4:08:53 PM	Bubbler valve closed
2/13/2013	4:08:53 PM	Main Vac valve opened
2/13/2013	4:08:53 PM	Helium MFC set to  0.000000
2/13/2013	4:08:53 PM	H2 MFC set to  0.000000
2/13/2013	4:08:53 PM	BCl3 MFC set to  0.000000
2/13/2013	4:08:53 PM	PH3 MFC set to  0.000000
2/13/2013	4:08:53 PM	SiCl4 MFC set to  0.000000
2/13/2013	4:08:53 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	4:08:53 PM	Tube furnace set to 0
2/13/2013	4:08:54 PM	Run finished at 4:08 PM
2/13/2013	4:22:53 PM	Main Vac valve closed
2/13/2013	4:23:11 PM	Main Vac valve opened
2/13/2013	4:24:16 PM	Recipe started at 4:24 PM
2/13/2013	4:24:16 PM	Helium valve closed
2/13/2013	4:24:16 PM	H2 valve closed
2/13/2013	4:24:16 PM	BCl3 valve closed
2/13/2013	4:24:16 PM	PH3 valve closed
2/13/2013	4:24:16 PM	SiCl4 pre valve closed
2/13/2013	4:24:16 PM	SiCl4 post valve closed
2/13/2013	4:24:16 PM	Main Vac valve closed
2/13/2013	4:24:16 PM	Bypass valve closed
2/13/2013	4:24:16 PM	Bubbler valve closed
2/13/2013	4:24:16 PM	Helium MFC set to  0.000000
2/13/2013	4:24:16 PM	H2 MFC set to  0.000000
2/13/2013	4:24:16 PM	BCl3 MFC set to  0.000000
2/13/2013	4:24:16 PM	PH3 MFC set to  0.000000
2/13/2013	4:24:16 PM	SiCl4 MFC set to  0.000000
2/13/2013	4:24:16 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	4:24:17 PM	Tube furnace set to 0
2/13/2013	4:24:20 PM	Helium valve closed
2/13/2013	4:24:20 PM	BCl3 valve closed
2/13/2013	4:24:20 PM	PH3 valve closed
2/13/2013	4:24:20 PM	SiCl4 pre valve closed
2/13/2013	4:24:20 PM	SiCl4 post valve closed
2/13/2013	4:24:20 PM	Main Vac valve closed
2/13/2013	4:24:20 PM	Bypass valve closed
2/13/2013	4:24:20 PM	Bubbler valve closed
2/13/2013	4:24:20 PM	H2 valve opened
2/13/2013	4:24:20 PM	Helium MFC set to  0.000000
2/13/2013	4:24:20 PM	H2 MFC set to  500.000000
2/13/2013	4:24:20 PM	BCl3 MFC set to  0.000000
2/13/2013	4:24:20 PM	PH3 MFC set to  0.000000
2/13/2013	4:24:20 PM	SiCl4 MFC set to  0.000000
2/13/2013	4:24:20 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	4:24:20 PM	Tube furnace set to 0
2/13/2013	4:25:32 PM	Helium valve closed
2/13/2013	4:25:32 PM	BCl3 valve closed
2/13/2013	4:25:32 PM	PH3 valve closed
2/13/2013	4:25:32 PM	SiCl4 pre valve closed
2/13/2013	4:25:32 PM	SiCl4 post valve closed
2/13/2013	4:25:32 PM	Main Vac valve closed
2/13/2013	4:25:32 PM	Bypass valve closed
2/13/2013	4:25:32 PM	H2 valve opened
2/13/2013	4:25:32 PM	Bubbler valve opened
2/13/2013	4:25:32 PM	Helium MFC set to  0.000000
2/13/2013	4:25:32 PM	H2 MFC set to  500.000000
2/13/2013	4:25:32 PM	BCl3 MFC set to  0.000000
2/13/2013	4:25:32 PM	PH3 MFC set to  0.000000
2/13/2013	4:25:32 PM	SiCl4 MFC set to  0.000000
2/13/2013	4:25:32 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	4:25:32 PM	Tube furnace set to 0
2/13/2013	4:25:33 PM	Helium valve closed
2/13/2013	4:25:33 PM	BCl3 valve closed
2/13/2013	4:25:33 PM	PH3 valve closed
2/13/2013	4:25:33 PM	SiCl4 pre valve closed
2/13/2013	4:25:33 PM	SiCl4 post valve closed
2/13/2013	4:25:33 PM	Main Vac valve closed
2/13/2013	4:25:33 PM	Bypass valve closed
2/13/2013	4:25:33 PM	H2 valve opened
2/13/2013	4:25:33 PM	Bubbler valve opened
2/13/2013	4:25:33 PM	Helium MFC set to  0.000000
2/13/2013	4:25:33 PM	H2 MFC set to  500.000000
2/13/2013	4:25:33 PM	BCl3 MFC set to  0.000000
2/13/2013	4:25:33 PM	PH3 MFC set to  0.000000
2/13/2013	4:25:33 PM	SiCl4 MFC set to  0.000000
2/13/2013	4:25:33 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	4:25:33 PM	Tube furnace set to 1000
2/13/2013	4:45:33 PM	Helium valve closed
2/13/2013	4:45:33 PM	PH3 valve closed
2/13/2013	4:45:33 PM	Main Vac valve closed
2/13/2013	4:45:33 PM	Bypass valve closed
2/13/2013	4:45:33 PM	H2 valve opened
2/13/2013	4:45:33 PM	BCl3 valve opened
2/13/2013	4:45:33 PM	SiCl4 pre valve opened
2/13/2013	4:45:33 PM	SiCl4 post valve opened
2/13/2013	4:45:33 PM	Bubbler valve opened
2/13/2013	4:45:33 PM	Helium MFC set to  0.000000
2/13/2013	4:45:33 PM	H2 MFC set to  450.000000
2/13/2013	4:45:33 PM	BCl3 MFC set to  1.500000
2/13/2013	4:45:33 PM	PH3 MFC set to  0.000000
2/13/2013	4:45:33 PM	SiCl4 MFC set to  50.000000
2/13/2013	4:45:33 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	4:45:33 PM	Tube furnace set to 1000
2/13/2013	5:05:33 PM	Helium valve closed
2/13/2013	5:05:33 PM	BCl3 valve closed
2/13/2013	5:05:33 PM	PH3 valve closed
2/13/2013	5:05:33 PM	SiCl4 pre valve closed
2/13/2013	5:05:33 PM	SiCl4 post valve closed
2/13/2013	5:05:33 PM	Main Vac valve closed
2/13/2013	5:05:33 PM	Bypass valve closed
2/13/2013	5:05:33 PM	H2 valve opened
2/13/2013	5:05:33 PM	Bubbler valve opened
2/13/2013	5:05:33 PM	Helium MFC set to  0.000000
2/13/2013	5:05:33 PM	H2 MFC set to  500.000000
2/13/2013	5:05:33 PM	BCl3 MFC set to  0.000000
2/13/2013	5:05:33 PM	PH3 MFC set to  0.000000
2/13/2013	5:05:33 PM	SiCl4 MFC set to  0.000000
2/13/2013	5:05:33 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	5:05:34 PM	Tube furnace set to 950
2/13/2013	5:07:34 PM	Helium valve closed
2/13/2013	5:07:34 PM	BCl3 valve closed
2/13/2013	5:07:34 PM	PH3 valve closed
2/13/2013	5:07:34 PM	SiCl4 pre valve closed
2/13/2013	5:07:34 PM	SiCl4 post valve closed
2/13/2013	5:07:34 PM	Main Vac valve closed
2/13/2013	5:07:34 PM	Bypass valve closed
2/13/2013	5:07:34 PM	H2 valve opened
2/13/2013	5:07:34 PM	Bubbler valve opened
2/13/2013	5:07:34 PM	Helium MFC set to  0.000000
2/13/2013	5:07:34 PM	H2 MFC set to  500.000000
2/13/2013	5:07:34 PM	BCl3 MFC set to  0.000000
2/13/2013	5:07:34 PM	PH3 MFC set to  0.000000
2/13/2013	5:07:34 PM	SiCl4 MFC set to  0.000000
2/13/2013	5:07:34 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	5:07:34 PM	Tube furnace set to 900
2/13/2013	5:09:34 PM	Helium valve closed
2/13/2013	5:09:34 PM	BCl3 valve closed
2/13/2013	5:09:34 PM	PH3 valve closed
2/13/2013	5:09:34 PM	SiCl4 pre valve closed
2/13/2013	5:09:34 PM	SiCl4 post valve closed
2/13/2013	5:09:34 PM	Main Vac valve closed
2/13/2013	5:09:34 PM	Bypass valve closed
2/13/2013	5:09:34 PM	H2 valve opened
2/13/2013	5:09:34 PM	Bubbler valve opened
2/13/2013	5:09:34 PM	Helium MFC set to  0.000000
2/13/2013	5:09:34 PM	H2 MFC set to  500.000000
2/13/2013	5:09:34 PM	BCl3 MFC set to  0.000000
2/13/2013	5:09:34 PM	PH3 MFC set to  0.000000
2/13/2013	5:09:34 PM	SiCl4 MFC set to  0.000000
2/13/2013	5:09:34 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	5:09:34 PM	Tube furnace set to 850
2/13/2013	5:11:34 PM	H2 valve closed
2/13/2013	5:11:34 PM	BCl3 valve closed
2/13/2013	5:11:34 PM	PH3 valve closed
2/13/2013	5:11:34 PM	SiCl4 pre valve closed
2/13/2013	5:11:34 PM	SiCl4 post valve closed
2/13/2013	5:11:34 PM	Main Vac valve closed
2/13/2013	5:11:34 PM	Bypass valve closed
2/13/2013	5:11:34 PM	Helium valve opened
2/13/2013	5:11:34 PM	Bubbler valve opened
2/13/2013	5:11:34 PM	Helium MFC set to  500.000000
2/13/2013	5:11:34 PM	H2 MFC set to  0.000000
2/13/2013	5:11:34 PM	BCl3 MFC set to  0.000000
2/13/2013	5:11:34 PM	PH3 MFC set to  0.000000
2/13/2013	5:11:34 PM	SiCl4 MFC set to  0.000000
2/13/2013	5:11:34 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	5:11:34 PM	Tube furnace set to 800
2/13/2013	5:13:34 PM	H2 valve closed
2/13/2013	5:13:34 PM	BCl3 valve closed
2/13/2013	5:13:34 PM	PH3 valve closed
2/13/2013	5:13:34 PM	SiCl4 pre valve closed
2/13/2013	5:13:34 PM	SiCl4 post valve closed
2/13/2013	5:13:34 PM	Main Vac valve closed
2/13/2013	5:13:34 PM	Bypass valve closed
2/13/2013	5:13:34 PM	Helium valve opened
2/13/2013	5:13:34 PM	Bubbler valve opened
2/13/2013	5:13:34 PM	Helium MFC set to  500.000000
2/13/2013	5:13:34 PM	H2 MFC set to  0.000000
2/13/2013	5:13:34 PM	BCl3 MFC set to  0.000000
2/13/2013	5:13:34 PM	PH3 MFC set to  0.000000
2/13/2013	5:13:34 PM	SiCl4 MFC set to  0.000000
2/13/2013	5:13:34 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	5:13:35 PM	Tube furnace set to 750
2/13/2013	5:15:35 PM	H2 valve closed
2/13/2013	5:15:35 PM	BCl3 valve closed
2/13/2013	5:15:35 PM	PH3 valve closed
2/13/2013	5:15:35 PM	SiCl4 pre valve closed
2/13/2013	5:15:35 PM	SiCl4 post valve closed
2/13/2013	5:15:35 PM	Main Vac valve closed
2/13/2013	5:15:35 PM	Bypass valve closed
2/13/2013	5:15:35 PM	Helium valve opened
2/13/2013	5:15:35 PM	Bubbler valve opened
2/13/2013	5:15:35 PM	Helium MFC set to  500.000000
2/13/2013	5:15:35 PM	H2 MFC set to  0.000000
2/13/2013	5:15:35 PM	BCl3 MFC set to  0.000000
2/13/2013	5:15:35 PM	PH3 MFC set to  0.000000
2/13/2013	5:15:35 PM	SiCl4 MFC set to  0.000000
2/13/2013	5:15:35 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	5:15:35 PM	Tube furnace set to 0
2/13/2013	5:35:35 PM	Helium valve closed
2/13/2013	5:35:35 PM	H2 valve closed
2/13/2013	5:35:35 PM	BCl3 valve closed
2/13/2013	5:35:35 PM	PH3 valve closed
2/13/2013	5:35:35 PM	SiCl4 pre valve closed
2/13/2013	5:35:35 PM	SiCl4 post valve closed
2/13/2013	5:35:35 PM	Main Vac valve closed
2/13/2013	5:35:35 PM	Bypass valve closed
2/13/2013	5:35:35 PM	Bubbler valve closed
2/13/2013	5:35:35 PM	Helium MFC set to  0.000000
2/13/2013	5:35:35 PM	H2 MFC set to  0.000000
2/13/2013	5:35:35 PM	BCl3 MFC set to  0.000000
2/13/2013	5:35:35 PM	PH3 MFC set to  0.000000
2/13/2013	5:35:35 PM	SiCl4 MFC set to  0.000000
2/13/2013	5:35:35 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	5:35:35 PM	Tube furnace set to 0
2/13/2013	5:35:36 PM	Run finished at 5:35 PM
2/13/2013	6:00:22 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/13/2013	6:00:23 PM	Recipe started at 6:00 PM
2/13/2013	6:00:23 PM	Helium valve closed
2/13/2013	6:00:23 PM	H2 valve closed
2/13/2013	6:00:23 PM	BCl3 valve closed
2/13/2013	6:00:23 PM	PH3 valve closed
2/13/2013	6:00:23 PM	SiCl4 pre valve closed
2/13/2013	6:00:23 PM	SiCl4 post valve closed
2/13/2013	6:00:23 PM	Main Vac valve closed
2/13/2013	6:00:23 PM	Bypass valve closed
2/13/2013	6:00:23 PM	Bubbler valve closed
2/13/2013	6:00:23 PM	Helium MFC set to  0.000000
2/13/2013	6:00:23 PM	H2 MFC set to  0.000000
2/13/2013	6:00:23 PM	BCl3 MFC set to  0.000000
2/13/2013	6:00:23 PM	PH3 MFC set to  0.000000
2/13/2013	6:00:23 PM	SiCl4 MFC set to  0.000000
2/13/2013	6:00:23 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	6:00:23 PM	Tube furnace set to 0
2/13/2013	6:00:26 PM	H2 valve closed
2/13/2013	6:00:26 PM	BCl3 valve closed
2/13/2013	6:00:26 PM	PH3 valve closed
2/13/2013	6:00:26 PM	SiCl4 pre valve closed
2/13/2013	6:00:26 PM	SiCl4 post valve closed
2/13/2013	6:00:26 PM	Main Vac valve closed
2/13/2013	6:00:26 PM	Bypass valve closed
2/13/2013	6:00:26 PM	Bubbler valve closed
2/13/2013	6:00:26 PM	Helium valve opened
2/13/2013	6:00:26 PM	Helium MFC set to  500.000000
2/13/2013	6:00:26 PM	H2 MFC set to  0.000000
2/13/2013	6:00:26 PM	BCl3 MFC set to  0.000000
2/13/2013	6:00:26 PM	PH3 MFC set to  0.000000
2/13/2013	6:00:26 PM	SiCl4 MFC set to  0.000000
2/13/2013	6:00:26 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	6:00:26 PM	Tube furnace set to 0
2/13/2013	6:00:32 PM	Helium valve closed
2/13/2013	6:00:32 PM	H2 valve closed
2/13/2013	6:00:32 PM	BCl3 valve closed
2/13/2013	6:00:32 PM	PH3 valve closed
2/13/2013	6:00:32 PM	SiCl4 pre valve closed
2/13/2013	6:00:32 PM	SiCl4 post valve closed
2/13/2013	6:00:32 PM	Main Vac valve closed
2/13/2013	6:00:32 PM	Bypass valve closed
2/13/2013	6:00:32 PM	Bubbler valve closed
2/13/2013	6:00:32 PM	Helium MFC set to  0.000000
2/13/2013	6:00:32 PM	H2 MFC set to  0.000000
2/13/2013	6:00:32 PM	BCl3 MFC set to  0.000000
2/13/2013	6:00:32 PM	PH3 MFC set to  0.000000
2/13/2013	6:00:32 PM	SiCl4 MFC set to  0.000000
2/13/2013	6:00:32 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	6:00:32 PM	Tube furnace set to 0
2/13/2013	6:00:33 PM	Run finished at 6:00 PM
2/13/2013	6:00:33 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/13/2013	6:03:13 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/13/2013	6:03:14 PM	Recipe started at 6:03 PM
2/13/2013	6:03:14 PM	Helium valve closed
2/13/2013	6:03:14 PM	H2 valve closed
2/13/2013	6:03:14 PM	BCl3 valve closed
2/13/2013	6:03:14 PM	PH3 valve closed
2/13/2013	6:03:14 PM	SiCl4 pre valve closed
2/13/2013	6:03:14 PM	SiCl4 post valve closed
2/13/2013	6:03:14 PM	Main Vac valve closed
2/13/2013	6:03:14 PM	Bubbler valve closed
2/13/2013	6:03:14 PM	Bypass valve opened
2/13/2013	6:03:14 PM	Helium MFC set to  0.000000
2/13/2013	6:03:14 PM	H2 MFC set to  0.000000
2/13/2013	6:03:14 PM	BCl3 MFC set to  0.000000
2/13/2013	6:03:14 PM	PH3 MFC set to  0.000000
2/13/2013	6:03:14 PM	SiCl4 MFC set to  0.000000
2/13/2013	6:03:14 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	6:03:14 PM	Tube furnace set to 0
2/13/2013	6:04:29 PM	Helium valve closed
2/13/2013	6:04:29 PM	H2 valve closed
2/13/2013	6:04:29 PM	BCl3 valve closed
2/13/2013	6:04:29 PM	PH3 valve closed
2/13/2013	6:04:29 PM	SiCl4 pre valve closed
2/13/2013	6:04:29 PM	SiCl4 post valve closed
2/13/2013	6:04:29 PM	Main Vac valve closed
2/13/2013	6:04:29 PM	Bubbler valve closed
2/13/2013	6:04:29 PM	Bypass valve opened
2/13/2013	6:04:29 PM	Helium MFC set to  0.000000
2/13/2013	6:04:29 PM	H2 MFC set to  0.000000
2/13/2013	6:04:29 PM	BCl3 MFC set to  0.000000
2/13/2013	6:04:29 PM	PH3 MFC set to  0.000000
2/13/2013	6:04:29 PM	SiCl4 MFC set to  0.000000
2/13/2013	6:04:29 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	6:04:29 PM	Tube furnace set to 0
2/13/2013	6:05:29 PM	Helium valve closed
2/13/2013	6:05:29 PM	H2 valve closed
2/13/2013	6:05:29 PM	BCl3 valve closed
2/13/2013	6:05:29 PM	PH3 valve closed
2/13/2013	6:05:29 PM	SiCl4 pre valve closed
2/13/2013	6:05:29 PM	SiCl4 post valve closed
2/13/2013	6:05:29 PM	Bypass valve closed
2/13/2013	6:05:29 PM	Bubbler valve closed
2/13/2013	6:05:29 PM	Main Vac valve opened
2/13/2013	6:05:29 PM	Helium MFC set to  0.000000
2/13/2013	6:05:29 PM	H2 MFC set to  0.000000
2/13/2013	6:05:29 PM	BCl3 MFC set to  0.000000
2/13/2013	6:05:29 PM	PH3 MFC set to  0.000000
2/13/2013	6:05:29 PM	SiCl4 MFC set to  0.000000
2/13/2013	6:05:29 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	6:05:29 PM	Tube furnace set to 0
2/13/2013	6:05:30 PM	Run finished at 6:05 PM
2/13/2013	6:05:30 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/13/2013	6:05:56 PM	Recipe started at 6:05 PM
2/13/2013	6:05:56 PM	Helium valve closed
2/13/2013	6:05:56 PM	H2 valve closed
2/13/2013	6:05:56 PM	BCl3 valve closed
2/13/2013	6:05:57 PM	PH3 valve closed
2/13/2013	6:05:57 PM	SiCl4 pre valve closed
2/13/2013	6:05:57 PM	SiCl4 post valve closed
2/13/2013	6:05:57 PM	Bypass valve closed
2/13/2013	6:05:57 PM	Bubbler valve closed
2/13/2013	6:05:57 PM	Main Vac valve opened
2/13/2013	6:05:57 PM	Helium MFC set to  0.000000
2/13/2013	6:05:57 PM	H2 MFC set to  0.000000
2/13/2013	6:05:57 PM	BCl3 MFC set to  0.000000
2/13/2013	6:05:57 PM	PH3 MFC set to  0.000000
2/13/2013	6:05:57 PM	SiCl4 MFC set to  0.000000
2/13/2013	6:05:57 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	6:05:57 PM	Tube furnace set to 0
2/13/2013	6:06:27 PM	H2 valve closed
2/13/2013	6:06:27 PM	BCl3 valve closed
2/13/2013	6:06:27 PM	PH3 valve closed
2/13/2013	6:06:27 PM	SiCl4 pre valve closed
2/13/2013	6:06:27 PM	SiCl4 post valve closed
2/13/2013	6:06:27 PM	Bypass valve closed
2/13/2013	6:06:27 PM	Bubbler valve closed
2/13/2013	6:06:27 PM	Helium valve opened
2/13/2013	6:06:27 PM	Main Vac valve opened
2/13/2013	6:06:27 PM	Helium MFC set to  20.000000
2/13/2013	6:06:27 PM	H2 MFC set to  0.000000
2/13/2013	6:06:27 PM	BCl3 MFC set to  0.000000
2/13/2013	6:06:27 PM	PH3 MFC set to  0.000000
2/13/2013	6:06:27 PM	SiCl4 MFC set to  0.000000
2/13/2013	6:06:27 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	6:06:27 PM	Tube furnace set to 0
2/13/2013	6:06:57 PM	Helium valve closed
2/13/2013	6:06:57 PM	H2 valve closed
2/13/2013	6:06:57 PM	BCl3 valve closed
2/13/2013	6:06:57 PM	PH3 valve closed
2/13/2013	6:06:57 PM	SiCl4 pre valve closed
2/13/2013	6:06:57 PM	SiCl4 post valve closed
2/13/2013	6:06:57 PM	Bypass valve closed
2/13/2013	6:06:57 PM	Bubbler valve closed
2/13/2013	6:06:57 PM	Main Vac valve opened
2/13/2013	6:06:57 PM	Helium MFC set to  0.000000
2/13/2013	6:06:57 PM	H2 MFC set to  0.000000
2/13/2013	6:06:57 PM	BCl3 MFC set to  0.000000
2/13/2013	6:06:57 PM	PH3 MFC set to  0.000000
2/13/2013	6:06:57 PM	SiCl4 MFC set to  0.000000
2/13/2013	6:06:57 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	6:06:57 PM	Tube furnace set to 0
2/13/2013	6:07:27 PM	H2 valve closed
2/13/2013	6:07:27 PM	BCl3 valve closed
2/13/2013	6:07:27 PM	PH3 valve closed
2/13/2013	6:07:27 PM	SiCl4 pre valve closed
2/13/2013	6:07:27 PM	SiCl4 post valve closed
2/13/2013	6:07:27 PM	Bypass valve closed
2/13/2013	6:07:27 PM	Bubbler valve closed
2/13/2013	6:07:27 PM	Helium valve opened
2/13/2013	6:07:27 PM	Main Vac valve opened
2/13/2013	6:07:27 PM	Helium MFC set to  20.000000
2/13/2013	6:07:27 PM	H2 MFC set to  0.000000
2/13/2013	6:07:27 PM	BCl3 MFC set to  0.000000
2/13/2013	6:07:27 PM	PH3 MFC set to  0.000000
2/13/2013	6:07:27 PM	SiCl4 MFC set to  0.000000
2/13/2013	6:07:27 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	6:07:27 PM	Tube furnace set to 0
2/13/2013	6:07:57 PM	Helium valve closed
2/13/2013	6:07:57 PM	H2 valve closed
2/13/2013	6:07:58 PM	BCl3 valve closed
2/13/2013	6:07:58 PM	PH3 valve closed
2/13/2013	6:07:58 PM	SiCl4 pre valve closed
2/13/2013	6:07:58 PM	SiCl4 post valve closed
2/13/2013	6:07:58 PM	Bypass valve closed
2/13/2013	6:07:58 PM	Bubbler valve closed
2/13/2013	6:07:58 PM	Main Vac valve opened
2/13/2013	6:07:58 PM	Helium MFC set to  0.000000
2/13/2013	6:07:58 PM	H2 MFC set to  0.000000
2/13/2013	6:07:58 PM	BCl3 MFC set to  0.000000
2/13/2013	6:07:58 PM	PH3 MFC set to  0.000000
2/13/2013	6:07:58 PM	SiCl4 MFC set to  0.000000
2/13/2013	6:07:58 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	6:07:58 PM	Tube furnace set to 0
2/13/2013	6:08:28 PM	H2 valve closed
2/13/2013	6:08:28 PM	BCl3 valve closed
2/13/2013	6:08:28 PM	PH3 valve closed
2/13/2013	6:08:28 PM	SiCl4 pre valve closed
2/13/2013	6:08:28 PM	SiCl4 post valve closed
2/13/2013	6:08:28 PM	Bypass valve closed
2/13/2013	6:08:28 PM	Bubbler valve closed
2/13/2013	6:08:28 PM	Helium valve opened
2/13/2013	6:08:28 PM	Main Vac valve opened
2/13/2013	6:08:28 PM	Helium MFC set to  20.000000
2/13/2013	6:08:28 PM	H2 MFC set to  0.000000
2/13/2013	6:08:28 PM	BCl3 MFC set to  0.000000
2/13/2013	6:08:28 PM	PH3 MFC set to  0.000000
2/13/2013	6:08:28 PM	SiCl4 MFC set to  0.000000
2/13/2013	6:08:28 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	6:08:28 PM	Tube furnace set to 0
2/13/2013	6:08:58 PM	Helium valve closed
2/13/2013	6:08:58 PM	H2 valve closed
2/13/2013	6:08:58 PM	BCl3 valve closed
2/13/2013	6:08:58 PM	PH3 valve closed
2/13/2013	6:08:58 PM	SiCl4 pre valve closed
2/13/2013	6:08:58 PM	SiCl4 post valve closed
2/13/2013	6:08:58 PM	Bypass valve closed
2/13/2013	6:08:58 PM	Bubbler valve closed
2/13/2013	6:08:58 PM	Main Vac valve opened
2/13/2013	6:08:58 PM	Helium MFC set to  0.000000
2/13/2013	6:08:58 PM	H2 MFC set to  0.000000
2/13/2013	6:08:58 PM	BCl3 MFC set to  0.000000
2/13/2013	6:08:58 PM	PH3 MFC set to  0.000000
2/13/2013	6:08:58 PM	SiCl4 MFC set to  0.000000
2/13/2013	6:08:58 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	6:08:58 PM	Tube furnace set to 0
2/13/2013	6:09:28 PM	H2 valve closed
2/13/2013	6:09:28 PM	BCl3 valve closed
2/13/2013	6:09:28 PM	PH3 valve closed
2/13/2013	6:09:28 PM	SiCl4 pre valve closed
2/13/2013	6:09:28 PM	SiCl4 post valve closed
2/13/2013	6:09:28 PM	Bypass valve closed
2/13/2013	6:09:28 PM	Bubbler valve closed
2/13/2013	6:09:28 PM	Helium valve opened
2/13/2013	6:09:28 PM	Main Vac valve opened
2/13/2013	6:09:28 PM	Helium MFC set to  20.000000
2/13/2013	6:09:28 PM	H2 MFC set to  0.000000
2/13/2013	6:09:28 PM	BCl3 MFC set to  0.000000
2/13/2013	6:09:28 PM	PH3 MFC set to  0.000000
2/13/2013	6:09:28 PM	SiCl4 MFC set to  0.000000
2/13/2013	6:09:28 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	6:09:28 PM	Tube furnace set to 0
2/13/2013	6:09:59 PM	Helium valve closed
2/13/2013	6:09:59 PM	H2 valve closed
2/13/2013	6:09:59 PM	BCl3 valve closed
2/13/2013	6:09:59 PM	PH3 valve closed
2/13/2013	6:09:59 PM	SiCl4 pre valve closed
2/13/2013	6:09:59 PM	SiCl4 post valve closed
2/13/2013	6:09:59 PM	Bypass valve closed
2/13/2013	6:09:59 PM	Bubbler valve closed
2/13/2013	6:09:59 PM	Main Vac valve opened
2/13/2013	6:09:59 PM	Helium MFC set to  0.000000
2/13/2013	6:09:59 PM	H2 MFC set to  0.000000
2/13/2013	6:09:59 PM	BCl3 MFC set to  0.000000
2/13/2013	6:09:59 PM	PH3 MFC set to  0.000000
2/13/2013	6:09:59 PM	SiCl4 MFC set to  0.000000
2/13/2013	6:09:59 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	6:09:59 PM	Tube furnace set to 0
2/13/2013	6:10:29 PM	H2 valve closed
2/13/2013	6:10:29 PM	BCl3 valve closed
2/13/2013	6:10:29 PM	PH3 valve closed
2/13/2013	6:10:29 PM	SiCl4 pre valve closed
2/13/2013	6:10:29 PM	SiCl4 post valve closed
2/13/2013	6:10:29 PM	Bypass valve closed
2/13/2013	6:10:29 PM	Bubbler valve closed
2/13/2013	6:10:29 PM	Helium valve opened
2/13/2013	6:10:29 PM	Main Vac valve opened
2/13/2013	6:10:29 PM	Helium MFC set to  20.000000
2/13/2013	6:10:29 PM	H2 MFC set to  0.000000
2/13/2013	6:10:29 PM	BCl3 MFC set to  0.000000
2/13/2013	6:10:29 PM	PH3 MFC set to  0.000000
2/13/2013	6:10:29 PM	SiCl4 MFC set to  0.000000
2/13/2013	6:10:29 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	6:10:29 PM	Tube furnace set to 0
2/13/2013	6:10:59 PM	Helium valve closed
2/13/2013	6:10:59 PM	H2 valve closed
2/13/2013	6:10:59 PM	BCl3 valve closed
2/13/2013	6:10:59 PM	PH3 valve closed
2/13/2013	6:10:59 PM	SiCl4 pre valve closed
2/13/2013	6:10:59 PM	SiCl4 post valve closed
2/13/2013	6:10:59 PM	Bypass valve closed
2/13/2013	6:10:59 PM	Bubbler valve closed
2/13/2013	6:10:59 PM	Main Vac valve opened
2/13/2013	6:10:59 PM	Helium MFC set to  0.000000
2/13/2013	6:10:59 PM	H2 MFC set to  0.000000
2/13/2013	6:10:59 PM	BCl3 MFC set to  0.000000
2/13/2013	6:10:59 PM	PH3 MFC set to  0.000000
2/13/2013	6:10:59 PM	SiCl4 MFC set to  0.000000
2/13/2013	6:10:59 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	6:10:59 PM	Tube furnace set to 0
2/13/2013	6:11:29 PM	H2 valve closed
2/13/2013	6:11:29 PM	BCl3 valve closed
2/13/2013	6:11:29 PM	PH3 valve closed
2/13/2013	6:11:29 PM	SiCl4 pre valve closed
2/13/2013	6:11:29 PM	SiCl4 post valve closed
2/13/2013	6:11:29 PM	Bypass valve closed
2/13/2013	6:11:29 PM	Bubbler valve closed
2/13/2013	6:11:29 PM	Helium valve opened
2/13/2013	6:11:29 PM	Main Vac valve opened
2/13/2013	6:11:29 PM	Helium MFC set to  20.000000
2/13/2013	6:11:29 PM	H2 MFC set to  0.000000
2/13/2013	6:11:29 PM	BCl3 MFC set to  0.000000
2/13/2013	6:11:29 PM	PH3 MFC set to  0.000000
2/13/2013	6:11:29 PM	SiCl4 MFC set to  0.000000
2/13/2013	6:11:29 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	6:11:30 PM	Tube furnace set to 0
2/13/2013	6:12:00 PM	Helium valve closed
2/13/2013	6:12:00 PM	H2 valve closed
2/13/2013	6:12:00 PM	BCl3 valve closed
2/13/2013	6:12:00 PM	PH3 valve closed
2/13/2013	6:12:00 PM	SiCl4 pre valve closed
2/13/2013	6:12:00 PM	SiCl4 post valve closed
2/13/2013	6:12:00 PM	Bypass valve closed
2/13/2013	6:12:00 PM	Bubbler valve closed
2/13/2013	6:12:00 PM	Main Vac valve opened
2/13/2013	6:12:00 PM	Helium MFC set to  0.000000
2/13/2013	6:12:00 PM	H2 MFC set to  0.000000
2/13/2013	6:12:00 PM	BCl3 MFC set to  0.000000
2/13/2013	6:12:00 PM	PH3 MFC set to  0.000000
2/13/2013	6:12:00 PM	SiCl4 MFC set to  0.000000
2/13/2013	6:12:00 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	6:12:00 PM	Tube furnace set to 0
2/13/2013	6:12:30 PM	H2 valve closed
2/13/2013	6:12:30 PM	BCl3 valve closed
2/13/2013	6:12:30 PM	PH3 valve closed
2/13/2013	6:12:30 PM	SiCl4 pre valve closed
2/13/2013	6:12:30 PM	SiCl4 post valve closed
2/13/2013	6:12:30 PM	Bypass valve closed
2/13/2013	6:12:30 PM	Bubbler valve closed
2/13/2013	6:12:30 PM	Helium valve opened
2/13/2013	6:12:30 PM	Main Vac valve opened
2/13/2013	6:12:30 PM	Helium MFC set to  20.000000
2/13/2013	6:12:30 PM	H2 MFC set to  0.000000
2/13/2013	6:12:30 PM	BCl3 MFC set to  0.000000
2/13/2013	6:12:30 PM	PH3 MFC set to  0.000000
2/13/2013	6:12:30 PM	SiCl4 MFC set to  0.000000
2/13/2013	6:12:30 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	6:12:30 PM	Tube furnace set to 0
2/13/2013	6:13:00 PM	Helium valve closed
2/13/2013	6:13:00 PM	H2 valve closed
2/13/2013	6:13:00 PM	BCl3 valve closed
2/13/2013	6:13:00 PM	PH3 valve closed
2/13/2013	6:13:00 PM	SiCl4 pre valve closed
2/13/2013	6:13:00 PM	SiCl4 post valve closed
2/13/2013	6:13:00 PM	Bypass valve closed
2/13/2013	6:13:00 PM	Bubbler valve closed
2/13/2013	6:13:00 PM	Main Vac valve opened
2/13/2013	6:13:00 PM	Helium MFC set to  0.000000
2/13/2013	6:13:00 PM	H2 MFC set to  0.000000
2/13/2013	6:13:00 PM	BCl3 MFC set to  0.000000
2/13/2013	6:13:00 PM	PH3 MFC set to  0.000000
2/13/2013	6:13:00 PM	SiCl4 MFC set to  0.000000
2/13/2013	6:13:00 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	6:13:00 PM	Tube furnace set to 0
2/13/2013	6:13:30 PM	H2 valve closed
2/13/2013	6:13:30 PM	BCl3 valve closed
2/13/2013	6:13:30 PM	PH3 valve closed
2/13/2013	6:13:30 PM	SiCl4 pre valve closed
2/13/2013	6:13:30 PM	SiCl4 post valve closed
2/13/2013	6:13:30 PM	Bypass valve closed
2/13/2013	6:13:30 PM	Bubbler valve closed
2/13/2013	6:13:30 PM	Helium valve opened
2/13/2013	6:13:30 PM	Main Vac valve opened
2/13/2013	6:13:30 PM	Helium MFC set to  20.000000
2/13/2013	6:13:30 PM	H2 MFC set to  0.000000
2/13/2013	6:13:30 PM	BCl3 MFC set to  0.000000
2/13/2013	6:13:30 PM	PH3 MFC set to  0.000000
2/13/2013	6:13:30 PM	SiCl4 MFC set to  0.000000
2/13/2013	6:13:30 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	6:13:31 PM	Tube furnace set to 0
2/13/2013	6:14:01 PM	Helium valve closed
2/13/2013	6:14:01 PM	H2 valve closed
2/13/2013	6:14:01 PM	BCl3 valve closed
2/13/2013	6:14:01 PM	PH3 valve closed
2/13/2013	6:14:01 PM	SiCl4 pre valve closed
2/13/2013	6:14:01 PM	SiCl4 post valve closed
2/13/2013	6:14:01 PM	Bypass valve closed
2/13/2013	6:14:01 PM	Bubbler valve closed
2/13/2013	6:14:01 PM	Main Vac valve opened
2/13/2013	6:14:01 PM	Helium MFC set to  0.000000
2/13/2013	6:14:01 PM	H2 MFC set to  0.000000
2/13/2013	6:14:01 PM	BCl3 MFC set to  0.000000
2/13/2013	6:14:01 PM	PH3 MFC set to  0.000000
2/13/2013	6:14:01 PM	SiCl4 MFC set to  0.000000
2/13/2013	6:14:01 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	6:14:01 PM	Tube furnace set to 0
2/13/2013	6:14:31 PM	H2 valve closed
2/13/2013	6:14:31 PM	BCl3 valve closed
2/13/2013	6:14:31 PM	PH3 valve closed
2/13/2013	6:14:31 PM	SiCl4 pre valve closed
2/13/2013	6:14:31 PM	SiCl4 post valve closed
2/13/2013	6:14:31 PM	Bypass valve closed
2/13/2013	6:14:31 PM	Bubbler valve closed
2/13/2013	6:14:31 PM	Helium valve opened
2/13/2013	6:14:31 PM	Main Vac valve opened
2/13/2013	6:14:31 PM	Helium MFC set to  20.000000
2/13/2013	6:14:31 PM	H2 MFC set to  0.000000
2/13/2013	6:14:31 PM	BCl3 MFC set to  0.000000
2/13/2013	6:14:31 PM	PH3 MFC set to  0.000000
2/13/2013	6:14:31 PM	SiCl4 MFC set to  0.000000
2/13/2013	6:14:31 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	6:14:31 PM	Tube furnace set to 0
2/13/2013	6:15:01 PM	Helium valve closed
2/13/2013	6:15:01 PM	H2 valve closed
2/13/2013	6:15:01 PM	BCl3 valve closed
2/13/2013	6:15:01 PM	PH3 valve closed
2/13/2013	6:15:01 PM	SiCl4 pre valve closed
2/13/2013	6:15:01 PM	SiCl4 post valve closed
2/13/2013	6:15:01 PM	Bypass valve closed
2/13/2013	6:15:01 PM	Bubbler valve closed
2/13/2013	6:15:01 PM	Main Vac valve opened
2/13/2013	6:15:01 PM	Helium MFC set to  0.000000
2/13/2013	6:15:01 PM	H2 MFC set to  0.000000
2/13/2013	6:15:01 PM	BCl3 MFC set to  0.000000
2/13/2013	6:15:01 PM	PH3 MFC set to  0.000000
2/13/2013	6:15:01 PM	SiCl4 MFC set to  0.000000
2/13/2013	6:15:01 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	6:15:01 PM	Tube furnace set to 200
2/13/2013	6:15:31 PM	H2 valve closed
2/13/2013	6:15:31 PM	BCl3 valve closed
2/13/2013	6:15:31 PM	PH3 valve closed
2/13/2013	6:15:31 PM	SiCl4 pre valve closed
2/13/2013	6:15:31 PM	SiCl4 post valve closed
2/13/2013	6:15:31 PM	Bypass valve closed
2/13/2013	6:15:31 PM	Bubbler valve closed
2/13/2013	6:15:31 PM	Helium valve opened
2/13/2013	6:15:31 PM	Main Vac valve opened
2/13/2013	6:15:31 PM	Helium MFC set to  20.000000
2/13/2013	6:15:31 PM	H2 MFC set to  0.000000
2/13/2013	6:15:31 PM	BCl3 MFC set to  0.000000
2/13/2013	6:15:31 PM	PH3 MFC set to  0.000000
2/13/2013	6:15:31 PM	SiCl4 MFC set to  0.000000
2/13/2013	6:15:31 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	6:15:32 PM	Tube furnace set to 200
2/13/2013	6:16:02 PM	Helium valve closed
2/13/2013	6:16:02 PM	H2 valve closed
2/13/2013	6:16:02 PM	BCl3 valve closed
2/13/2013	6:16:02 PM	PH3 valve closed
2/13/2013	6:16:02 PM	SiCl4 pre valve closed
2/13/2013	6:16:02 PM	SiCl4 post valve closed
2/13/2013	6:16:02 PM	Bypass valve closed
2/13/2013	6:16:02 PM	Bubbler valve closed
2/13/2013	6:16:02 PM	Main Vac valve opened
2/13/2013	6:16:02 PM	Helium MFC set to  0.000000
2/13/2013	6:16:02 PM	H2 MFC set to  0.000000
2/13/2013	6:16:02 PM	BCl3 MFC set to  0.000000
2/13/2013	6:16:02 PM	PH3 MFC set to  0.000000
2/13/2013	6:16:02 PM	SiCl4 MFC set to  0.000000
2/13/2013	6:16:02 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	6:16:02 PM	Tube furnace set to 200
2/13/2013	6:16:32 PM	H2 valve closed
2/13/2013	6:16:32 PM	BCl3 valve closed
2/13/2013	6:16:32 PM	PH3 valve closed
2/13/2013	6:16:32 PM	SiCl4 pre valve closed
2/13/2013	6:16:32 PM	SiCl4 post valve closed
2/13/2013	6:16:32 PM	Bypass valve closed
2/13/2013	6:16:32 PM	Bubbler valve closed
2/13/2013	6:16:32 PM	Helium valve opened
2/13/2013	6:16:32 PM	Main Vac valve opened
2/13/2013	6:16:32 PM	Helium MFC set to  20.000000
2/13/2013	6:16:32 PM	H2 MFC set to  0.000000
2/13/2013	6:16:32 PM	BCl3 MFC set to  0.000000
2/13/2013	6:16:32 PM	PH3 MFC set to  0.000000
2/13/2013	6:16:32 PM	SiCl4 MFC set to  0.000000
2/13/2013	6:16:32 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	6:16:32 PM	Tube furnace set to 200
2/13/2013	6:17:02 PM	Helium valve closed
2/13/2013	6:17:02 PM	H2 valve closed
2/13/2013	6:17:02 PM	BCl3 valve closed
2/13/2013	6:17:02 PM	PH3 valve closed
2/13/2013	6:17:02 PM	SiCl4 pre valve closed
2/13/2013	6:17:02 PM	SiCl4 post valve closed
2/13/2013	6:17:02 PM	Bypass valve closed
2/13/2013	6:17:02 PM	Bubbler valve closed
2/13/2013	6:17:02 PM	Main Vac valve opened
2/13/2013	6:17:02 PM	Helium MFC set to  0.000000
2/13/2013	6:17:02 PM	H2 MFC set to  0.000000
2/13/2013	6:17:02 PM	BCl3 MFC set to  0.000000
2/13/2013	6:17:02 PM	PH3 MFC set to  0.000000
2/13/2013	6:17:02 PM	SiCl4 MFC set to  0.000000
2/13/2013	6:17:02 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	6:17:02 PM	Tube furnace set to 200
2/13/2013	6:17:32 PM	H2 valve closed
2/13/2013	6:17:32 PM	BCl3 valve closed
2/13/2013	6:17:32 PM	PH3 valve closed
2/13/2013	6:17:32 PM	SiCl4 pre valve closed
2/13/2013	6:17:32 PM	SiCl4 post valve closed
2/13/2013	6:17:32 PM	Bypass valve closed
2/13/2013	6:17:32 PM	Bubbler valve closed
2/13/2013	6:17:32 PM	Helium valve opened
2/13/2013	6:17:32 PM	Main Vac valve opened
2/13/2013	6:17:32 PM	Helium MFC set to  20.000000
2/13/2013	6:17:32 PM	H2 MFC set to  0.000000
2/13/2013	6:17:32 PM	BCl3 MFC set to  0.000000
2/13/2013	6:17:32 PM	PH3 MFC set to  0.000000
2/13/2013	6:17:32 PM	SiCl4 MFC set to  0.000000
2/13/2013	6:17:32 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	6:17:33 PM	Tube furnace set to 200
2/13/2013	6:18:03 PM	Helium valve closed
2/13/2013	6:18:03 PM	H2 valve closed
2/13/2013	6:18:03 PM	BCl3 valve closed
2/13/2013	6:18:03 PM	PH3 valve closed
2/13/2013	6:18:03 PM	SiCl4 pre valve closed
2/13/2013	6:18:03 PM	SiCl4 post valve closed
2/13/2013	6:18:03 PM	Bypass valve closed
2/13/2013	6:18:03 PM	Bubbler valve closed
2/13/2013	6:18:03 PM	Main Vac valve opened
2/13/2013	6:18:03 PM	Helium MFC set to  0.000000
2/13/2013	6:18:03 PM	H2 MFC set to  0.000000
2/13/2013	6:18:03 PM	BCl3 MFC set to  0.000000
2/13/2013	6:18:03 PM	PH3 MFC set to  0.000000
2/13/2013	6:18:03 PM	SiCl4 MFC set to  0.000000
2/13/2013	6:18:03 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	6:18:03 PM	Tube furnace set to 200
2/13/2013	6:18:33 PM	H2 valve closed
2/13/2013	6:18:33 PM	BCl3 valve closed
2/13/2013	6:18:33 PM	PH3 valve closed
2/13/2013	6:18:33 PM	SiCl4 pre valve closed
2/13/2013	6:18:33 PM	SiCl4 post valve closed
2/13/2013	6:18:33 PM	Bypass valve closed
2/13/2013	6:18:33 PM	Bubbler valve closed
2/13/2013	6:18:33 PM	Helium valve opened
2/13/2013	6:18:33 PM	Main Vac valve opened
2/13/2013	6:18:33 PM	Helium MFC set to  20.000000
2/13/2013	6:18:33 PM	H2 MFC set to  0.000000
2/13/2013	6:18:33 PM	BCl3 MFC set to  0.000000
2/13/2013	6:18:33 PM	PH3 MFC set to  0.000000
2/13/2013	6:18:33 PM	SiCl4 MFC set to  0.000000
2/13/2013	6:18:33 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	6:18:33 PM	Tube furnace set to 200
2/13/2013	6:19:03 PM	Helium valve closed
2/13/2013	6:19:03 PM	H2 valve closed
2/13/2013	6:19:03 PM	BCl3 valve closed
2/13/2013	6:19:03 PM	PH3 valve closed
2/13/2013	6:19:03 PM	SiCl4 pre valve closed
2/13/2013	6:19:03 PM	SiCl4 post valve closed
2/13/2013	6:19:03 PM	Bypass valve closed
2/13/2013	6:19:03 PM	Bubbler valve closed
2/13/2013	6:19:03 PM	Main Vac valve opened
2/13/2013	6:19:03 PM	Helium MFC set to  0.000000
2/13/2013	6:19:03 PM	H2 MFC set to  0.000000
2/13/2013	6:19:03 PM	BCl3 MFC set to  0.000000
2/13/2013	6:19:03 PM	PH3 MFC set to  0.000000
2/13/2013	6:19:03 PM	SiCl4 MFC set to  0.000000
2/13/2013	6:19:03 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	6:19:03 PM	Tube furnace set to 200
2/13/2013	6:19:33 PM	H2 valve closed
2/13/2013	6:19:33 PM	BCl3 valve closed
2/13/2013	6:19:33 PM	PH3 valve closed
2/13/2013	6:19:33 PM	SiCl4 pre valve closed
2/13/2013	6:19:33 PM	SiCl4 post valve closed
2/13/2013	6:19:33 PM	Bypass valve closed
2/13/2013	6:19:33 PM	Bubbler valve closed
2/13/2013	6:19:33 PM	Helium valve opened
2/13/2013	6:19:33 PM	Main Vac valve opened
2/13/2013	6:19:33 PM	Helium MFC set to  20.000000
2/13/2013	6:19:33 PM	H2 MFC set to  0.000000
2/13/2013	6:19:33 PM	BCl3 MFC set to  0.000000
2/13/2013	6:19:33 PM	PH3 MFC set to  0.000000
2/13/2013	6:19:33 PM	SiCl4 MFC set to  0.000000
2/13/2013	6:19:33 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	6:19:34 PM	Tube furnace set to 200
2/13/2013	6:20:04 PM	Helium valve closed
2/13/2013	6:20:04 PM	H2 valve closed
2/13/2013	6:20:04 PM	BCl3 valve closed
2/13/2013	6:20:04 PM	PH3 valve closed
2/13/2013	6:20:04 PM	SiCl4 pre valve closed
2/13/2013	6:20:04 PM	SiCl4 post valve closed
2/13/2013	6:20:04 PM	Bypass valve closed
2/13/2013	6:20:04 PM	Bubbler valve closed
2/13/2013	6:20:04 PM	Main Vac valve opened
2/13/2013	6:20:04 PM	Helium MFC set to  0.000000
2/13/2013	6:20:04 PM	H2 MFC set to  0.000000
2/13/2013	6:20:04 PM	BCl3 MFC set to  0.000000
2/13/2013	6:20:04 PM	PH3 MFC set to  0.000000
2/13/2013	6:20:04 PM	SiCl4 MFC set to  0.000000
2/13/2013	6:20:04 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	6:20:04 PM	Tube furnace set to 200
2/13/2013	6:20:34 PM	H2 valve closed
2/13/2013	6:20:34 PM	BCl3 valve closed
2/13/2013	6:20:34 PM	PH3 valve closed
2/13/2013	6:20:34 PM	SiCl4 pre valve closed
2/13/2013	6:20:34 PM	SiCl4 post valve closed
2/13/2013	6:20:34 PM	Bypass valve closed
2/13/2013	6:20:34 PM	Bubbler valve closed
2/13/2013	6:20:34 PM	Helium valve opened
2/13/2013	6:20:34 PM	Main Vac valve opened
2/13/2013	6:20:34 PM	Helium MFC set to  20.000000
2/13/2013	6:20:34 PM	H2 MFC set to  0.000000
2/13/2013	6:20:34 PM	BCl3 MFC set to  0.000000
2/13/2013	6:20:34 PM	PH3 MFC set to  0.000000
2/13/2013	6:20:34 PM	SiCl4 MFC set to  0.000000
2/13/2013	6:20:34 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	6:20:34 PM	Tube furnace set to 200
2/13/2013	6:21:04 PM	Helium valve closed
2/13/2013	6:21:04 PM	H2 valve closed
2/13/2013	6:21:04 PM	BCl3 valve closed
2/13/2013	6:21:04 PM	PH3 valve closed
2/13/2013	6:21:04 PM	SiCl4 pre valve closed
2/13/2013	6:21:04 PM	SiCl4 post valve closed
2/13/2013	6:21:04 PM	Bypass valve closed
2/13/2013	6:21:04 PM	Bubbler valve closed
2/13/2013	6:21:04 PM	Main Vac valve opened
2/13/2013	6:21:04 PM	Helium MFC set to  0.000000
2/13/2013	6:21:04 PM	H2 MFC set to  0.000000
2/13/2013	6:21:04 PM	BCl3 MFC set to  0.000000
2/13/2013	6:21:04 PM	PH3 MFC set to  0.000000
2/13/2013	6:21:04 PM	SiCl4 MFC set to  0.000000
2/13/2013	6:21:04 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	6:21:04 PM	Tube furnace set to 0
2/13/2013	6:21:05 PM	Run finished at 6:21 PM
2/13/2013	6:42:57 PM	Recipe started at 6:42 PM
2/13/2013	6:42:57 PM	Helium valve closed
2/13/2013	6:42:57 PM	H2 valve closed
2/13/2013	6:42:57 PM	BCl3 valve closed
2/13/2013	6:42:57 PM	PH3 valve closed
2/13/2013	6:42:57 PM	SiCl4 pre valve closed
2/13/2013	6:42:57 PM	SiCl4 post valve closed
2/13/2013	6:42:57 PM	Bypass valve closed
2/13/2013	6:42:57 PM	Bubbler valve closed
2/13/2013	6:42:57 PM	Main Vac valve opened
2/13/2013	6:42:57 PM	Helium MFC set to  0.000000
2/13/2013	6:42:57 PM	H2 MFC set to  0.000000
2/13/2013	6:42:57 PM	BCl3 MFC set to  0.000000
2/13/2013	6:42:57 PM	PH3 MFC set to  0.000000
2/13/2013	6:42:57 PM	SiCl4 MFC set to  0.000000
2/13/2013	6:42:57 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	6:42:57 PM	Tube furnace set to 0
2/13/2013	6:42:58 PM	H2 valve closed
2/13/2013	6:42:58 PM	BCl3 valve closed
2/13/2013	6:42:58 PM	PH3 valve closed
2/13/2013	6:42:58 PM	SiCl4 pre valve closed
2/13/2013	6:42:58 PM	SiCl4 post valve closed
2/13/2013	6:42:58 PM	Bypass valve closed
2/13/2013	6:42:58 PM	Bubbler valve closed
2/13/2013	6:42:58 PM	Helium valve opened
2/13/2013	6:42:58 PM	Main Vac valve opened
2/13/2013	6:42:58 PM	Helium MFC set to  20.000000
2/13/2013	6:42:58 PM	H2 MFC set to  0.000000
2/13/2013	6:42:58 PM	BCl3 MFC set to  0.000000
2/13/2013	6:42:58 PM	PH3 MFC set to  0.000000
2/13/2013	6:42:58 PM	SiCl4 MFC set to  0.000000
2/13/2013	6:42:58 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	6:42:58 PM	Tube furnace set to 0
2/13/2013	6:42:59 PM	Helium valve closed
2/13/2013	6:42:59 PM	H2 valve closed
2/13/2013	6:42:59 PM	BCl3 valve closed
2/13/2013	6:42:59 PM	PH3 valve closed
2/13/2013	6:42:59 PM	SiCl4 pre valve closed
2/13/2013	6:42:59 PM	SiCl4 post valve closed
2/13/2013	6:42:59 PM	Bypass valve closed
2/13/2013	6:42:59 PM	Bubbler valve closed
2/13/2013	6:42:59 PM	Main Vac valve opened
2/13/2013	6:42:59 PM	Helium MFC set to  0.000000
2/13/2013	6:42:59 PM	H2 MFC set to  0.000000
2/13/2013	6:42:59 PM	BCl3 MFC set to  0.000000
2/13/2013	6:42:59 PM	PH3 MFC set to  0.000000
2/13/2013	6:42:59 PM	SiCl4 MFC set to  0.000000
2/13/2013	6:42:59 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	6:42:59 PM	Tube furnace set to 0
2/13/2013	6:43:00 PM	H2 valve closed
2/13/2013	6:43:00 PM	BCl3 valve closed
2/13/2013	6:43:00 PM	PH3 valve closed
2/13/2013	6:43:00 PM	SiCl4 pre valve closed
2/13/2013	6:43:00 PM	SiCl4 post valve closed
2/13/2013	6:43:00 PM	Bypass valve closed
2/13/2013	6:43:00 PM	Bubbler valve closed
2/13/2013	6:43:00 PM	Helium valve opened
2/13/2013	6:43:00 PM	Main Vac valve opened
2/13/2013	6:43:00 PM	Helium MFC set to  20.000000
2/13/2013	6:43:00 PM	H2 MFC set to  0.000000
2/13/2013	6:43:00 PM	BCl3 MFC set to  0.000000
2/13/2013	6:43:00 PM	PH3 MFC set to  0.000000
2/13/2013	6:43:00 PM	SiCl4 MFC set to  0.000000
2/13/2013	6:43:00 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	6:43:00 PM	Tube furnace set to 0
2/13/2013	6:43:00 PM	Helium valve closed
2/13/2013	6:43:00 PM	H2 valve closed
2/13/2013	6:43:00 PM	BCl3 valve closed
2/13/2013	6:43:00 PM	PH3 valve closed
2/13/2013	6:43:00 PM	SiCl4 pre valve closed
2/13/2013	6:43:00 PM	SiCl4 post valve closed
2/13/2013	6:43:00 PM	Bypass valve closed
2/13/2013	6:43:00 PM	Bubbler valve closed
2/13/2013	6:43:00 PM	Main Vac valve opened
2/13/2013	6:43:01 PM	Helium MFC set to  0.000000
2/13/2013	6:43:01 PM	H2 MFC set to  0.000000
2/13/2013	6:43:01 PM	BCl3 MFC set to  0.000000
2/13/2013	6:43:01 PM	PH3 MFC set to  0.000000
2/13/2013	6:43:01 PM	SiCl4 MFC set to  0.000000
2/13/2013	6:43:01 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	6:43:01 PM	Tube furnace set to 0
2/13/2013	6:43:01 PM	H2 valve closed
2/13/2013	6:43:01 PM	BCl3 valve closed
2/13/2013	6:43:01 PM	PH3 valve closed
2/13/2013	6:43:01 PM	SiCl4 pre valve closed
2/13/2013	6:43:01 PM	SiCl4 post valve closed
2/13/2013	6:43:01 PM	Bypass valve closed
2/13/2013	6:43:01 PM	Bubbler valve closed
2/13/2013	6:43:01 PM	Helium valve opened
2/13/2013	6:43:01 PM	Main Vac valve opened
2/13/2013	6:43:01 PM	Helium MFC set to  20.000000
2/13/2013	6:43:01 PM	H2 MFC set to  0.000000
2/13/2013	6:43:01 PM	BCl3 MFC set to  0.000000
2/13/2013	6:43:01 PM	PH3 MFC set to  0.000000
2/13/2013	6:43:01 PM	SiCl4 MFC set to  0.000000
2/13/2013	6:43:01 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	6:43:01 PM	Tube furnace set to 0
2/13/2013	6:43:02 PM	Helium valve closed
2/13/2013	6:43:02 PM	H2 valve closed
2/13/2013	6:43:02 PM	BCl3 valve closed
2/13/2013	6:43:02 PM	PH3 valve closed
2/13/2013	6:43:02 PM	SiCl4 pre valve closed
2/13/2013	6:43:02 PM	SiCl4 post valve closed
2/13/2013	6:43:02 PM	Bypass valve closed
2/13/2013	6:43:02 PM	Bubbler valve closed
2/13/2013	6:43:02 PM	Main Vac valve opened
2/13/2013	6:43:02 PM	Helium MFC set to  0.000000
2/13/2013	6:43:02 PM	H2 MFC set to  0.000000
2/13/2013	6:43:02 PM	BCl3 MFC set to  0.000000
2/13/2013	6:43:02 PM	PH3 MFC set to  0.000000
2/13/2013	6:43:02 PM	SiCl4 MFC set to  0.000000
2/13/2013	6:43:02 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	6:43:02 PM	Tube furnace set to 0
2/13/2013	6:43:02 PM	H2 valve closed
2/13/2013	6:43:02 PM	BCl3 valve closed
2/13/2013	6:43:02 PM	PH3 valve closed
2/13/2013	6:43:02 PM	SiCl4 pre valve closed
2/13/2013	6:43:02 PM	SiCl4 post valve closed
2/13/2013	6:43:02 PM	Bypass valve closed
2/13/2013	6:43:02 PM	Bubbler valve closed
2/13/2013	6:43:02 PM	Helium valve opened
2/13/2013	6:43:02 PM	Main Vac valve opened
2/13/2013	6:43:02 PM	Helium MFC set to  20.000000
2/13/2013	6:43:02 PM	H2 MFC set to  0.000000
2/13/2013	6:43:02 PM	BCl3 MFC set to  0.000000
2/13/2013	6:43:02 PM	PH3 MFC set to  0.000000
2/13/2013	6:43:02 PM	SiCl4 MFC set to  0.000000
2/13/2013	6:43:02 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	6:43:02 PM	Tube furnace set to 0
2/13/2013	6:43:03 PM	Helium valve closed
2/13/2013	6:43:03 PM	H2 valve closed
2/13/2013	6:43:03 PM	BCl3 valve closed
2/13/2013	6:43:03 PM	PH3 valve closed
2/13/2013	6:43:03 PM	SiCl4 pre valve closed
2/13/2013	6:43:03 PM	SiCl4 post valve closed
2/13/2013	6:43:03 PM	Bypass valve closed
2/13/2013	6:43:03 PM	Bubbler valve closed
2/13/2013	6:43:03 PM	Main Vac valve opened
2/13/2013	6:43:03 PM	Helium MFC set to  0.000000
2/13/2013	6:43:03 PM	H2 MFC set to  0.000000
2/13/2013	6:43:03 PM	BCl3 MFC set to  0.000000
2/13/2013	6:43:03 PM	PH3 MFC set to  0.000000
2/13/2013	6:43:03 PM	SiCl4 MFC set to  0.000000
2/13/2013	6:43:03 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	6:43:03 PM	Tube furnace set to 0
2/13/2013	6:43:03 PM	H2 valve closed
2/13/2013	6:43:03 PM	BCl3 valve closed
2/13/2013	6:43:03 PM	PH3 valve closed
2/13/2013	6:43:03 PM	SiCl4 pre valve closed
2/13/2013	6:43:03 PM	SiCl4 post valve closed
2/13/2013	6:43:03 PM	Bypass valve closed
2/13/2013	6:43:04 PM	Bubbler valve closed
2/13/2013	6:43:04 PM	Helium valve opened
2/13/2013	6:43:04 PM	Main Vac valve opened
2/13/2013	6:43:04 PM	Helium MFC set to  20.000000
2/13/2013	6:43:04 PM	H2 MFC set to  0.000000
2/13/2013	6:43:04 PM	BCl3 MFC set to  0.000000
2/13/2013	6:43:04 PM	PH3 MFC set to  0.000000
2/13/2013	6:43:04 PM	SiCl4 MFC set to  0.000000
2/13/2013	6:43:04 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	6:43:04 PM	Tube furnace set to 0
2/13/2013	6:43:04 PM	Helium valve closed
2/13/2013	6:43:04 PM	H2 valve closed
2/13/2013	6:43:04 PM	BCl3 valve closed
2/13/2013	6:43:04 PM	PH3 valve closed
2/13/2013	6:43:04 PM	SiCl4 pre valve closed
2/13/2013	6:43:04 PM	SiCl4 post valve closed
2/13/2013	6:43:04 PM	Bypass valve closed
2/13/2013	6:43:04 PM	Bubbler valve closed
2/13/2013	6:43:04 PM	Main Vac valve opened
2/13/2013	6:43:04 PM	Helium MFC set to  0.000000
2/13/2013	6:43:04 PM	H2 MFC set to  0.000000
2/13/2013	6:43:04 PM	BCl3 MFC set to  0.000000
2/13/2013	6:43:04 PM	PH3 MFC set to  0.000000
2/13/2013	6:43:04 PM	SiCl4 MFC set to  0.000000
2/13/2013	6:43:04 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	6:43:04 PM	Tube furnace set to 0
2/13/2013	6:43:05 PM	H2 valve closed
2/13/2013	6:43:05 PM	BCl3 valve closed
2/13/2013	6:43:05 PM	PH3 valve closed
2/13/2013	6:43:05 PM	SiCl4 pre valve closed
2/13/2013	6:43:05 PM	SiCl4 post valve closed
2/13/2013	6:43:05 PM	Bypass valve closed
2/13/2013	6:43:05 PM	Bubbler valve closed
2/13/2013	6:43:05 PM	Helium valve opened
2/13/2013	6:43:05 PM	Main Vac valve opened
2/13/2013	6:43:05 PM	Helium MFC set to  20.000000
2/13/2013	6:43:05 PM	H2 MFC set to  0.000000
2/13/2013	6:43:05 PM	BCl3 MFC set to  0.000000
2/13/2013	6:43:05 PM	PH3 MFC set to  0.000000
2/13/2013	6:43:05 PM	SiCl4 MFC set to  0.000000
2/13/2013	6:43:05 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	6:43:05 PM	Tube furnace set to 0
2/13/2013	6:43:05 PM	Helium valve closed
2/13/2013	6:43:05 PM	H2 valve closed
2/13/2013	6:43:05 PM	BCl3 valve closed
2/13/2013	6:43:06 PM	PH3 valve closed
2/13/2013	6:43:06 PM	SiCl4 pre valve closed
2/13/2013	6:43:06 PM	SiCl4 post valve closed
2/13/2013	6:43:06 PM	Bypass valve closed
2/13/2013	6:43:06 PM	Bubbler valve closed
2/13/2013	6:43:06 PM	Main Vac valve opened
2/13/2013	6:43:06 PM	Helium MFC set to  0.000000
2/13/2013	6:43:06 PM	H2 MFC set to  0.000000
2/13/2013	6:43:06 PM	BCl3 MFC set to  0.000000
2/13/2013	6:43:06 PM	PH3 MFC set to  0.000000
2/13/2013	6:43:06 PM	SiCl4 MFC set to  0.000000
2/13/2013	6:43:06 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	6:43:06 PM	Tube furnace set to 0
2/13/2013	6:43:06 PM	H2 valve closed
2/13/2013	6:43:06 PM	BCl3 valve closed
2/13/2013	6:43:06 PM	PH3 valve closed
2/13/2013	6:43:06 PM	SiCl4 pre valve closed
2/13/2013	6:43:06 PM	SiCl4 post valve closed
2/13/2013	6:43:06 PM	Bypass valve closed
2/13/2013	6:43:06 PM	Bubbler valve closed
2/13/2013	6:43:06 PM	Helium valve opened
2/13/2013	6:43:06 PM	Main Vac valve opened
2/13/2013	6:43:06 PM	Helium MFC set to  20.000000
2/13/2013	6:43:06 PM	H2 MFC set to  0.000000
2/13/2013	6:43:06 PM	BCl3 MFC set to  0.000000
2/13/2013	6:43:06 PM	PH3 MFC set to  0.000000
2/13/2013	6:43:06 PM	SiCl4 MFC set to  0.000000
2/13/2013	6:43:06 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	6:43:06 PM	Tube furnace set to 0
2/13/2013	6:43:36 PM	Helium valve closed
2/13/2013	6:43:36 PM	H2 valve closed
2/13/2013	6:43:36 PM	BCl3 valve closed
2/13/2013	6:43:36 PM	PH3 valve closed
2/13/2013	6:43:36 PM	SiCl4 pre valve closed
2/13/2013	6:43:36 PM	SiCl4 post valve closed
2/13/2013	6:43:36 PM	Bypass valve closed
2/13/2013	6:43:36 PM	Bubbler valve closed
2/13/2013	6:43:36 PM	Main Vac valve opened
2/13/2013	6:43:36 PM	Helium MFC set to  0.000000
2/13/2013	6:43:36 PM	H2 MFC set to  0.000000
2/13/2013	6:43:36 PM	BCl3 MFC set to  0.000000
2/13/2013	6:43:36 PM	PH3 MFC set to  0.000000
2/13/2013	6:43:36 PM	SiCl4 MFC set to  0.000000
2/13/2013	6:43:36 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	6:43:36 PM	Tube furnace set to 0
2/13/2013	6:44:06 PM	H2 valve closed
2/13/2013	6:44:06 PM	BCl3 valve closed
2/13/2013	6:44:07 PM	PH3 valve closed
2/13/2013	6:44:07 PM	SiCl4 pre valve closed
2/13/2013	6:44:07 PM	SiCl4 post valve closed
2/13/2013	6:44:07 PM	Bypass valve closed
2/13/2013	6:44:07 PM	Bubbler valve closed
2/13/2013	6:44:07 PM	Helium valve opened
2/13/2013	6:44:07 PM	Main Vac valve opened
2/13/2013	6:44:07 PM	Helium MFC set to  20.000000
2/13/2013	6:44:07 PM	H2 MFC set to  0.000000
2/13/2013	6:44:07 PM	BCl3 MFC set to  0.000000
2/13/2013	6:44:07 PM	PH3 MFC set to  0.000000
2/13/2013	6:44:07 PM	SiCl4 MFC set to  0.000000
2/13/2013	6:44:07 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	6:44:07 PM	Tube furnace set to 0
2/13/2013	6:44:37 PM	Helium valve closed
2/13/2013	6:44:37 PM	H2 valve closed
2/13/2013	6:44:37 PM	BCl3 valve closed
2/13/2013	6:44:37 PM	PH3 valve closed
2/13/2013	6:44:37 PM	SiCl4 pre valve closed
2/13/2013	6:44:37 PM	SiCl4 post valve closed
2/13/2013	6:44:37 PM	Bypass valve closed
2/13/2013	6:44:37 PM	Bubbler valve closed
2/13/2013	6:44:37 PM	Main Vac valve opened
2/13/2013	6:44:37 PM	Helium MFC set to  0.000000
2/13/2013	6:44:37 PM	H2 MFC set to  0.000000
2/13/2013	6:44:37 PM	BCl3 MFC set to  0.000000
2/13/2013	6:44:37 PM	PH3 MFC set to  0.000000
2/13/2013	6:44:37 PM	SiCl4 MFC set to  0.000000
2/13/2013	6:44:37 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	6:44:37 PM	Tube furnace set to 0
2/13/2013	6:45:07 PM	H2 valve closed
2/13/2013	6:45:07 PM	BCl3 valve closed
2/13/2013	6:45:07 PM	PH3 valve closed
2/13/2013	6:45:07 PM	SiCl4 pre valve closed
2/13/2013	6:45:07 PM	SiCl4 post valve closed
2/13/2013	6:45:07 PM	Bypass valve closed
2/13/2013	6:45:07 PM	Bubbler valve closed
2/13/2013	6:45:07 PM	Helium valve opened
2/13/2013	6:45:07 PM	Main Vac valve opened
2/13/2013	6:45:07 PM	Helium MFC set to  20.000000
2/13/2013	6:45:07 PM	H2 MFC set to  0.000000
2/13/2013	6:45:07 PM	BCl3 MFC set to  0.000000
2/13/2013	6:45:07 PM	PH3 MFC set to  0.000000
2/13/2013	6:45:07 PM	SiCl4 MFC set to  0.000000
2/13/2013	6:45:07 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	6:45:07 PM	Tube furnace set to 0
2/13/2013	6:45:37 PM	Helium valve closed
2/13/2013	6:45:37 PM	H2 valve closed
2/13/2013	6:45:37 PM	BCl3 valve closed
2/13/2013	6:45:37 PM	PH3 valve closed
2/13/2013	6:45:37 PM	SiCl4 pre valve closed
2/13/2013	6:45:37 PM	SiCl4 post valve closed
2/13/2013	6:45:37 PM	Bypass valve closed
2/13/2013	6:45:37 PM	Bubbler valve closed
2/13/2013	6:45:37 PM	Main Vac valve opened
2/13/2013	6:45:37 PM	Helium MFC set to  0.000000
2/13/2013	6:45:37 PM	H2 MFC set to  0.000000
2/13/2013	6:45:37 PM	BCl3 MFC set to  0.000000
2/13/2013	6:45:37 PM	PH3 MFC set to  0.000000
2/13/2013	6:45:37 PM	SiCl4 MFC set to  0.000000
2/13/2013	6:45:37 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	6:45:37 PM	Tube furnace set to 200
2/13/2013	6:46:08 PM	H2 valve closed
2/13/2013	6:46:08 PM	BCl3 valve closed
2/13/2013	6:46:08 PM	PH3 valve closed
2/13/2013	6:46:08 PM	SiCl4 pre valve closed
2/13/2013	6:46:08 PM	SiCl4 post valve closed
2/13/2013	6:46:08 PM	Bypass valve closed
2/13/2013	6:46:08 PM	Bubbler valve closed
2/13/2013	6:46:08 PM	Helium valve opened
2/13/2013	6:46:08 PM	Main Vac valve opened
2/13/2013	6:46:08 PM	Helium MFC set to  20.000000
2/13/2013	6:46:08 PM	H2 MFC set to  0.000000
2/13/2013	6:46:08 PM	BCl3 MFC set to  0.000000
2/13/2013	6:46:08 PM	PH3 MFC set to  0.000000
2/13/2013	6:46:08 PM	SiCl4 MFC set to  0.000000
2/13/2013	6:46:08 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	6:46:08 PM	Tube furnace set to 200
2/13/2013	6:46:38 PM	Helium valve closed
2/13/2013	6:46:38 PM	H2 valve closed
2/13/2013	6:46:38 PM	BCl3 valve closed
2/13/2013	6:46:38 PM	PH3 valve closed
2/13/2013	6:46:38 PM	SiCl4 pre valve closed
2/13/2013	6:46:38 PM	SiCl4 post valve closed
2/13/2013	6:46:38 PM	Bypass valve closed
2/13/2013	6:46:38 PM	Bubbler valve closed
2/13/2013	6:46:38 PM	Main Vac valve opened
2/13/2013	6:46:38 PM	Helium MFC set to  0.000000
2/13/2013	6:46:38 PM	H2 MFC set to  0.000000
2/13/2013	6:46:38 PM	BCl3 MFC set to  0.000000
2/13/2013	6:46:38 PM	PH3 MFC set to  0.000000
2/13/2013	6:46:38 PM	SiCl4 MFC set to  0.000000
2/13/2013	6:46:38 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	6:46:38 PM	Tube furnace set to 200
2/13/2013	6:47:08 PM	H2 valve closed
2/13/2013	6:47:08 PM	BCl3 valve closed
2/13/2013	6:47:08 PM	PH3 valve closed
2/13/2013	6:47:08 PM	SiCl4 pre valve closed
2/13/2013	6:47:08 PM	SiCl4 post valve closed
2/13/2013	6:47:08 PM	Bypass valve closed
2/13/2013	6:47:08 PM	Bubbler valve closed
2/13/2013	6:47:08 PM	Helium valve opened
2/13/2013	6:47:08 PM	Main Vac valve opened
2/13/2013	6:47:08 PM	Helium MFC set to  20.000000
2/13/2013	6:47:08 PM	H2 MFC set to  0.000000
2/13/2013	6:47:08 PM	BCl3 MFC set to  0.000000
2/13/2013	6:47:08 PM	PH3 MFC set to  0.000000
2/13/2013	6:47:08 PM	SiCl4 MFC set to  0.000000
2/13/2013	6:47:08 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	6:47:08 PM	Tube furnace set to 200
2/13/2013	6:47:38 PM	Helium valve closed
2/13/2013	6:47:38 PM	H2 valve closed
2/13/2013	6:47:38 PM	BCl3 valve closed
2/13/2013	6:47:38 PM	PH3 valve closed
2/13/2013	6:47:38 PM	SiCl4 pre valve closed
2/13/2013	6:47:38 PM	SiCl4 post valve closed
2/13/2013	6:47:38 PM	Bypass valve closed
2/13/2013	6:47:38 PM	Bubbler valve closed
2/13/2013	6:47:38 PM	Main Vac valve opened
2/13/2013	6:47:38 PM	Helium MFC set to  0.000000
2/13/2013	6:47:38 PM	H2 MFC set to  0.000000
2/13/2013	6:47:38 PM	BCl3 MFC set to  0.000000
2/13/2013	6:47:38 PM	PH3 MFC set to  0.000000
2/13/2013	6:47:38 PM	SiCl4 MFC set to  0.000000
2/13/2013	6:47:38 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	6:47:38 PM	Tube furnace set to 200
2/13/2013	6:48:09 PM	H2 valve closed
2/13/2013	6:48:09 PM	BCl3 valve closed
2/13/2013	6:48:09 PM	PH3 valve closed
2/13/2013	6:48:09 PM	SiCl4 pre valve closed
2/13/2013	6:48:09 PM	SiCl4 post valve closed
2/13/2013	6:48:09 PM	Bypass valve closed
2/13/2013	6:48:09 PM	Bubbler valve closed
2/13/2013	6:48:09 PM	Helium valve opened
2/13/2013	6:48:09 PM	Main Vac valve opened
2/13/2013	6:48:09 PM	Helium MFC set to  20.000000
2/13/2013	6:48:09 PM	H2 MFC set to  0.000000
2/13/2013	6:48:09 PM	BCl3 MFC set to  0.000000
2/13/2013	6:48:09 PM	PH3 MFC set to  0.000000
2/13/2013	6:48:09 PM	SiCl4 MFC set to  0.000000
2/13/2013	6:48:09 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	6:48:09 PM	Tube furnace set to 200
2/13/2013	6:48:39 PM	Helium valve closed
2/13/2013	6:48:39 PM	H2 valve closed
2/13/2013	6:48:39 PM	BCl3 valve closed
2/13/2013	6:48:39 PM	PH3 valve closed
2/13/2013	6:48:39 PM	SiCl4 pre valve closed
2/13/2013	6:48:39 PM	SiCl4 post valve closed
2/13/2013	6:48:39 PM	Bypass valve closed
2/13/2013	6:48:39 PM	Bubbler valve closed
2/13/2013	6:48:39 PM	Main Vac valve opened
2/13/2013	6:48:39 PM	Helium MFC set to  0.000000
2/13/2013	6:48:39 PM	H2 MFC set to  0.000000
2/13/2013	6:48:39 PM	BCl3 MFC set to  0.000000
2/13/2013	6:48:39 PM	PH3 MFC set to  0.000000
2/13/2013	6:48:39 PM	SiCl4 MFC set to  0.000000
2/13/2013	6:48:39 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	6:48:39 PM	Tube furnace set to 200
2/13/2013	6:49:09 PM	H2 valve closed
2/13/2013	6:49:09 PM	BCl3 valve closed
2/13/2013	6:49:09 PM	PH3 valve closed
2/13/2013	6:49:09 PM	SiCl4 pre valve closed
2/13/2013	6:49:09 PM	SiCl4 post valve closed
2/13/2013	6:49:09 PM	Bypass valve closed
2/13/2013	6:49:09 PM	Bubbler valve closed
2/13/2013	6:49:09 PM	Helium valve opened
2/13/2013	6:49:09 PM	Main Vac valve opened
2/13/2013	6:49:09 PM	Helium MFC set to  20.000000
2/13/2013	6:49:09 PM	H2 MFC set to  0.000000
2/13/2013	6:49:09 PM	BCl3 MFC set to  0.000000
2/13/2013	6:49:09 PM	PH3 MFC set to  0.000000
2/13/2013	6:49:09 PM	SiCl4 MFC set to  0.000000
2/13/2013	6:49:09 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	6:49:09 PM	Tube furnace set to 200
2/13/2013	6:49:39 PM	Helium valve closed
2/13/2013	6:49:39 PM	H2 valve closed
2/13/2013	6:49:39 PM	BCl3 valve closed
2/13/2013	6:49:39 PM	PH3 valve closed
2/13/2013	6:49:39 PM	SiCl4 pre valve closed
2/13/2013	6:49:39 PM	SiCl4 post valve closed
2/13/2013	6:49:39 PM	Bypass valve closed
2/13/2013	6:49:39 PM	Bubbler valve closed
2/13/2013	6:49:39 PM	Main Vac valve opened
2/13/2013	6:49:39 PM	Helium MFC set to  0.000000
2/13/2013	6:49:39 PM	H2 MFC set to  0.000000
2/13/2013	6:49:39 PM	BCl3 MFC set to  0.000000
2/13/2013	6:49:39 PM	PH3 MFC set to  0.000000
2/13/2013	6:49:39 PM	SiCl4 MFC set to  0.000000
2/13/2013	6:49:39 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	6:49:40 PM	Tube furnace set to 200
2/13/2013	6:50:10 PM	H2 valve closed
2/13/2013	6:50:10 PM	BCl3 valve closed
2/13/2013	6:50:10 PM	PH3 valve closed
2/13/2013	6:50:10 PM	SiCl4 pre valve closed
2/13/2013	6:50:10 PM	SiCl4 post valve closed
2/13/2013	6:50:10 PM	Bypass valve closed
2/13/2013	6:50:10 PM	Bubbler valve closed
2/13/2013	6:50:10 PM	Helium valve opened
2/13/2013	6:50:10 PM	Main Vac valve opened
2/13/2013	6:50:10 PM	Helium MFC set to  20.000000
2/13/2013	6:50:10 PM	H2 MFC set to  0.000000
2/13/2013	6:50:10 PM	BCl3 MFC set to  0.000000
2/13/2013	6:50:10 PM	PH3 MFC set to  0.000000
2/13/2013	6:50:10 PM	SiCl4 MFC set to  0.000000
2/13/2013	6:50:10 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	6:50:10 PM	Tube furnace set to 200
2/13/2013	6:50:40 PM	Helium valve closed
2/13/2013	6:50:40 PM	H2 valve closed
2/13/2013	6:50:40 PM	BCl3 valve closed
2/13/2013	6:50:40 PM	PH3 valve closed
2/13/2013	6:50:40 PM	SiCl4 pre valve closed
2/13/2013	6:50:40 PM	SiCl4 post valve closed
2/13/2013	6:50:40 PM	Bypass valve closed
2/13/2013	6:50:40 PM	Bubbler valve closed
2/13/2013	6:50:40 PM	Main Vac valve opened
2/13/2013	6:50:40 PM	Helium MFC set to  0.000000
2/13/2013	6:50:40 PM	H2 MFC set to  0.000000
2/13/2013	6:50:40 PM	BCl3 MFC set to  0.000000
2/13/2013	6:50:40 PM	PH3 MFC set to  0.000000
2/13/2013	6:50:40 PM	SiCl4 MFC set to  0.000000
2/13/2013	6:50:40 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	6:50:40 PM	Tube furnace set to 200
2/13/2013	6:51:10 PM	H2 valve closed
2/13/2013	6:51:10 PM	BCl3 valve closed
2/13/2013	6:51:10 PM	PH3 valve closed
2/13/2013	6:51:10 PM	SiCl4 pre valve closed
2/13/2013	6:51:10 PM	SiCl4 post valve closed
2/13/2013	6:51:10 PM	Bypass valve closed
2/13/2013	6:51:10 PM	Bubbler valve closed
2/13/2013	6:51:10 PM	Helium valve opened
2/13/2013	6:51:10 PM	Main Vac valve opened
2/13/2013	6:51:10 PM	Helium MFC set to  20.000000
2/13/2013	6:51:10 PM	H2 MFC set to  0.000000
2/13/2013	6:51:10 PM	BCl3 MFC set to  0.000000
2/13/2013	6:51:10 PM	PH3 MFC set to  0.000000
2/13/2013	6:51:10 PM	SiCl4 MFC set to  0.000000
2/13/2013	6:51:10 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	6:51:10 PM	Tube furnace set to 200
2/13/2013	6:51:40 PM	Helium valve closed
2/13/2013	6:51:40 PM	H2 valve closed
2/13/2013	6:51:40 PM	BCl3 valve closed
2/13/2013	6:51:40 PM	PH3 valve closed
2/13/2013	6:51:40 PM	SiCl4 pre valve closed
2/13/2013	6:51:40 PM	SiCl4 post valve closed
2/13/2013	6:51:40 PM	Bypass valve closed
2/13/2013	6:51:40 PM	Bubbler valve closed
2/13/2013	6:51:40 PM	Main Vac valve opened
2/13/2013	6:51:40 PM	Helium MFC set to  0.000000
2/13/2013	6:51:40 PM	H2 MFC set to  0.000000
2/13/2013	6:51:40 PM	BCl3 MFC set to  0.000000
2/13/2013	6:51:40 PM	PH3 MFC set to  0.000000
2/13/2013	6:51:40 PM	SiCl4 MFC set to  0.000000
2/13/2013	6:51:40 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	6:51:41 PM	Tube furnace set to 0
2/13/2013	6:51:42 PM	Run finished at 6:51 PM
2/13/2013	6:53:26 PM	Main Vac valve closed
2/13/2013	6:53:41 PM	Main Vac valve opened
2/13/2013	6:54:29 PM	Recipe started at 6:54 PM
2/13/2013	6:54:29 PM	Helium valve closed
2/13/2013	6:54:29 PM	H2 valve closed
2/13/2013	6:54:29 PM	BCl3 valve closed
2/13/2013	6:54:29 PM	PH3 valve closed
2/13/2013	6:54:29 PM	SiCl4 pre valve closed
2/13/2013	6:54:29 PM	SiCl4 post valve closed
2/13/2013	6:54:29 PM	Main Vac valve closed
2/13/2013	6:54:29 PM	Bypass valve closed
2/13/2013	6:54:29 PM	Bubbler valve closed
2/13/2013	6:54:29 PM	Helium MFC set to  0.000000
2/13/2013	6:54:29 PM	H2 MFC set to  0.000000
2/13/2013	6:54:29 PM	BCl3 MFC set to  0.000000
2/13/2013	6:54:29 PM	PH3 MFC set to  0.000000
2/13/2013	6:54:29 PM	SiCl4 MFC set to  0.000000
2/13/2013	6:54:29 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	6:54:30 PM	Tube furnace set to 0
2/13/2013	6:54:33 PM	Helium valve closed
2/13/2013	6:54:33 PM	BCl3 valve closed
2/13/2013	6:54:33 PM	PH3 valve closed
2/13/2013	6:54:33 PM	SiCl4 pre valve closed
2/13/2013	6:54:33 PM	SiCl4 post valve closed
2/13/2013	6:54:33 PM	Main Vac valve closed
2/13/2013	6:54:33 PM	Bypass valve closed
2/13/2013	6:54:33 PM	Bubbler valve closed
2/13/2013	6:54:33 PM	H2 valve opened
2/13/2013	6:54:33 PM	Helium MFC set to  0.000000
2/13/2013	6:54:33 PM	H2 MFC set to  500.000000
2/13/2013	6:54:33 PM	BCl3 MFC set to  0.000000
2/13/2013	6:54:33 PM	PH3 MFC set to  0.000000
2/13/2013	6:54:33 PM	SiCl4 MFC set to  0.000000
2/13/2013	6:54:33 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	6:54:33 PM	Tube furnace set to 0
2/13/2013	6:55:44 PM	Helium valve closed
2/13/2013	6:55:44 PM	BCl3 valve closed
2/13/2013	6:55:44 PM	PH3 valve closed
2/13/2013	6:55:44 PM	SiCl4 pre valve closed
2/13/2013	6:55:44 PM	SiCl4 post valve closed
2/13/2013	6:55:44 PM	Main Vac valve closed
2/13/2013	6:55:44 PM	Bypass valve closed
2/13/2013	6:55:44 PM	H2 valve opened
2/13/2013	6:55:44 PM	Bubbler valve opened
2/13/2013	6:55:44 PM	Helium MFC set to  0.000000
2/13/2013	6:55:44 PM	H2 MFC set to  500.000000
2/13/2013	6:55:44 PM	BCl3 MFC set to  0.000000
2/13/2013	6:55:44 PM	PH3 MFC set to  0.000000
2/13/2013	6:55:44 PM	SiCl4 MFC set to  0.000000
2/13/2013	6:55:44 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	6:55:44 PM	Tube furnace set to 0
2/13/2013	6:55:45 PM	Helium valve closed
2/13/2013	6:55:45 PM	BCl3 valve closed
2/13/2013	6:55:45 PM	PH3 valve closed
2/13/2013	6:55:45 PM	SiCl4 pre valve closed
2/13/2013	6:55:45 PM	SiCl4 post valve closed
2/13/2013	6:55:45 PM	Main Vac valve closed
2/13/2013	6:55:45 PM	Bypass valve closed
2/13/2013	6:55:45 PM	H2 valve opened
2/13/2013	6:55:45 PM	Bubbler valve opened
2/13/2013	6:55:45 PM	Helium MFC set to  0.000000
2/13/2013	6:55:45 PM	H2 MFC set to  500.000000
2/13/2013	6:55:45 PM	BCl3 MFC set to  0.000000
2/13/2013	6:55:45 PM	PH3 MFC set to  0.000000
2/13/2013	6:55:45 PM	SiCl4 MFC set to  0.000000
2/13/2013	6:55:45 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	6:55:45 PM	Tube furnace set to 1000
2/13/2013	7:15:45 PM	Helium valve closed
2/13/2013	7:15:45 PM	PH3 valve closed
2/13/2013	7:15:45 PM	Main Vac valve closed
2/13/2013	7:15:45 PM	Bypass valve closed
2/13/2013	7:15:45 PM	H2 valve opened
2/13/2013	7:15:45 PM	BCl3 valve opened
2/13/2013	7:15:45 PM	SiCl4 pre valve opened
2/13/2013	7:15:45 PM	SiCl4 post valve opened
2/13/2013	7:15:45 PM	Bubbler valve opened
2/13/2013	7:15:45 PM	Helium MFC set to  0.000000
2/13/2013	7:15:45 PM	H2 MFC set to  450.000000
2/13/2013	7:15:45 PM	BCl3 MFC set to  1.500000
2/13/2013	7:15:45 PM	PH3 MFC set to  0.000000
2/13/2013	7:15:45 PM	SiCl4 MFC set to  50.000000
2/13/2013	7:15:45 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	7:15:45 PM	Tube furnace set to 1000
2/13/2013	7:25:45 PM	Helium valve closed
2/13/2013	7:25:45 PM	BCl3 valve closed
2/13/2013	7:25:45 PM	PH3 valve closed
2/13/2013	7:25:45 PM	SiCl4 pre valve closed
2/13/2013	7:25:45 PM	SiCl4 post valve closed
2/13/2013	7:25:45 PM	Main Vac valve closed
2/13/2013	7:25:45 PM	Bypass valve closed
2/13/2013	7:25:45 PM	H2 valve opened
2/13/2013	7:25:45 PM	Bubbler valve opened
2/13/2013	7:25:45 PM	Helium MFC set to  0.000000
2/13/2013	7:25:45 PM	H2 MFC set to  500.000000
2/13/2013	7:25:45 PM	BCl3 MFC set to  0.000000
2/13/2013	7:25:45 PM	PH3 MFC set to  0.000000
2/13/2013	7:25:45 PM	SiCl4 MFC set to  0.000000
2/13/2013	7:25:45 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	7:25:45 PM	Tube furnace set to 950
2/13/2013	7:27:45 PM	Helium valve closed
2/13/2013	7:27:45 PM	BCl3 valve closed
2/13/2013	7:27:45 PM	PH3 valve closed
2/13/2013	7:27:45 PM	SiCl4 pre valve closed
2/13/2013	7:27:45 PM	SiCl4 post valve closed
2/13/2013	7:27:45 PM	Main Vac valve closed
2/13/2013	7:27:45 PM	Bypass valve closed
2/13/2013	7:27:45 PM	H2 valve opened
2/13/2013	7:27:45 PM	Bubbler valve opened
2/13/2013	7:27:45 PM	Helium MFC set to  0.000000
2/13/2013	7:27:45 PM	H2 MFC set to  500.000000
2/13/2013	7:27:45 PM	BCl3 MFC set to  0.000000
2/13/2013	7:27:46 PM	PH3 MFC set to  0.000000
2/13/2013	7:27:46 PM	SiCl4 MFC set to  0.000000
2/13/2013	7:27:46 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	7:27:46 PM	Tube furnace set to 900
2/13/2013	7:29:46 PM	Helium valve closed
2/13/2013	7:29:46 PM	BCl3 valve closed
2/13/2013	7:29:46 PM	PH3 valve closed
2/13/2013	7:29:46 PM	SiCl4 pre valve closed
2/13/2013	7:29:46 PM	SiCl4 post valve closed
2/13/2013	7:29:46 PM	Main Vac valve closed
2/13/2013	7:29:46 PM	Bypass valve closed
2/13/2013	7:29:46 PM	H2 valve opened
2/13/2013	7:29:46 PM	Bubbler valve opened
2/13/2013	7:29:46 PM	Helium MFC set to  0.000000
2/13/2013	7:29:46 PM	H2 MFC set to  500.000000
2/13/2013	7:29:46 PM	BCl3 MFC set to  0.000000
2/13/2013	7:29:46 PM	PH3 MFC set to  0.000000
2/13/2013	7:29:46 PM	SiCl4 MFC set to  0.000000
2/13/2013	7:29:46 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	7:29:46 PM	Tube furnace set to 850
2/13/2013	7:31:46 PM	H2 valve closed
2/13/2013	7:31:46 PM	BCl3 valve closed
2/13/2013	7:31:46 PM	PH3 valve closed
2/13/2013	7:31:46 PM	SiCl4 pre valve closed
2/13/2013	7:31:46 PM	SiCl4 post valve closed
2/13/2013	7:31:46 PM	Main Vac valve closed
2/13/2013	7:31:46 PM	Bypass valve closed
2/13/2013	7:31:46 PM	Helium valve opened
2/13/2013	7:31:46 PM	Bubbler valve opened
2/13/2013	7:31:46 PM	Helium MFC set to  500.000000
2/13/2013	7:31:46 PM	H2 MFC set to  0.000000
2/13/2013	7:31:46 PM	BCl3 MFC set to  0.000000
2/13/2013	7:31:46 PM	PH3 MFC set to  0.000000
2/13/2013	7:31:46 PM	SiCl4 MFC set to  0.000000
2/13/2013	7:31:46 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	7:31:46 PM	Tube furnace set to 800
2/13/2013	7:33:46 PM	H2 valve closed
2/13/2013	7:33:46 PM	BCl3 valve closed
2/13/2013	7:33:46 PM	PH3 valve closed
2/13/2013	7:33:46 PM	SiCl4 pre valve closed
2/13/2013	7:33:46 PM	SiCl4 post valve closed
2/13/2013	7:33:46 PM	Main Vac valve closed
2/13/2013	7:33:46 PM	Bypass valve closed
2/13/2013	7:33:46 PM	Helium valve opened
2/13/2013	7:33:46 PM	Bubbler valve opened
2/13/2013	7:33:46 PM	Helium MFC set to  500.000000
2/13/2013	7:33:46 PM	H2 MFC set to  0.000000
2/13/2013	7:33:46 PM	BCl3 MFC set to  0.000000
2/13/2013	7:33:46 PM	PH3 MFC set to  0.000000
2/13/2013	7:33:46 PM	SiCl4 MFC set to  0.000000
2/13/2013	7:33:46 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	7:33:46 PM	Tube furnace set to 750
2/13/2013	7:35:46 PM	H2 valve closed
2/13/2013	7:35:46 PM	BCl3 valve closed
2/13/2013	7:35:46 PM	PH3 valve closed
2/13/2013	7:35:46 PM	SiCl4 pre valve closed
2/13/2013	7:35:46 PM	SiCl4 post valve closed
2/13/2013	7:35:46 PM	Main Vac valve closed
2/13/2013	7:35:46 PM	Bypass valve closed
2/13/2013	7:35:46 PM	Helium valve opened
2/13/2013	7:35:46 PM	Bubbler valve opened
2/13/2013	7:35:46 PM	Helium MFC set to  500.000000
2/13/2013	7:35:46 PM	H2 MFC set to  0.000000
2/13/2013	7:35:46 PM	BCl3 MFC set to  0.000000
2/13/2013	7:35:46 PM	PH3 MFC set to  0.000000
2/13/2013	7:35:46 PM	SiCl4 MFC set to  0.000000
2/13/2013	7:35:46 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	7:35:47 PM	Tube furnace set to 0
2/13/2013	7:55:47 PM	Helium valve closed
2/13/2013	7:55:47 PM	H2 valve closed
2/13/2013	7:55:47 PM	BCl3 valve closed
2/13/2013	7:55:47 PM	PH3 valve closed
2/13/2013	7:55:47 PM	SiCl4 pre valve closed
2/13/2013	7:55:47 PM	SiCl4 post valve closed
2/13/2013	7:55:47 PM	Main Vac valve closed
2/13/2013	7:55:47 PM	Bypass valve closed
2/13/2013	7:55:47 PM	Bubbler valve closed
2/13/2013	7:55:47 PM	Helium MFC set to  0.000000
2/13/2013	7:55:47 PM	H2 MFC set to  0.000000
2/13/2013	7:55:47 PM	BCl3 MFC set to  0.000000
2/13/2013	7:55:47 PM	PH3 MFC set to  0.000000
2/13/2013	7:55:47 PM	SiCl4 MFC set to  0.000000
2/13/2013	7:55:47 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	7:55:47 PM	Tube furnace set to 0
2/13/2013	7:55:48 PM	Run finished at 7:55 PM
2/13/2013	9:46:45 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/13/2013	9:46:45 PM	Recipe started at 9:46 PM
2/13/2013	9:46:45 PM	Helium valve closed
2/13/2013	9:46:45 PM	H2 valve closed
2/13/2013	9:46:45 PM	BCl3 valve closed
2/13/2013	9:46:45 PM	PH3 valve closed
2/13/2013	9:46:45 PM	SiCl4 pre valve closed
2/13/2013	9:46:45 PM	SiCl4 post valve closed
2/13/2013	9:46:45 PM	Main Vac valve closed
2/13/2013	9:46:45 PM	Bypass valve closed
2/13/2013	9:46:45 PM	Bubbler valve closed
2/13/2013	9:46:45 PM	Helium MFC set to  0.000000
2/13/2013	9:46:45 PM	H2 MFC set to  0.000000
2/13/2013	9:46:45 PM	BCl3 MFC set to  0.000000
2/13/2013	9:46:45 PM	PH3 MFC set to  0.000000
2/13/2013	9:46:45 PM	SiCl4 MFC set to  0.000000
2/13/2013	9:46:45 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	9:46:45 PM	Tube furnace set to 0
2/13/2013	9:46:48 PM	H2 valve closed
2/13/2013	9:46:48 PM	BCl3 valve closed
2/13/2013	9:46:48 PM	PH3 valve closed
2/13/2013	9:46:48 PM	SiCl4 pre valve closed
2/13/2013	9:46:48 PM	SiCl4 post valve closed
2/13/2013	9:46:48 PM	Main Vac valve closed
2/13/2013	9:46:48 PM	Bypass valve closed
2/13/2013	9:46:48 PM	Bubbler valve closed
2/13/2013	9:46:48 PM	Helium valve opened
2/13/2013	9:46:48 PM	Helium MFC set to  500.000000
2/13/2013	9:46:48 PM	H2 MFC set to  0.000000
2/13/2013	9:46:48 PM	BCl3 MFC set to  0.000000
2/13/2013	9:46:48 PM	PH3 MFC set to  0.000000
2/13/2013	9:46:48 PM	SiCl4 MFC set to  0.000000
2/13/2013	9:46:48 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	9:46:49 PM	Tube furnace set to 0
2/13/2013	9:46:53 PM	Helium valve closed
2/13/2013	9:46:53 PM	H2 valve closed
2/13/2013	9:46:53 PM	BCl3 valve closed
2/13/2013	9:46:53 PM	PH3 valve closed
2/13/2013	9:46:53 PM	SiCl4 pre valve closed
2/13/2013	9:46:53 PM	SiCl4 post valve closed
2/13/2013	9:46:53 PM	Main Vac valve closed
2/13/2013	9:46:53 PM	Bypass valve closed
2/13/2013	9:46:53 PM	Bubbler valve closed
2/13/2013	9:46:53 PM	Helium MFC set to  0.000000
2/13/2013	9:46:53 PM	H2 MFC set to  0.000000
2/13/2013	9:46:53 PM	BCl3 MFC set to  0.000000
2/13/2013	9:46:53 PM	PH3 MFC set to  0.000000
2/13/2013	9:46:53 PM	SiCl4 MFC set to  0.000000
2/13/2013	9:46:53 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	9:46:53 PM	Tube furnace set to 0
2/13/2013	9:46:54 PM	Run finished at 9:46 PM
2/13/2013	9:46:54 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/13/2013	10:08:02 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/13/2013	10:08:02 PM	Recipe started at 10:08 PM
2/13/2013	10:08:02 PM	Helium valve closed
2/13/2013	10:08:03 PM	H2 valve closed
2/13/2013	10:08:03 PM	BCl3 valve closed
2/13/2013	10:08:03 PM	PH3 valve closed
2/13/2013	10:08:03 PM	SiCl4 pre valve closed
2/13/2013	10:08:03 PM	SiCl4 post valve closed
2/13/2013	10:08:03 PM	Main Vac valve closed
2/13/2013	10:08:03 PM	Bubbler valve closed
2/13/2013	10:08:03 PM	Bypass valve opened
2/13/2013	10:08:03 PM	Helium MFC set to  0.000000
2/13/2013	10:08:03 PM	H2 MFC set to  0.000000
2/13/2013	10:08:03 PM	BCl3 MFC set to  0.000000
2/13/2013	10:08:03 PM	PH3 MFC set to  0.000000
2/13/2013	10:08:03 PM	SiCl4 MFC set to  0.000000
2/13/2013	10:08:03 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	10:08:03 PM	Tube furnace set to 0
2/13/2013	10:09:20 PM	Helium valve closed
2/13/2013	10:09:20 PM	H2 valve closed
2/13/2013	10:09:20 PM	BCl3 valve closed
2/13/2013	10:09:20 PM	PH3 valve closed
2/13/2013	10:09:20 PM	SiCl4 pre valve closed
2/13/2013	10:09:20 PM	SiCl4 post valve closed
2/13/2013	10:09:20 PM	Main Vac valve closed
2/13/2013	10:09:20 PM	Bubbler valve closed
2/13/2013	10:09:20 PM	Bypass valve opened
2/13/2013	10:09:20 PM	Helium MFC set to  0.000000
2/13/2013	10:09:20 PM	H2 MFC set to  0.000000
2/13/2013	10:09:20 PM	BCl3 MFC set to  0.000000
2/13/2013	10:09:20 PM	PH3 MFC set to  0.000000
2/13/2013	10:09:20 PM	SiCl4 MFC set to  0.000000
2/13/2013	10:09:20 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	10:09:20 PM	Tube furnace set to 0
2/13/2013	10:10:20 PM	Helium valve closed
2/13/2013	10:10:20 PM	H2 valve closed
2/13/2013	10:10:20 PM	BCl3 valve closed
2/13/2013	10:10:20 PM	PH3 valve closed
2/13/2013	10:10:20 PM	SiCl4 pre valve closed
2/13/2013	10:10:20 PM	SiCl4 post valve closed
2/13/2013	10:10:20 PM	Bypass valve closed
2/13/2013	10:10:20 PM	Bubbler valve closed
2/13/2013	10:10:20 PM	Main Vac valve opened
2/13/2013	10:10:20 PM	Helium MFC set to  0.000000
2/13/2013	10:10:20 PM	H2 MFC set to  0.000000
2/13/2013	10:10:20 PM	BCl3 MFC set to  0.000000
2/13/2013	10:10:20 PM	PH3 MFC set to  0.000000
2/13/2013	10:10:20 PM	SiCl4 MFC set to  0.000000
2/13/2013	10:10:20 PM	Bypass solenoid MFC set to  0.000000
2/13/2013	10:10:20 PM	Tube furnace set to 0
2/13/2013	10:10:21 PM	Run finished at 10:10 PM
2/13/2013	10:10:21 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
